• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1490-1493
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• 2009

In this work we present a new type of line plasma source using an internal-type ICP operated at 2MHz with a ferrite module, describe the effect of ferrite module on the enhancement of the plasma properties and the uniformity, and compare to those obtained with 13.56MHz discharge. Also the electrical characteristics of the antenna line and the characteristics of the plasma uniformity were studied.

• Bulletin of the Korean Chemical Society
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• v.31 no.4
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• pp.803-807
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• 2010

Schorl modified by $H_2SO_4$ has been successfully developed to enhance schorl-catalyzed Fenton-like reaction for removal of phenol in an aqueous solution. The phenol removal percentage can be increased from 4% to 100% by the system of modified schorl and $H_2O_2$. Batch experiments indicate that the percent increases in removal of phenol by increasing the dosage of catalyst, temperature and initial concentration of $H_2O_2$. The results of XRD, FT-IR and SEM suggest that no new phases are formed after removal of phenol by modified schorl. ICP-AES results reveal that more dissolution of iron results in higher catalytic oxidant activity in the system of modified schorl and $H_2O_2$. Besides minor adsorption, mineral-catalyzed Fenton-like reaction governs the process.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.465-465
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• 2010

Cut off probe, the efficient method, can measure the plasma parameters like the plasma electron density and the electron temperature. Plasma potential is also one of the important parameters in plasma processing but cannot be measured by cut off probe yet. Thus we developed method to measure plasma potential by focusing on relation between bias on a tip and sheath around tip. The system consist of a ICP(Inductive Coupled Plasma) source, a Network analyzer and a bias tee that can be bridge apply DC voltage on the cut off probe tip. Plasma potential is identified by using this system. The results corresponded well with the measured results by single langmuir probe(SLP).

• Analytical Science and Technology
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• v.19 no.4
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• pp.323-332
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• 2006

This paper discusses several low-temperature heat-tranfer fluids, including water-based inorganic salt, organic salt, alcohol/glycol mixtures, silicones, and halogenated hydrocarbons in order to choose the best heat-transfer fluid for the newly designed direct contact refrigeration system. So, it contains a survey on commercial products such as propylene glycol and potassium formate as newly used in super market and food processing refrigeration. The stability of commercial fluids at the working temperature of $-20^{\circ}C$ was monitored as a function of time up to two months. And organic and inorganic compositions of candidate fluids were obtained by analytical instruments such as ES, XRF, AAS, ICP-AES, GC, and GC-MS. Analysis results indicate that commercial propylene glycol is very efficient and safe heat transfer fluids for the direct cooling system with liquid phase.

• Proceedings of the Korean Environmental Health Society Conference
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• 2005.06a
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• pp.365-370
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• 2005

The objective of this study is to develop the sorbent of oyster shell, which can remove gaseous acid pollutants emitted from the incinerator and power plants. The physicochemical properties of prepared absorbents have been measured using ICP and BET Also, this study is to investigate the Hydration/calcination reaction in the fixed bed reactor. Thus, the results could be summarized as follows. Oyster shell can be used in powder type without former processing. It should be also noted that sulfation reactivity of oyster sample increases to about 5 times by calcination/hydration reaction due to the increase of specific surface area and pore volume. From these experiments, we have found that both $SO_2$ and $NO_x$ in simulated flue gas can be effectively removed by use of oyster absorbent.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.554-557
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• 2011

One of the issues that occurs in development of a combustor using Metal Powder as a fuel is an alumina slag processing. A water film formed inside the combustor is expected to be able to solve this issue. The experiments about the formation of a water film were carried out as a preliminary study. As the tangential velocity of water jet is increasing, the angle derivation from horizontal is decreasing for the test model. Results of the experiments showed that the thin water film on the inner surface appeared at the velocity of 10~15 m/s.

• Journal of Korean Society for Atmospheric Environment
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• v.18 no.5
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• pp.363-372
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• 2002

PM$_{10}$ aerosols were collected using low volume air sampler every month intervals from September 1992 to August 1991 in Seoul. These samples were analyzed for 20 trace elements (Al, As, Ba, Br, Ca, Cl, Co, Cr, Fe, K, Mn, Na, Ni, Pb, Sc, Se, Si, Ti, V and Zn) by INAA (instrumental neutron activation analysis), XRF (x-ray fuorescence spectrometer), and ICP (inductively coupled plasma). PM$_{10}$ mass concentrations higher than 70 $\mu$g/m$^3$ were 32% of 60 samples and had significantly higher concentrations in spring and winter than in summer and fall (p-value<0.001). The elements of As, Br, Cl, Ni, Pb, Se, V, and Zn are enriched by factors of 20 to 2,000 relative to their natural abundance in crustal soil. To further identify common sources of pollution-related trace elements, factor analysis was applied to the trace elements concentration data. Major sources that contribute to the atmospheric loading of these elements were found to include fossil fuel combustion, automobile and waste incineration (33.2%), metal processing industry (18.2%), and soil(29.8%).8%).

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1462-1464
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• 2006

Scaling rules for TFT application devices have led to the necessity of ultra thin dielectric films and high-k dielectric layers. In this paper, The advantages of high concentration of nitrogen in silicon oxide layer deposited by using $N_2O$ in Inductively Coupled Plasma Chemical Vapor Deposition (ICP-CVD) is investigated using X-ray energy dispersive spectroscopy (EDS). We have reported about Ellipsometric measurement, Capacitance - Voltage characterization and processing conditions.

• JSTS:Journal of Semiconductor Technology and Science
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• v.3 no.1
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• pp.21-26
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• 2003

4H-SiC Schottky rectifiers were exposed to pure Ar discharges in a planar coil Inductively Coupled Plasma system, as a function of source power, of chuck power and process pressure. The reverse breakdown voltage ($V_B$) decreased as a result of plasma exposure due to the creation of surface defects associated with the ion bombardment. The magnitude of the decrease was a function of both ion flux and ion energy. The forward turn-on voltage ($V_F$), on-state resistance ($R_{ON}$) and diode ideality factor (n) all increased after plasma exposure. The changes in all of the rectifier parameters were minimized at low power, high pressure plasma conditions.

• Laser Solutions
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• v.17 no.4
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• pp.7-13
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• 2014

In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).