Low Temperature Deposition a-SiNx:H Using ICP Source |
Kang, Sung-Chil
(Department of Control and Instrumentation Engineering, Korea University)
Lee, Dong-Hyeok (Department of Display and Semiconductor Physics Engineering, Korea University) So, Hyun-Wook (Department of Display and Semiconductor Physics Engineering, Korea University) Jang, Jin-Nyoung (Department of Display and Semiconductor Physics Engineering, Korea University) Hong, Mun-Pyo (Department of Display and Semiconductor Physics Engineering, Korea University) Kwon, Kwang-Ho (Department of Control and Instrumentation Engineering, Korea University) |
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