• Journal of the Korean Ceramic Society
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• v.48 no.1
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• pp.94-98
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• 2011

A Sn-doped $In_2O_3$ (ITO) nanowire photoelectrode was produced using a simple metal evaporation method at low synthesis temperature (< $540^{\circ}C$). The nanowire electrodes have large surface area compared with that of flat ITO thin film, and show low electrical resistivity of $5.6{\times}10^{-3}{\Omega}cm$ at room temperature. In order to apply ITO nanowires to the photoelectrodes of dye-sensitized solar cell (DSSC), those surfaces were modified by $TiO_2$ nanoparticles using a chemical bath deposition (CBD) method. The conversion efficiency of the fabricated $TiO_2$/ITO nanostructure-based DSSC was obtained at 1.4%, which was increased value by a factor of 6 than one without ITO nanowires photoelectrode. This result is attributed to the large surface area and superior electrical property of the ITO nanowires photoelectrode, as well as the structural advantages, including short diffusion length of photo-induced electrons, of the fabricated $TiO_2$/ITO nanostructure-based DSSC.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.287-288
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• 2015

최근 투명 산화물 전극 (TCO)은 LED, electronic display, solar cell, touch screen panel (TSP) 등 다양한 분야에 많이 사용되고 있다. TCO는 높은 광 투과도와 전도성으로 인해 여러 분야에 많이 사용되고 있으며, 특히 ITO (Sn-doped indium oxide)가 display 분야에 많이 적용되고 있다. 하지만, ITO는 투과도와 면저항의 반비례 관계를 가지므로 더 낮은 면저항이 요구되는 대면적 TSP 분야에 적용되기에는 많은 개선이 필요하다. 따라서, 본 연구에서는 metal mesh film의 연구를 통해 TSP 분야에 사용되는 ITO를 대체하고자 한다. 제작된 mesh film은 모두 면저항은 $15{\Omega}/{\square}$ 이하, 광 투과도 90% (@550nm) 이상을 나타내었다.

• Journal of the Microelectronics and Packaging Society
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• v.21 no.2
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• pp.1-11
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• 2014

Flexible transparent conductive electrodes (TCEs) have recently attracted a great deal of attention owing to rapid advances in flexible electronic devices, such as flexible displays, flexible photovoltanics, and e-papers. As the performance and reliability of flexible electronics are critically affected by the quality of TCE films, it is imperative to develop TCE films with low resistivity and high transparency as well as high flexibility. Indium tin oxide (ITO) has been the most dominant transparent conducting material due to its high optical transparency and electrical conductivity. However, ITO is susceptible to cracking and delamination when it is bent or deformed. Therefore, various types of flexible TCEs, such as carbon nanotube, conducting polymers, graphene, metal mesh, Ag nanowires (NWs), and metal mesh have been extensively investigated. Among several options to replace ITO film, Ag NWs and metal mesh have been suggested as the promising candidate for flexible TCEs. In this paper, we focused on Ag NWs and metal mesh, and summarized the current development status of Ag NWs and metal mesh. The several critical issues such as high contact resistance and haze are discussed, and newly developed technologies to resolve these issues are also presented. In particular, the flexibility and durability of Ag NWs and metal mesh was compared with ITO electrode.

• Journal of the Korean Vacuum Society
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• v.12 no.S1
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• pp.88-91
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• 2003

Electromagnetic interference shielding and near-infrared cutoff filters for plasma display panel application were designed and fabricated by radio frequency magnetron sputtering. Three types of the filters were prepared: the basic structure of type A consisted of [$TiO_2$ Ti Ag $TiO_2$]; type B, of [$TiO_2$ ITO Ag $TiO_2$]; type C, of [$TiO_2$ ITO Ag ITO $TiO_2$]. Ti and ITO layers deposited on Ag layers were employed as barriers to prevent the oxidation and the diffusion of Ag film into the adjacent oxide layers. Optical, electrical, chemical, and structural properties were investigated, and the result shows that the filters with the ITO barrier layers provided an enhancement in transmittance in the visible owing to a lower absorption of ITO layers than Ti layers. Type C filter showed better optical and electrical performances and smoother surface roughness than Type B and C filters: the average sheet resistance was as low as 1.51 $\Omega\Box$ (where $\square$ stands for a square film), the peak transmittance in the visible was as high as 78.2 %, and the average surface roughness was 1.48 nm.

