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Development and Applications of Material Testers for the Thin Films  

Ahn Hyun-Gyun (한국기계연구원 나노공정장비연구센터)
Lee Hak-Joo (한국기계연구원 나노공정장비연구센터)
Oh Chung-Seog (금오공과대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.3, 2006 , pp. 163-170 More about this Journal
Abstract
Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different front the corresponding bulk properties and thus there has been a strong need for the development of a miniature tester to measure the mechanical properties of a thin film. Two testers are designed and set up in small size of 62 mm width, 20 mm depth and 90-120 mm height to fit in a chamber of scanning electron microscope (SEM). One tester has a homemade 0.2 N load cell and a low-priced electromagnetic actuator. The other has a commercial 5 N load cell, a $52{\mu}m$ piezoelectric actuator and some novel grips. Two types of 3.5 microns thick polysilicon specimen are tested to prove the testers' applicability. The strain is measured by the two ways. Firstly, it is measured by an ISDG system in the atmosphere far the reference. Secondly, the same test is repeated in a SEM chamber to monitor the strain as an in-situ experiment. The strain is evaluated by observing the gap change between two markers.
Keywords
Elastic modulus; In-situ; ISDG; Material tester; Scanning electron microscope; Thin-film; Piezoelectric actuator; Polycrystalline silicon;
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Times Cited By KSCI : 1  (Citation Analysis)
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1 Tsuchiya, T., Shikida, M., Sato, K., 'Tensile Testing System for Sub-micrometer Think Films,' Sensors & Actuators A, Vol. 97-98, pp. 492-496, 2002   DOI   ScienceOn
2 Chasiotis, I., Knauss, W G., 'A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Froce Microscopy,' Exp. Mech., Vol. 42, pp. 51-57, 2002   DOI
3 Haque, M. A., Saif, M. T. A., 'Application of MEMS Force Sensors for in situ Mechanical Characterization of Nano-scale Thin Films in SEM and TEM,' Sensors & Actuators A, Vol. 97-98, pp. 239-245, 2002   DOI   ScienceOn
4 Norton, R. L., 'Machine Design, Prentice Hall,' Ch. 2, 2000
5 Read, D. T., Dally, J. W., 'A New Method for Measuring the Strength and Ductility of Thin Films,' J. Mater. Res., Vol. 8, pp. 1542-1549, 1993   DOI
6 Oh, C.-S., Sharpe, W. N. Jr., 'Techniques for Measuring Mechanical Properties of Poly silicon using an ISDG,' J. of the KSPE, Vol. 27, No.7, pp. 171-178, 2004
7 Sharpe, W.N. Jr., 'Mechanical Properties of MEMS Materials,' The MEMS Handbook, CRC Press, pp. 3-1 to 3-33, 2001
8 Kim, S.-W., Oh, C.-S., Lee, H.-J., 'Effects of Specimen Alignment on the Mechanical Properties of Polysilicon Film,' MRS Symposium O81, 2005
9 Koester, D., Cowen, A., Mahadevan, R., Stonefield, M., Hardy, B., 'Poly MUMPs Design Handbook,' Rev. 10.0, MEMScAP, 2003
10 Sharpe, W. N. Jr., 'An Interferometric Strain/Displacement Measurement System,' NASA Technical Memorandum 101638, 1989
11 Oh, C.-S., Lee, H.-J., Ko, S.-G., Kim, S.-W, Ahn, H.-G., 'Comparison of the Young's Modulus of Polysilicon Film by Tensile Testing and Nanoindentation,' Sensors & Actuators A, Vol. 117, pp. 151-159, 2005   DOI   ScienceOn
12 http://www.cedrat.com/
13 Freund, L. B., Suresh S., 'Thin Film Materials,' Cambridge, 2003
14 Haque, M. A., Saif, M. T. A., 'In-situ Tensile Testing of Nano-scale Specimens in SEM and TEM,' Exp. Mech., Vol. 42, pp. 123-128, 2002   DOI
15 Isono, Y, Kiuchi, M., Sugiyama, S., Morita, T., Matsui, S., 'Mechanical Characteristic of FIB Deposited Carbon Nanowire by Electrostatic Actuated Nano Tensile Testing Device (EANAT),' 18th Int. Conf. on MEMS, 2005   DOI
16 CATIA, V5R10, Dassault Systemes
17 http://www.wazau.com/en/sensors/druck_zug.html
18 Kim, D. I., Huh, Y H., Kee, C. D., 'Measurement of Tensile Properties of Copper Foil using Micro-ESPI Technique,' J. of the KSPE, Vol. 21, No.8, pp. 89-96, 2004   과학기술학회마을