• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.153-153
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• 2012

Endpoint detection with plasma impedance monitoring and self-plasma optical emission spectroscopy is demonstrated for dielectric layers etching processes. For in-situ detecting endpoint, optical-emission spectroscopy (OES) is used for in-situ endpoint detection for plasma etching. However, the sensitivity of OES is decreased if polymer is deposited on viewport or the proportion of exposed area on the wafer is too small. To overcome these problems, the endpoint was determined by impedance signal variation from I-V monitoring (VI probe) and self-plasma optical emission spectroscopy. In addition, modified principal component analysis was applied to enhance sensitivity for small area etching. As a result, the sensitivity of this method is increased about twice better than that of OES. From plasma impedance monitoring and self-plasma optical emission spectroscopy, properties of plasma and chamber are analyzed, and real-time endpoint detection is achieved.

• Journal of Biosystems Engineering
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• v.33 no.4
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• pp.269-275
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• 2008

This study was conducted to design an impedance sensor that can measure soil water content of soils. Partial least square regression (PLSR) was applied to soil impedance data preprocessed with a smoothing method. An optimal sub-spectrum size and wavelength range were determined by comparing the coefficient of determination ($R^2$) and root mean square error (RMSE) of the PLSR models obtained using soil impedance data. various PLS analysis. Based on the PLSR analysis, it would be concluded that the optimal spectrum measurement range was $32.0{\sim}50.0\;MHz$ with the optimal sub-spectrum size of about 18.5 MHz.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.182-182
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• 2012

Plasma etching is used in various semiconductor processing steps. In plasma etcher, optical- emission spectroscopy (OES) is widely used for in-situ endpoint detection. However, the sensitivity of OES is decreased if polymer is deposited on viewport or the proportion of exposed area on the wafer is too small. Because of these problems, the object is to investigate the suitability of using plasma impedance monitoring (PIM) and self plasma optical emission spectrocopy (SPOES) with statistical approach for in-situ endpoint detection. The endpoint was determined by impedance signal variation from I-V monitor (VI probe) and optical emission signal from SPOES. However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ and SiNx layers are etched by fluorocarbon on inductive coupled plasma (ICP) etcher, if the proportion of $SiO_2$ and SiNx area on Si wafer are small. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance monitoring is compared with optical emission spectroscopy.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.27-28
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• 2009

In this study, we have fabricated the 3 wt% $Li_2CO3$ doped $(Ba,Sr)TiO_3$ thick films on the Ag/Pd printed $Al_2O_3$ substrates for the LTCCs (Low Temperature Co-fired Ceramics) applications. From the X-ray diffraion analysis, 3 wt% $Li_2CO3$ doped BST thick films on the Ag/Pd printed $Al_2O_3$ substrates, which sintered at 900 $^{\circ}C$ have perovskite structure without any pyro phase. The dielectric properties of 3 wt% $Li_2CO3$ doped BST thick films were measured from 1 kHz to 1 MHz. To investigate the electrical properties of 3 wt% $Li_2CO3$ doped BST thick films, we employed the impedance spectroscopy. The complex impedance of 3 wt% $Li_2CO3$ doped BST thick films were measured from 20 Hz to 1 MHz at the various temperatures.

• Journal of the Korean Ceramic Society
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• v.49 no.3
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• pp.260-265
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• 2012

Impedance spectroscopy was used to monitor the hydration in the electrical/dielectric behaviors of chemical mechanical planarization (CMP)-blended cement mixtures. The electrical responses were analyzed using their equivalent circuit models, leading to the separation of the bulk and electrode based responses. The role of the CMP slurry was monitored as a function of the relative compositions of the CMP-blended cements, i.e. water, CMP slurry, and ordinary Portland cement. The presence of $Al_2O_3$ nanocrystals in the CMP slurries appeared to accelerate the hydration process, along with a more tortuous microstructure in the hydration, with enhanced hydration products. The frequency-dependent impedance spectroscopy was proven to be a highly efficient approach for evaluating the electrical/dielectric monitoring of the change in the pore structure evolution that occurs in CMP-blended cements.

• Journal of the Korean Ceramic Society
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• v.50 no.2
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• pp.163-167
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• 2013

A modified two-point impedance spectroscopy technique exploits the geometric constriction between an electrolyte and a cathode with an emphasis on semispherical-shaped electrolytes. The spatial limitation in the electrolyte/electrode interface leads to local amplification of the electrochemical reaction occurring in the corresponding electrolyte/electrode region. The modified impedance spectroscopy was applied to electrical monitoring of a YSZ ($Y_2O_3$-stabilized $ZrO_2$)/SSC ($Sm_{0.5}Sr_{0.5}CoO_3$) system. The resolved bulk and interfacial component was numerically analyzed in combination with an equivalent circuit model. The effectiveness of the "spreading resistance" concept is validated by analysis of the electrode polarization in the cathode materials of solid oxide fuel cells.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.452-453
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• 2007

In this work, enhanced simulation is proposed by using impedance spectroscopy. The impedance spectroscopy is one of the popular methods to measure the electrical property of Organic Light Emitting Diodes. The results show that the equivalent circuit needs a inductance element linked by serial connection and the element of resistance is more important role to decide the electrical property.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.137-140
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• 2002

The frequency response analysis of complex impedance spectra using small perturbation ac impedance spectroscopy is an informative method of OLED performance characterization and lifetime analysis. Using simple RC equivalent circuit mode,l macroscopic nonliniear transport properties of semiconductive emission/transport layers can be analyzed and parameterized. We present the bias voltage dependence and aging effect in impedance spectra measured from an ITO/CuPC/TPD/$Alq_3$/LiF/Al OLED device, and discuss possible failure mechanism based on impedance model parameters.

• Journal of Electrochemical Science and Technology
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• v.3 no.4
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• pp.154-158
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• 2012

It is generally known that electrochemical impedance spectroscopy is a powerful technique and its real-time application has been demanded for prompt observations on instantaneous electrochemical changes. Nevertheless, long measurement time and laborious analysis procedures have hindered development of it. Solving the problems, here I report of a new algorithm design for development of a real-time electrochemical impedance monitoring system, which potentially provides a guideline in developing monitoring systems of electric vehicles batteries and other electrochemical power plants. The significant progress in this report is employment of the parallel processing protocol which connects independent sub functions to successfully operate with avoiding mutual interruptions. Therefore, all the processes required to monitor electrochemical impedance changes in realtime are properly operated. To realize the conceptual scheme, a Labview program was coded with sub functions units which conduct their processes individually and only data are transferred between them through the parallel pipelines. Finally, measured impedance spectra and analysis results are displayed, which are synchronized according to the time of change.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.506-508
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• 2008

In this work, we used impedance spectroscopy analysis to determine the effect of the $HfO_X$ treatment on the surface of ITO and to model the equivalent circuit for OLEDs. Devices with an ITO/Organic material/Al structure can be modeled as resistances and capacitances arranged in parallel or in series. The number of elements depends on the composition of the structure, essentially the number of layers, and the contacts.