• 한국정밀공학회지
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• 제22권12호
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• pp.28-33
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• 2005

• 대한기계학회논문집
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• 제19권4호
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• pp.908-917
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• 1995

The constant .DELTA.K fatigue tests are performed in SS41 and its weldments to investigate crack opening behavior and fatigue crack propagation behavior at each parts of weldment and its boundary layer. The weldments were annealed after welding for the purpose of relieving residual stress. Every weldments has notch at weld metal zone, and fatigue crack propagates from weld metal zone to vase metal zone perpendicular to weld line. The Laser ISDG method is used in order to determine the crack opening ratio, this method is more precise than indirect measurement method, and faster and easier than other direct measurement method.

• 한국정밀공학회지
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• 제21권7호
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• pp.171-178
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• 2004

Techniques and procedures are presented for measuring mechanical properties on thin-film Polysilicon. Narrow platinum lines are deposited 250 ${\mu}{\textrm}{m}$ apart on tensile specimens that are 3.5 ${\mu}{\textrm}{m}$ thick and 600 ${\mu}{\textrm}{m}$ wide. Load is applied by a piezo-actuator and by hanging weights. Strain is measured by an ISDC at temperatures up to 500 $^{\circ}C$. Measurements of the elastic modulus with jig modifications, loading speed and temperature change are presented first. And then, the preliminary data for the coefficient of thermal expansion and creep behavior are presented as a reference.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 추계학술대회 논문집
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• pp.263-268
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• 2001

The constant .DELTA. K fatigue tests are performed in SS41 and its weldment. The LASER ISDG method is used in determination of crack opening ratio. This method is more precise than indirect measurement method, faster and easier than other direct measurement method. And obtained results are followed 1) Crack opening ratio U is proportional to fatigue crack growth rate da/dN at constant .DELTA. K 2) Fatigue crack growth rate da/dN in weldment increases in weld metal and heat affected zone, decreases in base metal as crack grows.

• 기계와재료
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• 제17권4호통권66호
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• pp.20-28
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• 2005

• 대한기계학회논문집
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• 제14권6호
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• pp.1576-1582
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• 1990

본 연구에서는 Al 2024-T3 판으로 제작된 한면 노치 시편에 여러 조건의 피로 하중을 가하여 노치면내에 형성된 미소 피로균열의 COD를 광학적 간섭현상에 기초를 둔 미소 변위측정기(Interferometric Strain/Displacement Gage`ISDG)를 개량하여 측 정하였다. 이 ISDG의 컴퓨터 조정방식을 정밀화시켜 0.02$\mu\textrm{m}$까지의 상대변위를 측정 할 수 있도록 보완하였다. 고정밀화돈 측정기로 수십 $\mu\textrm{m}$길이의 미소균열의 COD도 측 정하였고 컴류터에 저장시킴으로써 시험후 미소 피로균열에 대한 열림 특성을 분석할 수 있다. 측정된 미소 피로균열의 균열열림특성을 고찰하고 긴 균열의 열림특성과도 비교.분석 하였다.

• 한국정밀공학회지
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• 제23권3호
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• pp.163-170
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• 2006

Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different front the corresponding bulk properties and thus there has been a strong need for the development of a miniature tester to measure the mechanical properties of a thin film. Two testers are designed and set up in small size of 62 mm width, 20 mm depth and 90-120 mm height to fit in a chamber of scanning electron microscope (SEM). One tester has a homemade 0.2 N load cell and a low-priced electromagnetic actuator. The other has a commercial 5 N load cell, a $52{\mu}m$ piezoelectric actuator and some novel grips. Two types of 3.5 microns thick polysilicon specimen are tested to prove the testers' applicability. The strain is measured by the two ways. Firstly, it is measured by an ISDG system in the atmosphere far the reference. Secondly, the same test is repeated in a SEM chamber to monitor the strain as an in-situ experiment. The strain is evaluated by observing the gap change between two markers.

• International Journal of Control, Automation, and Systems
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• 제3권3호
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• pp.477-485
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• 2005

This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.