• The Journal of Korea Institute of Information, Electronics, and Communication Technology
• /
• v.12 no.4
• /
• pp.366-372
• /
• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• The Bulletin of The Korean Astronomical Society
• /
• v.45 no.1
• /
• pp.56.1-56.1
• /
• 2020

한국의 고문헌 중에는 다양한 고천문 기록들이 한문 형태로 존재하며, 이를 학술적으로 활용하기 위해서는 전문 번역가 투입에 따른 많은 비용과 시간이 요구된다. 이에 인공신경망 기계학습에 의한 인공지능 번역기를 개발하여 비록 초벌 번역 수준일지라도 문장 형태의 한문을 한글로 자동번역해 주는 학술 도구를 소개하고자 한다. 이 자동번역기는 한국천문연구원이 한국정보화진흥원이 주관하는 2019년도 Information and Communication Technology 기반 공공서비스 촉진사업에 한국고전번역원과 공동 참여하여 개발 완료한 것이다. 이 연구는 고천문 도메인에 특화된 인공지능 기계학습용 데이터인 천문 고전 코퍼스를 구축하여 이를 기반으로 천문 고전 특화 자동번역 모델을 개발하고 번역 서비스하는 것을 목적으로 한다. 이를 위해 구축되는 시스템은 크게 세 가지이다. 첫째, 로그인이 필요 없이 누구나 웹 접속을 통해 사용이 가능한 클라우드 기반의 고문헌 자동번역 대국민서비스 시스템이다. 둘째, 참여 기관별로 구축된 코퍼스와 도메인 특화된 번역 모델의 생성 및 관리할 수 있는 클라우드 기반의 대기관 서비스 플랫폼 구축이다. 셋째, 개발된 자동번역 Applied Programmable Interface를 활용한 한국천문연구원 내 자체 서비스가 가능한 AITHA 시스템이다. 연구 결과로서 먼저 구축된 천문 고전 코퍼스 60,760건에 대한 샘플링 검수 결과는 품질 순도 99.9% 이상이다. 아울러 도출된 천문 고전 특화 번역 모델 총 20개 중 대표 모델에 대한 성능 평가 결과는 기계 번역 텍스트 품질 평가 알고리즘인 Bilingual Evaluation Understudy 평가에서 40.02점이며, 전문가에 의한 휴먼 평가에서 5.0 만점 중 4.05점이다. 이는 당초 연구 목표로 삼았던 초벌 번역 수준에 충분하며, 현재 개발된 시스템들은 자체 시험 운영 중이다. 이 연구는 특수 고문헌에 해당되는 고천문 기록들의 번역 장벽을 낮춰 관련 연구자들의 학술적 접근 및 다양한 연구에 도움을 줄 수 있다는 점에서 의의가 있다. 또한 고천문 분야가 인공지능 자동번역 확산 플랫폼 시범의 첫 케이스로써 추후 타 학문 분야 참여 시 시너지 효과도 기대해 볼 수 있다. 고문헌 자동번역기는 점차 더 많은 학습 데이터와 학습량이 쌓일수록 더 좋은 학술 도구로 진화할 것이다.

• Journal of the Korean institute of surface engineering
• /
• v.42 no.5
• /
• pp.216-219
• /
• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• Proceedings of the KIEE Conference
• /
• 2011.07a
• /
• pp.95-96
• /
• 2011

본 논문은 표면탄성파(Surface Acoustic Wave)의 특성을 이용하여 반사되어 돌아오는 피크 신호를 통해 개체를 식별하며 온도 변화에 따른 위상의 변화를 갖는 ID 태그 및 온도 센서의 제작공정과 네트워크 분석기를 이용한 측정에 대해 소개한다. 표면탄성파 마이크로센서는 IDT(interdigital trancducer)와 ID 번호를 갖는 리플렉터, 온도 변화에 따른 위상 변위를 관찰하기 위한 리플렉터로 구성된다. 제작된 두 개의 소자는 49(0110001), 113(1110001)의 ID 번호를 가지고 있으며, 1 us에서 기준신호를 관찰할 수 있도록 한 개의 리플렉터를 추가적으로 포함한다. 또한 온도 변화에 따른 전파 속도의 변화로 인해 발생 하는 위상 변화를 관찰하기 위한 리플렉터를 포함한다. $41^{\circ}$YX $LiNbO_3$ 압전기판, AZ1512 감광제, 알루미늄을 이용하여 제작 되었고 네트워크 분석기를 통해 출력된 신호로 ID 번호를 식별하고 $30^{\circ}C$에서 $120^{\circ}C$까지의 온도 변화에 따른 위상 변화를 측정하였다.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.3 no.2
• /
• pp.291-304
• /
• 1999

