• 제목/요약/키워드: INSERT

검색결과 1,521건 처리시간 0.027초

산화막 CMP에서 리테이닝 링의 인서트 재질이 연마정밀도에 미치는 영향 (Effects of Insert Materials of Retaining Ring on Polishing Finish in Oxide CMP)

  • 박기원;박동삼
    • 한국기계가공학회지
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    • 제18권8호
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    • pp.44-50
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    • 2019
  • CMP is the most critical process in the manufacture of silicon wafers, and the use of retaining rings, which are consumable parts used in CMP equipment, is increasingly important. Since the retaining ring is made of plastic, it is not only weak in strength but also has the problem of taking a long time for the flattening operation of the ring itself performed before the CMP process, and of the imbalance of force due to bolt tightening causing uneven wear. In order to solve this problem, the retaining ring and the insert ring are integrally used, and the flatness of the retaining ring may be affected depending on the material of the insert ring. Also, the residual stress generated in the manufacturing process of the insert ring may cause distortion of the ring, which may adversely affect the precision polishing. In this study, when the insert ring is made of Zn or STS304, the thickness variation and the flatness of the retaining ring are compared and, finally, the material removal rate is analyzed by polishing the wafer by the oxide CMP process. Through these experiments, the effects of the insert ring material on the polishing accuracy of the wafers were investigated.

반복하중 패턴에 따른 균열 콘크리트에 매입된 선설치 인서트 앵커의 전단성능 평가 (Shear Performance Evaluation of Cast-in Specialty Inserts in Cracked Concrete according to Cyclic Loading Patterns)

  • 정상덕;오창수;이창환
    • 한국공간구조학회논문집
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    • 제23권2호
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    • pp.53-60
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    • 2023
  • Recently, a novel cast-in specialty insert was developed in Korea as an anchor for lightweight pipe supports, including fire-protection pipes. As these pipe supports and anchors play a critical role in transferring loads of fire-protection pipes to structural members, it is crucial to evaluate their seismic performance before applying the newly developed insert. In this study, the seismic shear performance of the insert anchors was evaluated through cyclic loading tests based on the loading protocols of ACI 355.2 and FEMA 461. Initially, five monotonic loading tests were conducted on the insert anchors in cracked concrete, followed by cyclic loading tests based on the monotonic test results. The findings revealed that the insert anchors exhibited negligible decrease in shear strength even after cyclic loading. Furthermore, a comparison of the maximum load and displacement of the insert anchors obtained under the loading protocols of ACI 355.2 and FEMA 461 was performed to investigate the applicability of the FEMA 461 loading protocol for anchor performance evaluation.

인서트형 밀링커터의 복합5축가공 기술개발에 관한 연구 (Study on the development of multi-tasking 5-axis machining for insert type milling cutter)

  • 황종대;정윤교
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.21-26
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    • 2004
  • This research presents a modeling and a manufacturing method of insert type milling cutters such as face cutter, flat endmill and ball endmill. The methods introduced in this paper adopts the multi-tasking 5-axis machining that is increasing machining accuracy of holder and position accuracy of bolting points. So this can be used in the basic document of the total package program that involves modeling and manufacturing module in various insert cutters.

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액체로켓엔진용 인젝터 접합부의 미세조직 (Microstructure of the Brazed Joint for LRE Injector)

  • 남대근;홍석호;이병호
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2004년도 춘계 학술발표대회 개요집
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    • pp.87-89
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    • 2004
  • Brazing is an indispensable manufacturing technology for liquid rocket engine. In this study, for LRE injector, stainless steel 316L was used of base metal and Ni based MBF-20 of insert metal. The brazing and diffusion was carried out under various conditions. There are solid phase and. residual liquid phase in the brazed joint. With increment of holding time, the amount of solid phase increased and the elements of base metal and insert metal compositionally graded. Boron diffused from insert metal came into base metal and made boride with Cr and Mo at the brazed joint of base metal and insert metal.

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연료전지 냉각용 헬리컬 인서트디바이스 이중관열교환기의 열전달 성능 향상에 관한 연구 (A Study on the Improvement of Efficiency of Heat Transfer of Double Pipe Heat Exchanger with Helical Insert Device on Cooling of a Fuel Cell)

  • 조동현
    • 수산해양교육연구
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    • 제27권6호
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    • pp.1872-1879
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    • 2015
  • The present study was conducted on the improvement of the heat transfer performance of double pipe heat exchangers with helical insert device. Double pipe heat exchangers with helical insert device were studied for improvement of the heat transfer performance of double pipe heat exchangers with helical insert device and plain double pipe heat exchangers were also studied to comparatively analyze heat transfer performance. Experimental results were derived on changes in the Reynold's numbers of the cooling water flowing in helical and plain double pipe heat exchangers and changes in the heat flux of the air. Thereafter, to verify the reliability of the experimental results, the theoretical total energy and the experimental total energy were comparatively analyzed and the following results were derived. The thermal energy of the calorie lost by the hot air and that of the calorie obtained by the cooling water were well balanced. The experiments of plain double pipe heat exchangers and double pipe heat exchangers with helical insert device were conducted under normal conditions and the theoretical overall heat transfer coefficient value and the experimental overall heat transfer coefficient value coincided well with each other. In both plain double pipe heat exchangers and double pipe heat exchangers with helical insert device, heat transfer rates increased as the cooling water flow velocity increased. Under the same experimental conditions, the heat transfer performance of double pipe heat exchangers with helical insert device was shown to be higher by approximately 1.5 times than that of plain double pipe heat exchangers.

고자장 자석용 1.8T HTS insert 코일 개발 (Development of a 1.8T HTS Insert Coil for High Field Magnet)

  • 배준한;성기철
    • 전기학회논문지
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    • 제56권6호
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    • pp.1035-1038
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    • 2007
  • We designed and manufactured a 1.8T high temperature superconducting(HTS) insert coil for a NMR magnet operated at 4.2 K. Suitable HTS superconductor and HTS coil were carefully designed and developed. We have selected multi-filamentary Bi2223 conductor fabricated by American Superconductor Corporation(AMSC). The selected conductor consists of Bi2223 filaments of 55, silver stabilizer and stainless steel reinforcement tapes. Therefore, it shows good hoop strength as well as compression tolerance. The conductor has a tape cross-section of 0.31mm x 4.8mm. the Bi2223 conductor shows large anisotropy of critical current. The critical current of conductor in magnetic field parallel to the flat surface are much higher than that in magnetic field perpendicular. The HTS coil has an inner diameter of 78 mm, an outer diameter of 127 mm and a coil length of 600 mm. In this paper, the detailed design, fabrication and test results on the HTS insert coil are presented.