• Journal of the Korean Crystal Growth and Crystal Technology
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• v.11 no.5
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• pp.224-230
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• 2001

The characteristics of $NO/N_2O$ annealed reoxidized nitrided oxide being studied as super thin gate oxide and gate dielectric layers of Non-Volatile Semiconductor Memory (NVSM) were investigated by Dynamic Secondary Ion Mass Spectrometry (D-SIMS), Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS), and Auger Electron Spectroscopy (AES). The specimen was annealed by $NO/N_2O$ after initial oxide process and then rcoxidized for nitrogen redistribution in nitrided oxide. Out-diffusion of incorporated nitrogen during the wet oxidation in reoxidation process took place more strongly than that of the dry oxidation. It seems to indicate that hydrogen plays a role in breaking the Si N bonds. As reoxidation proceeds, incorporated nitrogen of $NO/N_2O$ annealed nitrided oxide is obsen-ed to diffuse toward the surface and substrate at the same time. ToF-SIMS results show that SiON species are detected at the initialoxide interface, and Si,NO species near the new $Si_2NO$ interface that formed after reoxidation. These SiON and $Si_2NO$ species most likely to relate to the origin of the state of memory charge traps in reoxidized nitrided oxide, because nitrogen dangling bonds of SiON and silicon dangling bonds of $Si_2NO$ are contained defects associated with memory effect.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.399-399
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• 2013

Metal silicides는 Si 기반의microelectronic devices의 interconnect와 contact 물질 등에 사용하기 위하여 그 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 이 중 Rare-earth(RE) silicides는 저온에서 silicides를 형성하고, n-type Si과 낮은 Schottky Barrier contact (~0.3 eV)을 이룬다. 또한 낮은 resistivity와 Si과의 작은 lattice mismatch, 그리고 epitaxial growth의 가능성, 높은 thermal stability 등의 장점을 갖고 있다. RE silicides 중 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 n-channel schottky barrier MOSFETs의 source/drain으로 주목받고 있다. 또한 Silicon 기반의 CMOSFETs의 성능 향상 한계로 인하여 germanium 기반의 소자에 대한 연구가 이루어져 왔다. Ge 기반 FETs 제작을 위해서는 낮은 source/drain series/contact resistances의 contact을 형성해야 한다. 본 연구에서는 저접촉 저항 contact material로서 ytterbium germanide의 가능성에 대해 고찰하고자 하였다. HRTEM과 EDS를 이용하여 ytterbium germanide의 미세구조 분석과 면저항 및 Schottky Barrier Heights 등의 전기적 특성 분석을 진행하였다. Low doped n-type Ge (100) wafer를 1%의 hydrofluoric (HF) acid solution에 세정하여 native oxide layer를 제거하고, 고진공에서 RF sputtering 법을 이용하여 ytterbium 30 nm를 먼저 증착하고, 그 위에 ytterbium의 oxidation을 방지하기 위한 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, rapid thermal anneal (RTA)을 이용하여 N2 분위기에서 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium germanides를 형성하였다. Ytterbium germanide의 미세구조 분석은 transmission electron microscopy (JEM-2100F)을 이용하였다. 면 저항 측정을 위해 sulfuric acid와 hydrogen peroxide solution (H2SO4:H2O2=6:1)에서 strip을 진행하여 TiN과 unreacted Yb을 제거하였고, 4-point probe를 통하여 측정하였다. Yb germanides의 면저항은 열처리 온도 증가에 따라 감소하다 증가하는 경향을 보이고, $400{\sim}500^{\circ}C$에서 가장 작은 면저항을 나타내었다. HRTEM 분석 결과, deposition 과정에서 Yb과 Si의 intermixing이 일어나 amorphous layer가 존재하였고, 열처리 온도가 증가하면서 diffusion이 더 활발히 일어나 amorphous layer의 두께가 증가하였다. $350^{\circ}C$ 열처리 샘플에서 germanide/Ge interface에서 epitaxial 구조의 crystalline Yb germanide가 형성되었고, EDS 측정 및 diffraction pattern을 통하여 안정상인 YbGe2-X phase임을 확인하였다. 이러한 epitaxial growth는 면저항의 감소를 가져왔으며, 열처리 온도가 증가하면서 epitaxial layer가 증가하다가 고온에서 polycrystalline 구조의 Yb germanide가 형성되어 면저항의 증가를 가져왔다. Schottky Barrier Heights 측정 결과 또한 면저항 경향과 동일하게 열처리 증가에 따라 감소하다가 고온에서 다시 증가하였다.

