• 제목/요약/키워드: ITO Surface Treatment

검색결과 98건 처리시간 0.034초

투명 전극 ITO 박막의 열처리 영향과 플라즈마 응용 표시소자 제작에 관한 연구 (Optically Transparent ITO Film and the Fabrication of Plasma Signboard)

  • 조영제;김재관;한승철;곽준섭;이지면
    • 대한금속재료학회지
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    • 제47권1호
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    • pp.44-49
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    • 2009
  • 본 연구에서는 2인치 ITO의 타깃으로 ITO박막을 성장시킨 후 RTA 처리로 인한 전기적, 광학적 특성의 변화를 조사하였으며, RTA 처리된 ITO 박막을 이용하여 플라즈마 응용 사인보드를 제작 및 구동하였다. RTA공정으로 열처리한 ITO는 투과도는 증가하며, 비저항은 감소함을 관찰하였으며, 투과도의 증가는 RTA로 인한 결정성의 증가로 인한 결과이고, 비저항의 감소는 결정성의 증가와 더불어 치환형 주석의 원자수가 증가하였다고 사료된다. ITO를 이용하여 사인보드 제작시 방전cell의 압력은 3-5 Torr가 적당함을 알 수 있었으며, 전극 간격을 조절하여 120 V 정도의 낮은 플라즈마 개시 전압을 갖는 플라즈마 응용 사인보드를 성공적으로 제작 할 수 있었다.

녹색 발광 OLED의 전기적 특성 (Electrical Properties of Green Emitting OLED)

  • 홍경진;기현철;김상기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.301-302
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    • 2009
  • The Green emitting OLED was fabricated with the structure of ITO(plasm treatment)/TPD($400\;{\AA}$)/$Alq_3(600\;{\AA})$/LiF($5\;{\AA}$)/Al($1200\;{\AA}$). Turn-on voltage of PMOLED was 7 V and luminance was 7,371 cd/$m^2$ at the RF power of 25W. O2 plasma treatment of ITO surface was result in lowering the operating voltage and improving luminance of green OLED.

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나노급 인듐 주석 산화물 입자의 물성에 미치는 열처리의 영향 (Influence of Heat-treatment on Physical Properties of Nanocrystalline Indium Tin Oxide (ITO) Particle)

  • 홍성제;한정인;정상권
    • 한국전기전자재료학회논문지
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    • 제17권7호
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    • pp.747-753
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    • 2004
  • In this paper, nanocrystalline indium tin oxide (ITO) particles were fabricated by using synthesis without harmful elements. The synthetic method is to eliminate the chloridic and nitridic elements which are included in the current wet type synthetic method. Therefore, it is possible to lower synthetic temperature below 600 $^{\circ}C$ to eliminate the harmful elements. Accordingly, fine particle can be achieved by applying the process. Particle size, surface area, crystal structure, and composition ratio of the synthesized nanocrystalline ITO particle by using the method were analyzed with high resolution transmission electron microscopy (HRTEM), BET surface area analyzer, X-ray diffraction (XRD), and energy dispersion spectroscopy (EDS). As a result, its particle size is less than 10 nm, and the surface area exceeds 100 m$^2$/g. The XRD analysis indicates that the cystal structure of the powder is cubic one with orientation of <222>, <400>, <440>. Also, the analysis of the composition demonstrates that the around 8 wt% tin is uniformly included in In$_2$O$_3$ lattice of the nanoparticle.

대기압 플라즈마 처리에 의한 ITO 필름의 표면 개질 (Surface Mdification of ITO Film by an Atmospheric Pressure Plasma Treatment)

  • 이창호;최영길;김종현;송현직;박원주;이광식
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2009년도 추계학술대회 논문집
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    • pp.323-326
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    • 2009
  • 본 연구에서는 대기압 플라즈마의 처리 조건에 따른 ITO 필름의 접착력 향상을 위한 접촉각 및 표면에너지의 변화를 관찰하였다. 대기압 플라즈마의 처리 변수로는 반응 가스, 처리 속도 방전 전압 및 시료와 플라즈마 헤드 사이의 방전 캡이며, 측정된 접촉각을 이용하여 ITO 필름의 표면을 분석하였다. 그 결과는 방전 전압이 증가할수록 접촉각은 낮아졌으며, 시료와 플라즈마 헤드 사이의 방전 간격은 2.5[mm]에서 접촉각이 낮게 나타나 ITO 필름의 접착력 향상을 위한 친수성 물질로 표면 개질됨을 확인할 수 있었다.

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The Effects of Oxygen Plasma and Cross-link Process on Quantum-dot Light Emitting Diodes

  • Cho, Nam-Kwang;Kang, Seong Jun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.215-215
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    • 2014
  • Red color light emitting diodes (LEDs) were fabricated using CdSe/CdZnS quantum dots (QDs). During the device fabrication process, oxygen plasma treatment on the ITO surface was performed to improve the interfacial contact between ITO anode and the hole injection layer. CdSe/CdZnS quantum dots were cross-linked to remove their surrounded organic surfactants. The device shows red emission at 622 nm, which is consistent with the dimension of the QDs (band gap=1.99 eV). The luminance shows 6026% improvement compared with that of LEDs fabricated without oxygen plasma treatment and quantum dots cross-linking process. This approach would be useful for the fabrication of high-performance QLEDs with ITO electrode and PEDOT:PSS hole injection layers.

