• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.52 no.7
• /
• pp.288-292
• /
• 2003

AlM thin film has been deposited on A1$_2$O$_3$ substrate by reactive radio frequency(RF) magnetron sputtering method under various operating conditions such as working pressure, fraction of nitrogen partial pressure, and substrate temperature. Scanning Electron Microscope(SEM), X-ray Diffraction(XRD), and Atomic Force Microscope(AFM) have been measured to find out structural properties and preferred orientation of AlN thin films. SAW velocity of IDTs/AlN/Si structure was about 5038［㎧］ at the center frequency of 251.9［MHz］ and insertion loss was measured to be relatively low value of 35.6［dB］. SAW velocity of IDTs/AlN/A1$_2$O$_3$ structure was improved to be about 5960［㎧］ at the center frequency of 296.7［MHz］.

• Proceedings of the KIEE Conference
• /
• 2005.07c
• /
• pp.1898-1899
• /
• 2005

반도체 집적회로 공정에서 사용되는 폴리이미드 포토레지스트(P12723, Dupont)를 감습막으로 사용하는 마이크로 습도센서 소자를 제작하였다. 마이크로 습도센서는 실리콘 웨이퍼 기판 위에 $SiO_2$ 박막을 건식열산화 공정으로 제작하고, Al 박막을 포토리소그라피 공정으로 패터닝 한 IDT (Interdigital Transducer)를 전극 위에 폴리이미드 포토레지스트를 공정변수를 다양하게 조절하면서 감습막으로 제작하였다. 폴리이미드 감습막은 스핀코팅법으로 제작하였으며, 회전수를 조절하여 두께를 변화시켰다. 완성된 마이크로 습도센서 소자의 상대습도 변화$(10{\sim}90% RH)$에 따른 정전용량 값 변화를 항온항습조 내에서 다양한 온도에서 HP4192A Impedance Analyzer를 사용하여 조사함으로써, 폴리이미드 포토레지스트를 사용하는 마이크로 정전용량형 습도센서의 제작 가능성을 검토하였다. 폴리이미드 정전용량형 마이크로 습도센서는 다양한 인가 전원 주파수에서 기준 센서로 사용된 상용 Vaisala Hygrometer와 유사한 감습특성 및 응답특성을 보였다.

• Korean Journal of Materials Research
• /
• v.7 no.6
• /
• pp.510-516
• /
• 1997

반응성RF 마그네트론 스퍼터링 법으로 상온에서 c-축으로 우선 배향된 AIN 박막을 여러 기판 위에 증착하였다. SiO$_{2}$/Si, Si$_{3}$N $_{4}$Si, Si(100), Si(111)그리고 $\alpha$-AI$_{2}$O$_{3}$(0001) 기판에서 AIN(0002)로킹커브 피크의 표준편차는 각각 2.6˚, 3.1˚2.6˚, 2.5˚ 그리고 2.1˚ 의 값을 나타내었다. $\alpha$-AI$_{2}$O$_{3}$(0001) 기판에 증착된 AIN박막은 epitaxial 성장을 나타내었다. Si기판에 증착된 AIN박막에서 측정된 비저항과 1MHz 주파수에서 측정된 유전상수의 값은 각각 $10^{11}$Ωcm와 9.5였다. IDT/AIN/$\alpha$-AI$_{2}$O$_{3}$(0001)구저를 갖는 지연선 소자의 표면 탄성과 특성을 측정하였다. 상 속도, 전기기계 결합계수 그리고 전파손실은 H/λ가 0.17-0.5 범위에서 각각 5448-5640m/s, 0.13-0.17% 그리고 0.41-0.64dB/λ의 값을 나타내었다.다.

• Korean Journal of Materials Research
• /
• v.12 no.7
• /
• pp.522-527
• /
• 2002

To investigate the SAW properties of GaN films on c-plane sapphire substrates, we carried out both the experimental measuring and theoretical calculation. The experimental characterization of SAW propagation properties was performed with a linear array of interdigital transducer (IDT) structures, while SAW velocities were calculated by matrix methods. HVPSAW mode with the propagation velocity over 10,000m/s and PSAW mode as well as GSAW could be observed in experimental determination. These results were verified by matching with the theoretical calculation.