• Textile Coloration and Finishing
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• v.1 no.1
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• pp.19-25
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• 1989

In past, dye diffusion and dyeing rate in fibers have been emphasized in dyeing phenomena. However, in the light of the properties of colloids in the surface of disperse phase and dispersion, there exist specific characters such as adsorption or electric double layer, which seems to play important roles in determining the physiochemical properties in the dyeing system. Electrostatic bonding, hydrogen bonding and Van der Waals adsorption are common in dyeing as well as covalent bonding. Particularly, electrostatic bonding is premised on the existance of ionic radicals in fibers. The present study was aimed to clarify the electrokinetic phenomena of dyeing through the role of electric double layer by ion in amphoteric fibers with different ionic effects under different pH. Spectrophotometric analysis method was used to compare dyeing condition of surface, which can be detected by electrokinetic phenomena and the inner of fibers after deceleration of dyed fibers. Nylon and wool, the typical amphoteric fibers were dyed with monoazo acid dyes such as C.I. Acid Orange 20, and C.I. Acid Orange 10. Various combinations were prepared by combining pH, temperature and dye concentration, in order to generate streaming electric potential which were measured by microvolt meter and specific conductivity meter. The results were transformed to zeta potential by Helmholtz-Smoluchowski formular and to surface electric charge density by Suzawa formular, surface dye amount, and effective surface area of fibers. The amount of dyes of inner fibers were also measured by the Lambert-Beer’s law. The main results obtained are as follows. 1. By measuring zeta pontential, it was possible to detect the dyeing mechanism, surface charge density, surface dye amount and effective surface area concerning dye adsorption of the amphoteric fibers. 2. Zeta pontential increases in negative at low pH and high dye concentration in the process of dyeing. This implied that there existed ionic bond formation in the dyeing mechanism between acid dyes and amphoteric fibers. 3. Dibasic acid dye had little changing rate in zeta potential due to the difference in solubility of dye and in number of dissociated ions per dye molecule to bond with amino radicals of amphoteric fibers. The dye adsorption of mono basic acid dye was higher than that of dibasic acid dye. 4. The effective surface areas concerning dyeing were $6.3E+05\;cm^2/g$ in nylon, $1.6E+07\;cm^2/g$ in wool fiber being higher order of wool then nylon.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.5
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• pp.509-515
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• 2012

In this study, ${\gamma}-Al_2O_3$ nanoparticles were synthesized by using coflow hydrogen diffusion flames. The synthesis conditions were varied with using several oxygen concentrations in the oxidizing air. The particle characteristics of the flame-synthesized $Al_2O_3$ nanoparticles were determined by examining the crystalline structure, shape, and specific surface area of the nanoparticles. The measured maximum centerline temperature of the flames ranged from 1507.8 K to 1998.7 K. The morphology and crystal structure of the $Al_2O_3$ nanoparticles were determined from SEM images and XRD analyses, respectively. The particle sizes were calculated from measured BET specific surface areas and ranged from 25 nm to 52 nm. From XRD analyses, it was inferred that a large number of the synthesized nanoparticles were ${\gamma}-Al_2O_3$ nanoparticles including ${\theta}-Al_2O_3$ nanoparticles.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.84-84
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• 2012

