• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.28-33
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• 2005

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.4
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• pp.908-917
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• 1995

The constant .DELTA.K fatigue tests are performed in SS41 and its weldments to investigate crack opening behavior and fatigue crack propagation behavior at each parts of weldment and its boundary layer. The weldments were annealed after welding for the purpose of relieving residual stress. Every weldments has notch at weld metal zone, and fatigue crack propagates from weld metal zone to vase metal zone perpendicular to weld line. The Laser ISDG method is used in order to determine the crack opening ratio, this method is more precise than indirect measurement method, and faster and easier than other direct measurement method.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.171-178
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• 2004

Techniques and procedures are presented for measuring mechanical properties on thin-film Polysilicon. Narrow platinum lines are deposited 250 ${\mu}{\textrm}{m}$ apart on tensile specimens that are 3.5 ${\mu}{\textrm}{m}$ thick and 600 ${\mu}{\textrm}{m}$ wide. Load is applied by a piezo-actuator and by hanging weights. Strain is measured by an ISDC at temperatures up to 500 $^{\circ}C$. Measurements of the elastic modulus with jig modifications, loading speed and temperature change are presented first. And then, the preliminary data for the coefficient of thermal expansion and creep behavior are presented as a reference.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.10a
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• pp.263-268
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• 2001

The constant .DELTA. K fatigue tests are performed in SS41 and its weldment. The LASER ISDG method is used in determination of crack opening ratio. This method is more precise than indirect measurement method, faster and easier than other direct measurement method. And obtained results are followed 1) Crack opening ratio U is proportional to fatigue crack growth rate da/dN at constant .DELTA. K 2) Fatigue crack growth rate da/dN in weldment increases in weld metal and heat affected zone, decreases in base metal as crack grows.

• 기계와재료
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• v.17 no.4 s.66
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• pp.20-28
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• 2005

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1576-1582
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• 1990

To examine small fatigue crack behavior, the crack opening displacement (COD) was measured for surface cracks in the range of few tens to hundreds .mu.m using the computerized Interferometric Strain/Displacement Gage (ISDG) which could measure the relative displacement with a resolution of 0.02 .mu.m. The load-COD record is stored and analyzed after the test to determined the opening load. Single-edge notched specimens, 2.3mm thick, of Al 2024-T3 were precracked at load ratios of 0.0, -1.0 and -2.0 to make small fatigue cracks. The opening loads were measured these small cracks and compared with those of long cracks. The opening load ratios for the short cracks are about 10% smaller than those for long cracks at positive R-ratios, but are about 100% smaller at negative R-ratios.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.163-170
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• 2006

Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different front the corresponding bulk properties and thus there has been a strong need for the development of a miniature tester to measure the mechanical properties of a thin film. Two testers are designed and set up in small size of 62 mm width, 20 mm depth and 90-120 mm height to fit in a chamber of scanning electron microscope (SEM). One tester has a homemade 0.2 N load cell and a low-priced electromagnetic actuator. The other has a commercial 5 N load cell, a $52{\mu}m$ piezoelectric actuator and some novel grips. Two types of 3.5 microns thick polysilicon specimen are tested to prove the testers' applicability. The strain is measured by the two ways. Firstly, it is measured by an ISDG system in the atmosphere far the reference. Secondly, the same test is repeated in a SEM chamber to monitor the strain as an in-situ experiment. The strain is evaluated by observing the gap change between two markers.

• International Journal of Control, Automation, and Systems
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• v.3 no.3
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• pp.477-485
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• 2005

This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.