• Journal of Distribution Science
• /
• v.21 no.8
• /
• pp.83-96
• /
• 2023

Purpose: This study examined the relationship between the factors (Credibility, Usability) and user Innovativeness of the ChatGPT on TRA (Theory of Reasoned Action; Subjective Norm, Attitude) and Switching Intention. TRA and Innovation Diffusion Theory (IDT) were used. Research design, data and methodology: From April 26 to 27, 2023, an online panel survey agency was commissioned to conduct a survey of GhatGPT users in their 20s and 40s in Korea, and a total of 210 people were used for the final analysis. Verification of the research model was performed using SPSS and AMOS. Results: First, ChatGPT factors (Credibility, Usability) were found to have positive effects on TRA (Subjective Norm, Attitude). Second, ChatGPT user Innovativeness was found to have a positive effect on TRA (Subjective Norm, Attitude). Third, ChatGPT users' TRA (Subjective Norm, Attitude) were found to have positive effects on Switching Intention. Conclusions: These results mean that the superior Usability and Credibility of ChatGPT and the Innovativeness of users have a significant effect on the Switching Intention from existing Portal Service (Naver, Google, Daum, etc.) to ChatGPT. Generative AI such as ChatGPT should strive to develop various services such as improving the convenience of functions so that innovative users can use them easily and conveniently in order to provide services that meet expectations.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.112-112
• /
• 2009

In this study, the effect of a long post-deposition thermal annealing(600 and 1000 $^{\circ}C$) on the surface acoustic wave (SAW) properties of polycrystalline (poly) aluminum-nitride (AlN) thin films grown on a 3C-SiC buffer layer was investigates. The poly-AlN thin films with a (0002) preferred orientation were deposited on the substrates by using a pulsed reactive magnetron sputtering system. Experimental results show that the texture degree of AlN thin film was reduced along the increase in annealing temperature, which caused the decrease in the electromechanical coupling coefficient ($k^2$). The SAW velocity also was decreased slightly by the increase in root mean square (RMS) roughness over annealing temperature. However, the residual stress in films almost was not affect by thermal annealing process due to small lattice mismatch different and similar coefficient temperature expansion (CTE) between AlN and 3C-SiC. After the AlN film annealed at 1000 $^{\circ}C$, the insertion loss of an $IDT/AlN/3C-SiC/SiO_2/Si$ structure (-16.44 dB) was reduced by 8.79 dB in comparison with that of the as-deposited film (-25.23 dB). The improvement in the insertion loss of the film was fined according to the decrease in the grain size. The characteristics of AlN thin films were also evaluated using Fourier transform-infrared spectroscopy (FT-IR) spectra and X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM) images.

• Proceedings of the Korean Society for Agricultural Machinery Conference
• /
• 2017.04a
• /
• pp.9-9
• /
• 2017