소자가 고집적화 됨에 따라, 비저항이 낮고 electro migration (EM), Stress Migration (SM) 특성이 우수한 구리(Cu)를 배선재료로서 사용하고 있다. 그러나, 구리는 Si과 $SiO_2$의 내부로 확산이 빠르게 일어나, Si 소자 내부에 deep donor level을 형성하고, 누설 전류를 증가시키는 등 소자의 성능을 저하시킬 수 있는 문제점을 가지고 있다. 그러나, electroplating 을 이용하여 증착한 Cu 박막은 일반적으로 확산 방지막으로 쓰이는 TiN, TaN, 등의 물질과의 접착 (adhesion) 특성이 나쁘다. 따라서, Cu CMP 에서 증착된 Cu 박막의 벗겨지거나(peeling), EM or SM 저항성 저하 등의 배선에서의 reliability 문제를 야기하게된다. 따라서 Cu 와 접착 특성이 좋은 새로운 확산방지막 또는 adhesion layer의 필요성이 대두되고 있다. 본 연구에서는 이러한 Cu 배선에서의 접착성 문제를 해결하고자 Metal organic chemical vapor deposition (MOCVD)을 이용하여 제조한 코발트(Co) 박막을 $Cu/TaN_x$ 사이의 접착력 개선을 위한 adhesion layer로 적용하려는 시도를 하였다. Co는 비저항이 낮고, Cu 와 adhesion이 좋으며, Cu direct electroplating 이 가능하다는 장점을 가지고 있다. 하지만, 수소 분위기에서 $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) 전구체에 의한 MOCVD Co 박막의 경우 탄소, 산소와 같은 불순물이 다량 함유되어 있어, 비저항, surface roughness 가 높아지게 된다. 따라서 구리 전착 초기에 구리의 핵 생성(nucleation)을 저해하고 핵 생성 후에도 응집(agglomeration)이 발생하여 연속적이고 얇은 구리막 형성을 방해한다. 이를 해결하기 위해, MOCVD Co 박막 증착 시 수소 반응 가스에 암모니아를 추가로 주입하여, 수소/암모니아의 분압을 1:1, 1:6, 1:10으로 변화시켜 $Co/TaN_x$ 박막의 특성을 비교 분석하였다. 각각의 수소/암모니아 분압에 따른 $Co/TaN_x$ 박막을 TEM (Transmission electron microscopy), XRD (X-ray diffraction), AES (Auger electron spectroscopy)를 통해 물성 및 조성을 분석하였고, AFM (Atomic force microscopy)를 이용하여, surface roughness를 측정하였다. 실험 결과, $Co/TaN_x$ 박막은 수소/암모니아 분압 1:6에서 90 ${\mu}{\Omega}-cm$의 낮은 비저항과 0.97 nm 의 낮은 surface roughness 를 가졌다. 뿐만 아니라, MOCVD 에 의해 증착된 Co 박막이4-6 % concentration 의 탄소 및 산소 함량을 가지는 것으로 나타났고, 24nm 크기의 trench 기판 위에 약 6nm의 $Co/TaN_x$ 박막이 매우 균일하게 형성된 것을 확인 할 수 있었다. 이러한 결과들은, 향후 $Co/TaN_x$ 박막이 Cu direct electroplating 공정이 가능한 diffusion barrier로서 성공적으로 사용될 수 있음을 보여준다.

• Journal of the Korean Electrochemical Society
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• v.10 no.4
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• pp.301-305
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• 2007

The performance of polymer electrolyte membrane fuel cell could be decreased due to coolant leaked from connection part. Micro pump was used to put small amount of coolant and investigate the effect on fuel cell. The stoichiometric ratio of hydrogen/air was 1.5/2.0, both side of gas was fully humidified, and current density of $400mA/cm^2$ was used as standard condition in this experiment. Constant current method was used to check performance recovery from coolant effect in 3 cell stack. The performance was recovered when coolant was injected in cathode side. On the other hand, the performance was not recovered when coolant was injected in anode side. Ethylene glycol could be converted to CO in oxidation process and cause poisoning effect on platinum catalyst or be adhered on GDL and cause gas diffusion block effect resulting performance decrease. Water with nitrogen gas was supplied in anode side to check performance recovery. Polarization curve, cyclic voltammetry, electrochemical impedance spectroscopy was used to check performance, and gas chromatography was used to check coolant concentration. Constant current method was not enough in full recovery of performance. However, water injection method was proved good method in full recovery of performance.

