• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.380-381
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• 2012

Bioinspired sea urchin-like structures were fabricated on silicon by inductively coupled plasma (ICP) etching using lens-like shape hexagonally patterned photoresist (PR) patterns and subsequent metal-assisted chemical etching (MaCE) [1]. The lens-like shape PR patterns with a diameter of 2 ${\mu}m$ were formed by conventional lithography method followed by thermal reflow process of PR patterns on a hotplate at $170^{\circ}C$ for 40 s. ICP etching process was carried out in an SF6 plasma ambient using an optimum etching conditions such as radio-frequency power of 50 W, ICP power of 25 W, SF6 flow rate of 30 sccm, process pressure of 10 mTorr, and etching time of 150 s in order to produce micron structure with tapered etch profile. 15 nm thick Ag film was evaporated on the samples using e-beam evaporator with a deposition rate of 0.05 nm/s. To form Ag nanoparticles (NPs), the samples were thermally treated (thermally dewetted) in a rapid thermal annealing system at $500^{\circ}C$ for 1 min in a nitrogen environment. The Ag thickness and thermal dewetting conditions were carefully chosen to obtain isolated Ag NPs. To fabricate needle-like nanostructures on both the micron structure (i.e., sea urchin-like structures) and flat surface of silicon, MaCE process, which is based on the strong catalytic activity of metal, was performed in a chemical etchant (HNO3: HF: H2O = 4: 1: 20) using Ag NPs at room temperature for 1 min. Finally, the residual Ag NPs were removed by immersion in a HNO3 solution. The fabricated structures after each process steps are shown in figure 1. It is well-known that the hierarchical micro- and nanostructures have efficient light harvesting properties [2-3]. Therefore, this fabrication technique for production of sea urchin-like structures is applicable to improve the performance of light harvesting devices.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.942-945
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• 1999

In this work, we proposed Proper etching algorithm for ultra-large scale integrated circuit device and simulated etching process using the proposed algorithm in the case of ICP (inductive coupled plasma) 〔1〕source. Until now, many algorithms for etching process simulation have been proposed such as Cell remove algorithm, String algorithm and Ray algorithm. These algorithms have several drawbacks due to analytic function; these algorithms are not appropriate for sub 0.1 ${\mu}{\textrm}{m}$ device technologies which should deal with each ion. These algorithms could not present exactly straggle and interaction between Projectile ions and could not consider reflection effects due to interactions among next projectile ions, reflected ions and sputtering ions, simultaneously In order to apply ULSI process simulation, algorithm considering above mentioned interactions at the same time is needed. Proposed algorithm calculates interactions both in plasma source region and in target material region, and uses BCA (binary collision approximation4〕method when ion impact on target material surface. Proposed algorithm considers the interaction between source ions in sheath region (from Quartz region to substrate region). After the collision between target and ion, reflected ion collides next projectile ion or sputtered atoms. In ICP etching, because the main mechanism is sputtering, both SiO$_2$ and Si can be etched. Therefore, to obtain etching profiles, mask thickness and mask composition must be considered. Since we consider both SiO$_2$ etching and Si etching, it is possible to predict the thickness of SiO$_2$ for etching of ULSI.

• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.1-5
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• 2008

In this paper, we fabricated pressure difference type gas flow sensor using only dry etching technology by ICP-RIE(inductive coupled plasma reactive ion etching). The sensor's structure consists of a common shear stress type piezoresistive pressure sensor with an orifice fabricated in the middle of the sensor diaphragm. Generally, structure like diaphragm is fabricated by wet etching technology using TMAH, but we fabricated diaphragm by only dry etching using ICP-RIE. To equalize the thickness of diaphragm we applied insulator($SiO_2$) layer of SOI(Si/$SiO_2$/Si-sub) wafer as delay layer of dry etching. Size of fabricated diaphragm is $1000{\times}1000{\times}7\;{\mu}m^3$ and overall chip $3000{\times}3000{\times}7\;{\mu}m^3$. We measured the variation of output voltage toward the change of gas pressure to analyze characteristics of the fabricated sensor. Sensitivity of fabricated sensor was relatively high as about 1.5mV/V kPa at 1kPa full-scale. Nonlinearity was below 0.5%F.S. Over-pressure range of the fabricated sensor is 100kPa or more.