입자거동해석소프트웨어(EDEM)은 DEM(Discrete Element Method)기법을 이용한 입자 거동 전용 해석툴로 입자 유입량, 위치 등을 조절하여 입자거동과 관련된 제품 개발, 프로세스 최적화를 위한 비용 및 시간 절감에 활용도가 뛰어난 소프트웨어이다. EDEM을 활용하기 위해선 적용대상에 대한 물성치를 적용하여야 한다. 따라서 본 연구에서는 EDEM를 이용하여 현재 연구개발 중인 카드클리너 방식의 고추 선별기의 성능을 분석을 수행하기 위해 고추 물성측정 실험을 수행 하였다. EDEM을 이용한 입자거동해석에 필요한 개인 물성치에는 포아송비, 전단탄성계수, 밀도가 있다. 또한 입자-입자, 입자-Geometry 간의 상호관계를 위한 물성치인 반발계수, 정지마찰계수, 구름마찰계수가 필요하다. 공시 시료인 고추는 광주광역시 남구 승촌동 소재의 개인농가 Plastic 온실로 재배된 '천상'품종을 사용하였다. 푸아송 비와, 전단 탄성계수를 측정하기 위한 인장시험기기로는 만능인장시험기(TA-XT2, Stable Micro, 영국)를 이용하였으며, 인장에 의한 고추의 변형량 축정은 초고속카메라(NX4-SI, IDT, 미국)을 이용하였다. 밀도는 비중병법에 기초하여 질량과 부피를 측정하여 밀도를 계산하였다. 반발계수는 고추의 충돌 실험을 통해 변화한 높이를 이용하여 계산하였고, 충동 실험을 통해 변화한 높이는 초고속카메라를 이용하여 측정하였다. 정지마찰계수와 구름마찰계수는 고추의 미끄러짐이 시작하는 각도와 등속도 운동으로 구르는 각도를 초고속카메라를 이용하여 측정 후 계산하였다. 모든 실험은 3번 반복을 통해 평균값을 시험 결과 값으로 이용하였다. 고추의 대한 물성치 실험결과 고추의 푸아송 비는 0.294(std : 0.2), 전단탄성계수 4.624E+06 Pa, 밀도 $600kg/m^3$로 나타났다. 또한 입자-입자 간의 물성치인 반발계수는 0.383, 정지마찰계수는 0.455, 구름마찰 계수는 0.043로 나타났다. 추후 본 연구에서 측정한 고추의 물성치를 적용한 EDEM 입자거동해석 시뮬레이션을 통해 카드클리너 방식의 고추 선별기의 성능에 대한 분석을 하고자 한다.

• Journal of Sensor Science and Technology
• /
• v.3 no.1
• /
• pp.40-45
• /
• 1994

$112^{\circ}$ rot. x-cut $LiTaO_{3}$ wafer was used as the substrate of SAW gas sensor. Dual delay line SAW device with IDTs which consist of the reference delay line and the sensing delay line was fabricated using photolithigraphy. Each IDTs had 10 finger pairs and finger spacing is 10 microns. One delay line channel is the reference, while the second is the sensing channel with Pb-phthalocyanine film in the propagation path. Pb-phthalocyanine film which is p-type organic semiconductor was evaporated in $10^{-5}$ torr vacuum using shadow mask selectively. Dual delay line oscillator was constructed by using the rf amplifier and AGC. Frequency of the IDTs had the range of $87{\sim}$89 MHz oscillation frequency. Oscillation frequency shifts were investigated as a function of the temperature and the concentration of $NO_{2}$ gas.

• Journal of the Korean Society of Visualization
• /
• v.14 no.1
• /
• pp.57-61
• /
• 2016

We report a finding of fast(exceeding 2,000 K/s) heating of polydimethylsiloxane(PDMS), one of the most commonly-used microchannel materials, under cyclic loadings at high(~MHz) frequencies. A microheater was created based on the finding. The heating mechanism utilized vibration damping of sound waves, which were generated and precisely manipulated using a conventional surface acoustic wave(SAW) microfluidic system, in PDMS. The penetration depths were measured to range from $210{\mu}m$ to $1290{\mu}m$, enough to cover most microchannel heights in microfluidic systems. The energy conversion efficiency was SAW frequency-dependent and measured to be the highest at around 30 MHz. Independent actuation of each interdigital transducer(IDT) enabled independent manipulation of SAWs, permitting spatiotemporal control of temperature on the microchip. All the advantages of this microheater facilitated a two-step continuous flow polymerase chain reaction(CFPCR) to achieve the billion-fold amplification of a 134 bp DNA amplicon in less than 3 min. In addition, a technique was developed for establishing dynamic free-form temperature gradients(TGs) in PDMS as well as in gases in contact with the PDMS.

• Information Systems Review
• /
• v.10 no.2
• /
• pp.309-327
• /
• 2008

This research is a byproduct of a project initiated by a major airport in Korea. The airport aimed to enhance airside safety and weighed a few IT options that may strengthen its current safety practices. In order to satisfy requirements unique to the airport and to inherit existing legacy systems, a PCS-based mobile database system was proposed. We first discuss technical aspects of the system as well as design issues in mobile systems before we compare two specific alternatives for transactional service handoff. A simulation study comparing two types of coordination follows before we present a scheme that manages transaction processing and locating service in mobile environments. Finally, we discuss the limitations of the scheme from the perspectives of the airport in question along with other research issues.