• Korean Chemical Engineering Research
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• v.56 no.1
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• pp.1-5
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• 2018

In this work, we study the ion conductivity by analyzing the impedance to the high current density range that the PEMFC (Proton Exchange Membrane Fuel Cell) is actually operated. The effect of GDL (Gas Diffusion Layer)presence on impedance was investigated indirectly by measuring hydrogen permeability. When the RH (Relative Humidity)was higher than 60% in the low current range (< $80mA/cm^2$), the moisture content of the polymer membrane was sufficient and the ion conductivity of the membrane was not influenced by the current change. However, when RH was low, ion conductivity increased due to water production as current density increased. The ion conductivity of the membrane obtained by HFR (High Frequency Resistance) in the high current region ($100{\sim}800mA/cm^2$)was compared with the measured value and simulated value. At RH 100%, both experimental and simulated values showed constant ion conductivity without being influenced by current change. At 30~70% of RH, the ionic conductivity increased with increasing current density and tended to be constant.

• Nuclear Engineering and Technology
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• v.4 no.2
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• pp.132-136
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• 1972

The mechanism for activated sintering of UO$_2$by an addition of 0.05 w/o TiO$_2$was investigated using a high temperature X-ray diffractometer. The diffraction pattern of UO$_2$pellets was studied in a temperature range from room temperature to 120$0^{\circ}C$ in hydrogen atmosphere. At 120$0^{\circ}C$, the expansion of UO$_2$lattice were 1.448% and 1.354% greater when it was compared with those at room temperature for pellets with and without the 0.05 w/o TiO$_2$addition, respectively-The effect of the TiO$_2$addition is to increase the lattice constant of UO$_2$by 0.094% at 120$0^{\circ}C$. The lattice constant at 120$0^{\circ}C$without the TiO$_2$addition is equal to that at 108$0^{\circ}C$ with the 0.05 w/o TiO$_2$addition. This temperature difference could be well compared with the suppression of sintering temperature by TiO$_2$hat had been observed Previously. It is believed that the increase in lattice expansion due to the TiO$_2$addition would give rise to the activated sintering of UO$_2$by the lattice-expansion-induced-enhancement of self diffusion.

• Clean Technology
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• v.25 no.2
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• pp.101-106
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• 2019

The aim of this study is to investigate the feasibility of an Ni-SA catalyst, which was prepared from nickel, kieselguhr, and alumina, for the hydrogenation of triglyceride in a bench-scale reactor. Ni-SA powders were prepared by precipitating nickel precursors on a silica and alumina support. The powder was reduced in a hydrogen flow, mixed with a saturated palm oil, and then cooled to prepare an Ni-SA catalyst tablet. The sizes of NiO crystals of a commercial Pricat catalyst and the Ni-SA catalyst prepared in this study were $35{\AA}$ and $38{\AA}$, respectively. The pore volume and pore size of the Ni-SA catalyst was much larger than the pore volume and pore size of the Pricat catalyst. In addition, the average particle size of the Ni-SA catalyst was much smaller than that of the Pricat catalyst. The triglyceride hydrogenation reaction was carried out in a semi-batch reactor using catalysts impregnated with oil and molded into tablets. It was found that the Ni-SA catalyst was superior to the commercial Pricat catalyst in triglyceride hydrogenation, which could be ascribed to the raw material and the products being less influenced by the diffusion resistance in the pores of the Ni-SA catalyst. The Ni-SA catalyst prepared in this study has the potential to replace the Pricat catalyst as a catalyst for use in the commercial process for hydrogenation of triglyceride.

• Tunnel and Underground Space
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• v.31 no.5
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• pp.333-359
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• 2021

Gases such as hydrogen and radon can be generated around the canister in high-level radioactive waste disposal systems due to several reasons including the corrosion of metal materials. When the gas generation rate exceeds the gas diffusion rate in the low-permeability bentonite buffer, the gas phase will form and accumulate in the engineered barrier system. If the gas pressure exceeds the gas entry pressure, gas can migrate into the bentonite buffer, resulting in pathway dilation flow and advective flow. Because a sudden occurrence of dilation flow can cause radionuclide leakage out of the engineered barrier of the radioactive waste disposal system, it is necessary to understand the gas migration behavior in the bentonite buffer to quantitatively evaluate the long-term safety of the engineered barrier. Experimental research investigating the characteristics of gas migration in saturated bentonite and research developing numerical models capable of simulating such behaviors are being actively conducted worldwide. In this technical note, previous gas injection experiments and the numerical models proposed to verify such behaviors are introduced, and the future challenges necessary for the investigation of gas migration are summarized.