• Applied Chemistry for Engineering
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• v.25 no.3
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• pp.242-248
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• 2014

Flexibility of a transparent device has been required in accordance with miniaturization and mobilization needs in recent industry. The most representative material used as a transparent electrode is indium tin oxide (ITO). However, a couple of disadvantages of ITO are the exhaustion of natural resource of indium and its inflexibility due to inorganic substance. To overcome the limit of ITO, a variety of alternative materials have been researched on development of transparent electrodes and its properties through composite materials. In this review, we classify some of emerged materials with their general studies.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.314-314
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• 2013

Recently, flexibility is one of the hottest issues in the field of electronic devices. For flexible displays or solar cells, a development of transparent conductive electrodes (TCEs) with flexibility, bendability and foldability is an essential element. Hundreds of nanometers indium-tin-oxide (ITO) films have been widely used and commercialized as a transparent electrode, but their brittleness make them difficulty to apply flexible electronics. Many researchers have been studying for flexible TCEs such as a few layers of graphene sheets, carbon nanotube networks, conductive polymer films and combinations among them. Although gained flexibility, their transmittance and resistivity have not reached those of commercialized ITO films. Metal grids electrode cannot act as TCEs only, but they can be used to lower the resistance of TCEs with few losses of transmittance. However, the possibility of device shortage will be rise at the devices with metal grids because a surface flatness of TCEs may be deteriorated when metal grids are introduced using conventional methods. In our research, we have developed hybrid TCEs, which combined tens of nanometers ITO film and metal grids which are embedded in flexible substrate. They show $13{\Omega}$/${\Box}f$ sheet resistance with 94% of transmittance. Moreover, the sheet resistance was maintained up to 1 mm of bending radius. Also, we have verified that flexible organic light emitting diodes and organic solar cells with the TCEs showed similar performances compared to commercial ITO (on glass substrate) devices.

• Proceedings of the Korean Ceranic Society Conference
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• 2000.10a
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• pp.191.2-191
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• 2000

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.296-296
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• 2013

Supercapacitor is a capacitor with extraordinarily high energy density, which basically consists of current collector, active material and electrolyte. Ruthenium oxide ($RuO_2$) is one of the most widely studied active materials due to its high specific capacitance and good electrical conductivity. In general, it is known that the coating of $RuO_2$ on nanoarchitectured current collector shows improved performance of energy storage device compared to the coating on the planar current collector. Especially, the surface structure with standing coaxial nanopillars are most desirable since it can provide direct paths for efficient charge transport along the axial paths of each nanopillars and the inter-nanopillar spacing allows easy access of electrolyte ions. However, well-known fabrication methods for metal or metal oxide nanopillars, such as the process using anodize aluminum oxide (AAO) templates, often require long and complicated nanoprocess.In this work, we developed relatively simple method fabricating indium tin oxide (ITO) nanopillars via sputtering. We also electrodeposited $RuO_2$ nanoparticles onto these ITO nanopillars and investigated its physical and electrochemical properties.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.133.2-133.2
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• 2016

차세대 디스플레이로 유연하고 투명한 기능들이 요구되면서 Indium Tin Oxide(ITO)를 대체하기 위한 투명전극 개발 연구가 많이 수행되고 있다. ITO는 높은 투과도와 낮은 저항으로 현재 가장 많이 활용되고 있는 투명전극 소재이지만 유연성이 떨어져 유연 터치 패널 소재로 활용하기 어렵다. 이러한 문제 해결을 위해 ITO 대체 물질로 CNT, Graphene, Metal mesh, Ag nano wire, 전도성 고분자 등의 차세대 투명 전극 소재가 대두되고 있다. 본 연구에서는 메탈 메쉬 전극 소재로 사용하기 위해 Cu 박막 증착 시 플라즈마 표면처리를 통해 밀착력 및 저항을 개선하였다. Cu 금속 박막의 양산화를 위한 공정으로 자체 제작한 Linear Ion Source(LIS)가 부착된 roll to roll 시스템을 적용하여 플라즈마 전처리 공정 및 Ni buffer layer 도입 이후 Cu 박막을 형성하였다. 그 결과 PET 기판과 Cu 박막 사이의 밀착력을 0 degree에서 5 degree까지 향상시킬 수 있었고, 플라즈마 표면처리를 시행함으로써 저항 또한 감소되는 결과를 얻을 수 있었다. 본 연구를 통해서 폴리머 기판 소재에 in-situ로 표면처리 및 Cu 금속 박막을 증착함으로써 금속 박막의 밀착력 및 전기적 특성이 향상되는 공정 기술을 개발하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.467.2-467.2
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• 2014

유기태양전지는 친환경 에너지 소스로써 저가 대량 생산이 가능하고 특히 유연한 기판에 적용이 가능하여 많은 관심을 받고 있다. 그럼에도 불구하고 기존에 사용되는 indium tin oxide (ITO)의 사용으로 인한 유연성 부족으로 대체되는 투명전극의 개발이 요구되어지고 있다. 이로 인해 carbon nanotubes, graphene, thin metals, metal grids, and conducting polymers 등이 연구되고 있으며, 이중 Silver nanowires (Ag NWs)를 이용한 방식도 많은 관심과 함께 전기광학적 특성에 대한 연구가 진행되고 있다. 하지만 유기전자소자에 사용되기에는 몇 가지 문제점이 발생하는데 이를 해결하기 위한 노력이 다양하게 이루어지고 있다. 특히 다양한 물질의 혼합을 통해 개선하고자 하는 노력이 증가하고 있는데 적층구조의 전도성필름 형성을 통해 ITO-free OPVs에서 Ag nanowire를 transparent conductive electrodes로 활용하였다. Ag NWs층과 PEDOT:PSS layer의 복합화를 통해 저가의 ITO-free OPVs용 transparent anodes가 가능해졌다.