• Journal of Soil and Groundwater Environment
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• v.23 no.6
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• pp.73-81
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• 2018

Inductively coupled plasma-mass spectrometry (ICP-MS), one of the most commonly used instruments for metal analysis, was used to determine total uranium in soil. The method was named as "Modified ASTM C1345-96". When comparing with ASTM C1345-96, digestion time (2~3 days) was shorten to 7 hours and the treatment in furnace was eliminated. In analyses of 26 field soil samples, there was a significant difference in the average concentration of total uranium between modified ASTM C1345-96 and ASTM C1345-96 (F : 6.22 > Fc : 4.03, significance level : 0.05, n=26). The average concentration of modified ASTM C1345-96 was 1.8 times larger than that of ASTM C1345-96. In addition, modified ASTM C1345-96 was compared with other acid digestion methods for soil including ISO 11466, Modified ISO 11466, US EPA-3051, US EPA-3051A and US EPA-3052 using a certificated reference material (SRM 2711a, NIST) and field soil samples with different level of organic matter content (1.6%, 5.8%, 10.6%). Modified ASTM C1345-96 showed the best accuracy of 93.01% for SRM 2711a. Also, modified ASTM C1345-96 showed the higher extraction rates than other digestion methods by 11~45%.

• Journal of Korean Association for Spatial Structures
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• v.19 no.2
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• pp.63-72
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• 2019

Wireless sensors are more favorable in measuring structural response compared to conventional sensors in terms of them being easier to use with no issues with cables and them being considerably cheaper. Previous tests have been conducted to analyze the performance of MEMS (Micro Electro Mechanical Systems) sensor in sinusoidal excitation tests. This paper analyzes the performance of in-built MEMS sensors in devices by comparing with an ICP sensor as the reference. Earthquake input amplitude excitation in shaking table tests was done. Results show that MEMS sensors are more accurate in measuring higher input amplitude measurements which range from 100gal to 250gal than at lower input amplitudes which range from 10gal to 50gal. This confirms the results obtained in previous sinusoidal tests. It was also seen that natural frequency results have lower error values which range from 0% to 3.92% in comparison to the response spectra results. This also confirms that in-built MEMS sensors in mobile devices are good at estimating natural frequency of structures. In addition, it was also seen that earthquake input amplitudes with more frequency contents (Gyeongju) had considerably higher error values than Pohang excitation tests which has less frequency contents.

• Journal of Korean society of Dental Hygiene
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• v.21 no.6
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• pp.721-729
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• 2021

Objectives: This study aimed to examine the actual use of interdental care products (ICPs), such as dental floss (DF) and interdental brushes (IDB), among Korean youth, confirm their relevance to periodontal health, and determine the factors that influence the use of each product. Methods: This study included 15,912 young adults aged 19-39 years and data from the Korea National Health and Nutrition Examination Survey (KNHANES) (2007-2018). The usage rate of ICPs according to the characteristics of the subjects for each cycle of KNHANES was presented. Multivariable logistic regression analysis was performed to identify factors affecting the use of ICP. Results: The use rates of DF and IDB gradually increased until the 7th period, reaching 34.8% and 26.8%, respectively. The rate of using more than one ICP also showed a tendency to gradually increase from 25.2% in the 4th period to 50.0% in the 7th period. The use of interdental care products is related to gingivitis and periodontitis. Factors related to the use of ICP were gender, age, education level, frequency of brushing, and dental examination experience. Conclusions: The use of dental floss or interdental toothbrushes was related to periodontal health, but only half of the adults aged 19-39 years used ICP. Therefore, oral health experts should actively encourage the use of DF and IDB in young adults.

