• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.848-850
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• 1999

In this study, PZT etching was performed using planar inductively coupled Ar(20)/$Cl_2/BCl_3$ plasma, The etch rate of PZT film was 2450 $\AA/min$ at Ar(20)/$BCl_3$(80) gas mixing ratio and substrate temperature of $80^{\circ}C$. X-ray photoelectron spectroscopy (XPS) analysis for film composition was utilized. The chemical bond of PbO is broken by ion bombardment, and the peak of metal Pb in a Pb 4f peak begins to appear upon etching, decreasing Pb content faster than Zr and Ti. As increase content of additive $BCl_3$, the relative content of oxygen decreases rapidly. We thought that abundant Band BCl radicals made volatile oxy-compound such as $B_{x}O_{y}$ and/or $BClO_x$ bond. To understand etching mechanism, Langmuir probe and optical emission spectroscopy (OES) analysis were utilized for plasma diagnostic.

• Journal of the Korean institute of surface engineering
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• v.41 no.4
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• pp.134-141
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• 2008

We have developed a numerical model for a remote ICP(inductively coupled plasma) system in 2D and 3D with gas distribution configurations and confirmed it by plasma diagnostics. The ICP source has a Cu tube antenna wound along a quartz tube driven by a variable frequency rf power source($1.9{\sim}3.2$ MHz) for fast tuning without resort to motor driven variable capacitors. We investigated what conditions should be met to make the plasma remotely localized within the quartz tube region without charged particles' diffusing down to a substrate which is 300 mm below the source, using the numerical model. OES(optical emission spectroscopy), Langmuir probe measurements, and thermocouple measurement were used to verify it. To maintain ion current density at the substrate less than 0.1 $mA/cm^2$, two requirements were found to be necessary; higher gas pressure than 100 mTorr and smaller rf power than 1 kW for Ar.

• Analytical Science and Technology
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• v.11 no.3
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• pp.167-173
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• 1998

An electrothermal vaporization-hollow cathode glow discharge-atomic emission spectrometer(ETV-HCGD-AES) has been developed for detecting heavy metals in human serum and urine samples. Fisrt of all, we designed a glow discharge cell for atomic emission spectrometry and its analytical performance was studied with the standard reference materials(SRMs) purchased from the NIST. Practically, the ETV-HCGD-AES demonstrated better instrumental sensitivity and selectivity for detecting Hg and Pb in the SRMs, serum and urine, than ICP-OES since the ETV-HCGD-AES was not required the complicate sample digestion procedure, which improved sample transportation efficiency.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.187-190
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• 2004

In this work, we investigated etching characteristics and mechanism of BST thin films using $Cl_2$/Ar, $CF_4/Cl_2$/Ar and $BCl_3/Cl_2$/Ar gas mixtures using inductively coupled plasma (ICP) system. A chemically assisted physical etch of BST was experimentally confirmed by ICP under various gas mixtures. The etch rate of the BST thin films had a maximum value at 20 $BCl_3$ and 10% $CF_4$ gas concentration, and decreased with further addition of $BCl_3$ or $CF_4$ gas, because $BaCl_x$, $SrCl_x$, $BaF_x$ and $SrF_x$ compounds have higher melting and boiling points. The maximum etch rate of the BST thin films was 57nm/min at the 30% $Cl_2(Cl_2+Ar)$. The characteristics of the plasma were analyzed by using OES and Langmuir probe.

• Analytical Science and Technology
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• v.22 no.1
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• pp.82-91
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• 2009

Preparation and evaluation of the limestone samples for a proficiency test using domestic limestone have been performed. We have used statistical method for evaluation of the XRF and instrumental analysis results. We have found that there were some outliers from XRF and ICP-OES instrumental analysis results for each sample. After removal of 5 outliers among the 50 samples we could obtain the homogeneous samples which have within a reliability of 95% from a statistical analysis result.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.7
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• pp.532-536
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• 2011

The silicon nitride films were prepared by chemical vapor deposition using inductively coupled plasma. During the deposition, the substrate was heated at $150^{\circ}C$ and power 1,000 W. To evolution low temperature manufacture, we have studied the role of source gases, $SiH_4$, $NH_3$, $N_2$, and $H_2$, to produce Si-N and N-H bond in a-SiNx:H film growth. $SiH_4$, $NH_3$, and $N_2$ flow rate fixed at 100, 10, and 10 sccm, $H_2$ flow rate varied from 0 to 10 sccm by small scale. To get the electrical characteristics, we makes MIM structure, and analysis surface bonding state. Experimental data show that Si-N and N-H bond is increased and hence electrical characteristics is showed 3 MV/cm breakdown-voltage, and leakage-current $10^{-7}\;A/cm^2$.