In this work, a mathematical modeling of SAW coupled mode in SAW resonator filter, which is very useful in analyzing the characteristics of periodic electrode structure such as SAW reflective array and inter-digital transducers. was considered by mathematical analytic approach. The design and simulation method for resonator filter was also proposed by equivalent transduction matrix using this mathematical modeling. In order for a designer to simulate, and to design the coupled mode SAW resonator filters effectively that could be applied to mobile communication system, a design simulator for coupled mode filter was implemented by graphic user interface, and it was investigated by designing and analyzing practical SAW coupled mode resonator filter from a view point of application of this simulator.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.8 no.4
• /
• pp.151-155
• /
• 1983

In this paper, it is studied a novel SAW oscillator by applicating SAW delay characteristics, which can be variable its frequencies by consiting of two output IDT(Inter-Digital Transducer) without external filtering and resonating circuits. The results of experiments showed the temperature characteristics of AT-cut quartz which has been used as frequency-determing substrate of SAW oscillator was good. Though the variable frequencies range was narrow but the experiments showed the possibility to broaden its frequencies range by design of SAW device, and also confromed the stability of fundamental wave oscillating in high frequency range.

• The Journal of the Acoustical Society of Korea
• /
• v.18 no.4
• /
• pp.53-59
• /
• 1999

Of various SPUDT SAW filter types, we select the two most common types, DART and EWC/SPUDT, and analyze their performance with the Smith equivalent circuit method. Based on the results for an exemplary case, a usual apodized SAW filter, we investigate the advantage of one type over the other, if any, in a quantitative manner. To compensate for the performance degradation that can happen in the process of the modification of the apodized filer to the SPUDT structure, we apply the triangular weighting technique to wide fingers of the IDT. Further, the variation in performance of the SPUDT structure is investigated in relation to its electrode thickness and the number of fingers. The results in this paper are expected to enable us to easily select an SPUDT type appropriate for each particular application field.

• The Journal of the Acoustical Society of Korea
• /
• v.15 no.4E
• /
• pp.14-20
• /
• 1996

The double mode SAW resonator filters have the serious shortcoming that out-of-band rejection above the passband is quite poor. Hence a new structure of the double mode filter is designed with the COM (Coupling Of MOdes) theory with better out-of-band rejection characteristics while keeping all the beauties of the conventional type. The second goal of the design is to reduce the planar size of the structure so that mass productivity of low frequency devices can be improved. For those purposes, several IDT's and relfector gratings are added to or subtracted from the conventional structure so that the modification can lead to better overall performance as a filter. As results of the investigation, several new double mode SAW resonator filter structures are developed. A new structure shows 10dB more out-of-band rejection that the conventional type with 25% reduced device size. Good agreement is demonstrated between the analytical results and experimental results for an illustrative 325MHz four pole resonator filter on 64°YX LiNbO3.

• Proceedings of the KIEE Conference
• /
• 2001.07c
• /
• pp.1340-1342
• /
• 2001

ZnO thin films are Prepared on Si(111) substrate by RF magnetron sputtering. Two-step deposition method is proposed to obtain ZnO thin films with high c-axis (002) TC value and electrical resistivity. This method consists of the following two-step deposition procedures: 1st-deposition for 10$\sim$30 min without oxygen at 100W and 2nd-deposition with oxygen added in the range of $O_2/(Ar+O_2)$ = 10 $\sim$ 50%. SAW filters with IDT/ZnO/Si(111) configuration are also fabricated. From the frequency response characteristics, the insertion loss and the side-lobe rejection are estimated.

• Proceedings of the Korean Society For Composite Materials Conference
• /
• 2002.10a
• /
• pp.265-268
• /
• 2002

In this work, the blend system of epoxy and PMR-15 polyimide is investigated in terms of the cure behaviors and thermal stabilities. The cure behaviors are studied in DSC measurements and thermal stabilities are also carried out by TGA analysis. DDM (4, 4'-diamino diphenyl methane) is used as curing agent for EP and the content of PMR-15 is varied within 0, 5, 10, 35, and 20 phr to neat EP. As a result, the cure activation energy ($E_a$) is increased at 10 phr of PMR-15, compared with that of neat EP. From the TGA results of EP/PMR-15 blend system, the thermal stabilities based in the initial decomposed temperature (IDT) and integral procedural decomposition temperature (IPDT) are increased with increasing the PMR-15 content. The fracture toughness, measured in the context of critical stress intensity factor ($K_{IC}$) and critical strain energy release rate ($G_{IC}$), shows a similar behavior with $E_a$. This result is probably due to the crosslinking developed by the interactions between intermolecules in the polymer chains.