• Analytical Science and Technology
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• v.13 no.3
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• pp.309-314
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• 2000

The quantitative analysis of various trace metals including fission products in lithium molten salts has been performed using a inductively coupled plasma atomic emission spectrometer (ICP-AES). The spectral interferences of lithium content, 500, 1,000 and 2,000 mg/L, in the sample solution were investigated using an optimum wavelength for the respective metal species. As a result, the line intensities for Y, Nd, Sr, and La had no influences from the lithium content up to 2,000 mg/L, while Mo, Ba, Ru, Pd, Rh, Zr and Ce showed spectral interferences of 10% to 50%. The group separation of metals from lithium in the molten salts solution was carried out by adding ammonia water into the solution. The recovery of Ru, Y, Rh, Zr, Nd, Ce, La and Eu was found to be over 90%, while Mo, Ba, Pd, and Sr provided low recovery percentages.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.199.2-199.2
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• 2014

Titanium과 Ruthenium의 비율(Ru/Ti = 0.01, 0.03, 0.05, 0.07)을 조절하여 Ruthenium이 도입된 산화타이타늄($TiO_2$)를 수열합성법을 이용하여 합성하였다. TEM 이미지를 통하여 네모난 형태의 나노입자를 확인하였으며 XRD 패턴과 ICP 원소 분석을 통하여 Anatase 형태와 각각 다른 양의 Ruthenium이 도입된 것을 확인하였다. 본 연구에서는 Ruthenium이 도입된 산화타이타늄을 이종상촉매로 사용하여 Benzyl alcohol 및 Benzyl amine의 산화반응에 적용하였으며 특히, Ru/Ti = 0.03인 촉매가 가장 우수한 활성을 보였다.

• Korean Journal of Food Science and Technology
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• v.36 no.3
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• pp.375-378
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• 2004

There are few studies on toxic metals in crustaceans available in Korea. Therefore, this study was conducted to estimate content of toxic metals in crustaceans (n=58). Samples were digested with acids and analysed by inductively coupled plasma spectrometer (ICP) or atomic absorption spectrometer (AAS) for lead (Pb), cadmium (Cd), and arsenic (As). Mercury (Hg) contents were determined using mercury analyzer. Toxic metal contents [minimum-maximum (mean), mg/kg] in crustaceans were as follows; Hg 0.004-0.28 (0.06), Pb ND-0.31 (0.03), Cd 0.003-0.92 (0.14), and As 0.01-35.9 (6.63). Our results demonstrated that metal contents in crustaceans on Korean markets were similar to those reported in other countries. Our average weekly intakes of Pb, Cd, and Hg from crustaceans were lower than 1% of Provisional Tolerable Weekly Intakes (PTWI) set by Joint FAO/WHO Expert Committee for food safety evaluation.

• Korean Journal of Food Science and Technology
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• v.36 no.4
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• pp.523-526
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• 2004

There are few studies on toxic metals in fruits. Therefore, we examined contents of toxic metals in fruits (n=386) available in Korean markets. The samples were digested with acids, then analyzed by inductively coupled plasma spectrometer (ICP) or atomic absorption spectrophotometer (AAS) for lead (Pb), cadmium (Cd), and arsenic (As). The contents of mercury (Hg) were also determined using a mercury analyzer, Contents of toxic metals in fruits were as follows [minimum-maximum (mean), mg/kg]; Hg 0.0001-0.019 (0.001), Pb 0.001-0.410 (0.013), Cd 0.001-0.035 (0.000), and As 0.001-0.210 (0.017). Our results showed that metal contents in fruits in Korean markets were similar to those reported in other countries. Average weekly intakes of Hg, Pb, and Cd from fruits are about 1-2% of Provisional Tolerable Weekly Intakes (PTWI) set by FAO/WHO Joint Food Additive and Contaminants Committee for safety evaluation.