• Bulletin of the Korean Chemical Society
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• v.33 no.8
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• pp.2642-2646
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• 2012

Pretreatment of spent FCC catalyst and its application in remove trace olefins in aromatics were investigated in this research. The most effective pretreatment route of spent FCC catalyst was calcining at $700^{\circ}C$ for 1 h, washing with 5% oxalic acid solution in ultrasonic reactor and dried. Treated spent FCC catalyst was modified with metal halides, then to prepare catalyst to remove trace olefins in aromatics. X-ray diffraction, Pyridine-FTIR, $N_2$ adsorption-desorption and inductively coupled plasma optical emission spectrometer (ICP-OES) were used to investigate the pretreatment process. The result showed that the performance of the treated spent FCC catalyst was much greater than that of the spent FCC catalyst, which indicted the possibility and improvement of this research.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.229-229
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• 2013

저온작동형($500{\sim}700^{\circ}$) 고체산화물 연료전지의 전해질 재료의 응용이 기대되는 Gd doped ceria를 고주파 유도결합 열플라즈마 법으로 합성하고 그 특성을 조사하였다. 본 연구에서는 나노 ㄴCeO2 10~100 um의 CeO2와 1~20 um의 Gd2O3를 Ce：Gd이 9:1 mol%와 8:2 mol%의 비율로 혼합한 선구체를 140 kVA의 RF plate power와 O2/Ar 플라즈마 생성 가스 조건에서 형성된 고주파 유도결합 열 플라즈마에 주입하여 ~50 nm 이하의 입도와 fluorite 구조의 결정화된 CeO2 구조를 갖는 Gd doped ceria 나노 분말을 합성하였다. FE-SEM, TEM, XRD, ICP-OES, EDS, BET분석법을 이용하여, 합성된 분말의 입도, 미세구조, 결정 구조, 조성, 표면 등의 특성을 관찰하였다.

• Journal of the Korean Applied Science and Technology
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• v.24 no.3
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• pp.301-308
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• 2007

From the experiment result on pharmacetical characteristics and analysis of Garlic extract, some conclusions were obtained as follows. From the results on extract experiment of Garlic, extraction ratio was about 6.0%, and after dried with dry oven from Garlic extract, it obtained about 50%-Garlic extract of solid state. From results on antimicrobial experiment of Garlic extract, number of staphylococcus and fungus in microbe decreased more and more according to time passage. This phenomenon showed that Garlic extract keeps antimicrobial effect. From results on antioxidation experiment of Garlic extract, DPPH scavenging activity of free radical showed that Garlic extract appears more remarkable reduction ability than reference samples. This phenomenon means that antioxidation of Garlic extract appears higher than Vitamin-C and BHA. From results on instrument analysis, inorganic components of K, Na, Ca, Si, Mg, Zn etcs from Garlic extract were detected with ICP/OES and the fatty and aromatic components of trimethyl sulfide, diallyl disulfide, diallyl trisulfide, 2-mercaptobenzothiazole etcs from Garlic extract were detected with GC/MS.

• Proceedings of the Korean Environmental Health Society Conference
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• 2003.06a
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• pp.89-93
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• 2003

Daily average concentrations of fine particulates have been measured simultaneously in Seoul and Asan area by using PM minivolTM portable air sampler(Air Metrics, U.S.A) from September 2001 to August 2002. The sampler were analyzed by ICP-OES(inductively coupled plasma optical emission spectrometry, optima 3000DV, Perkin Elmor) to determine the fine particulate concentrations of metallic elements(As, Mn. Ni, Fe, Cr, Cu, Cd, Pb, Zn, Si). The concentration of PM$\sub$2.5/ showed a high trend in the Seoul area. Zn showed a similar distribution ratio for the fine particle in both Seoul and Asan. Mn and Fe, Cr, Cd are highly correlated in the Seoul and Asan area(P<0.05).