Effect on 4H-SiC Schottky Rectifiers of Ar Discharges Generated in A Planar Inductively Coupled Plasma Source |
Jung, P.G.
(Department of Optical Engineering, Inje University)
Lim, W.T. (Department of Optical Engineering, Inje University) Cho, G.S. (Department of Optical Engineering, Inje University) Jeon, M.H. (Department of Optical Engineering, Inje University) Lee, J.W. (Department of Optical Engineering, Inje University) Nigam, S. (Department of Chemical Engineering University of Florida) Ren, F. (Department of Chemical Engineering University of Florida) Chung, G.Y. (Sterling Semiconductor) Macmillan, M.F. (Sterling Semiconductor) Pearton, S.J. (Department of Materials Sciences and Engineering University of Florida) |
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