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Effect of Different Pretreatments on Indium-Tin Oxide Electrodes

  • Choi, Moonjeong;Jo, Kyungmin;Yang, Haesik
    • Bulletin of the Korean Chemical Society
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    • 제34권2호
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    • pp.421-425
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    • 2013
  • The effect of pretreatment on indium-tin oxide (ITO) electrodes has been rarely studied, although that on metal and carbon electrodes has been enormously done. The electrochemical and surface properties of ITO electrodes are investigated after 6 different pretreatments. The electrochemical behaviors for oxygen reduction, $Ru(NH_3){_6}^{3+}$ reduction, $Fe(CN){_6}^{3-}$ reduction, and p-hydroquinone oxidation are compared, and the surface roughness, hydrophilicity, and surface chemical composition are also compared. Oxygen reduction, $Fe(CN){_6}^{3-}$ reduction, and p-hydroquinone oxidation are highly affected by the type of the pretreatment, whereas $Ru(NH_3){_6}^{3+}$ reduction is almost independent of it. Interestingly, oxygen reduction is significantly suppressed by the treatment in an HCl solution. The changes in surface roughness and composition are not high after each pretreatment, but the change in contact angle is substantial in some pretreatments.

Optically transparent and electrically conductive indium-tin-oxide nanowires for transparent photodetectors

  • Kim, Hyunki;Park, Wanghee;Ban, Dongkyun;Kim, Hong-Sik;Patel, Malkeshkumar;Yadav, Pankaj;Kim, Joondong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.390.2-390.2
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    • 2016
  • Single crystalline indium-tin-oxide (ITO) nanowires (NWs) were grown by sputtering method. A thin Ni film of 5 nm was coated before ITO sputtering. Thermal treatment forms Ni nanoparticles, which act as templates to diffuse Ni into the sputtered ITO layer to grow single crystalline ITO NWs. Highly optical transparent photoelectric devices were realized by using a transparent metal-oxide semiconductor heterojunction by combining of p-type NiO and n-type ZnO. A functional template of ITO nanowires was applied to this transparent heterojunction device to enlarge the light-reactive surface. The ITO NWs/n-ZnO/p-NiO heterojunction device provided a significant high rectification ratio of 275 with a considerably low reverse saturation current of 0.2 nA. The optical transparency was about 80% for visible wavelengths, however showed an excellent blocking UV light. The nanostructured transparent heterojunction devices were applied for UV photodetectors to show ultra fast photoresponses with a rise time of 8.3 mS and a fall time of 20 ms, respectively. We suggest this transparent and super-performing UV responser can practically applied in transparent electronics and smart window applications.

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고휘도 유기발광소자 제작 및 특성 (Characteristics and fabrications of high brightness organic light emitting diode(OLED))

  • 장윤기;이준호;남효덕;박진호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.316-319
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    • 2001
  • Organic light emitting diodes(OLEDs) with a hole injection layer inserted between Indium-Tin-Oxide(ITO) anode and hole transport layer were fabricated. The effect of plasma treatment on the surface properties of Indium-Tin-Oxide(ITO) anode were studied. The electrical and optical characteristics of the fabricated organic light emitting diodes(OLEDs) were also studied. The diode including of plasma treated ITO substrate and the hole injection layer, which showed the luminance of 5280 $cd/m^{2}$ at 8 V

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고휘도 유기발광소자 제작 및 특성 (Characteristics and fabrications of high brightness organic light emitting diode(OLED))

  • 장윤기;이준호;남효덕;박진호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.316-319
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    • 2001
  • Organic light emitting diodes(OLEDs) with a hole injection layer inserted between Indium-Tin-Oxide(ITO) anode and hole transport layer were fabricated. The effect of plasma treatment on the surface properties of Indium-Tin-Oxide(ITO) anode were studied. The electrical and optical characteristics of the fabricated organic light emitting diodes(OLEDs) were also studied. The diode including of plasma treated ITO substrate and the hole injection layer, which showed the luminance of 5280 cd/㎡ at 8 V

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나이프 코팅 법으로 제작한 ITO-Free 고전도성 PEDOT:PSS 양극 대면적 유연 OLED 소자 제작에 관한 연구 (Indium Tin Oxide-Free Large-Area Flexible Organic Light-Emitting Diodes Utilizing Highly Conductive poly(3,4-ethylene dioxythiophene):poly(styrene sulfonate) Anode Fabricated by the Knife Coating Method)

  • 석재영;이재학;양민양
    • 한국생산제조학회지
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    • 제24권1호
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    • pp.49-55
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    • 2015
  • This paper reports solution-processed, high-efficiency organic light-emitting diodes (OLEDs) fabricated by a knife coating method under ambient air conditions. In addition, indium tin oxide (ITO), traditionally used as the anode, was substituted by optimizing the conductivity enhancement treatment of poly(3,4-ethylene dioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) films on a polyethylene terephthalate (PET) substrate. The transmittance and sheet resistance of the optimized PEDOT:PSS anode were 83.4% and $27.8{\Omega}/sq$., respectively. The root mean square surface roughness of the PEDOT:PSS anode, measured by atomic force microscopy, was only 2.95 nm. The optimized OLED device showed a maximum current efficiency and maximum luminous density of 5.44 cd/A and $8,356cd/m^2$, respectively. As a result, the OLEDs created using the PEDOT:PSS anode possessed highly comparable characteristics to those created using ITO anodes.