• Journal of the Korean Society for Heat Treatment
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• v.23 no.2
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• pp.75-82
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• 2010

A new advanced combined PVD/CVD technique of DLC film deposition has been developed. Deposition of a DLC film was carried out using a pulsed carbon arc discharge in vapor hydrocarbon atmosphere. The arc plasma enhancing CVD process promotes dramatic increase in the deposition rate and decrease of compressive stress as well as improvement of film thickness uniformity compared to that obtained with a single PVD pulsed arc process. The optical spectroscopy investigation reveals great increase in radiating components of $C_2$ Swan system molecular bands due to acetylene molecules decomposition. AFM, Raman spectroscopy, XPS and nano-indentation were used to characterize DLC films. The method ensures obtaining a new superhard DLC nano-material for deposition of protective coatings onto various industrial products including those used in medicine.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.58.2-58.2
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• 2012

Heavy hydrocarbon reforming is a core technology for "Dirty energy smart". Heavy hydrocarbons are components of fossil fuels, biomass, coke oven gas and etc. Heavy hydrocarbon reforming converts the fuels into $H_2$-rich syngas. And then $H_2$-rich syngas is used for the production of electricity, synthetic fuels and petrochemicals. Energy can be used efficiently and obtained from various sources by using $H_2$-rich syngas from heavy hydrocarbon reforming. Especially, the key point of "Dirty energy smart" is using "dirty fuel" which is wasted in an inefficient way. New energy conversion laboratory of KAIST has been researched diesel reforming for solid oxide fuel cell (SOFC) as a part of "Dirty energy smart". Diesel is heavy hydrocarbon fuels which has higher carbon number than natural gas, kerosene and gasoline. Diesel reforming has difficulties due to the evaporation of fuels and coke formation. Nevertheless, diesel reforming technology is directly applied to "Dirty fuel" because diesel has the similar chemical properties with "Dirty fuel". On the other hand, SOFC has advantages on high efficiency and wasted heat recovery. Nippon oil Co. of Japan recently commercializes 700We class SOFC system using city gas. Considering the market situation, the development of diesel reformer has a great ripple effect. SOFC system can be applied to auxiliary power unit and distributed power generation. In addition, "Dirty energy smart" can be realized by applying diesel reforming technology to "Dirty fuel". As well as material developments, multidirectional approaches are required to reform heavy hydrocarbon fuels and use $H_2$-rich gas in SOFC. Gd doped ceria (CGO, $Ce_{1-x}Gd_xO_{2-y}$) has been researched for not only electrolyte materials but also catalysts supports. In addition, catalysts infiltrated electrode over porous $La_{0.8}Sr_{0.2}Ga_{0.8}Mg_{0.2}O_3-{\delta}$ and catalyst deposition at three phase boundary are being investigated to improve the performance of SOFC. On the other hand, nozzle for diesel atomization and post-reforming for light-hydrocarbons removal are examples of solving material problems in multidirectional approaches. Likewise, multidirectional approaches are necessary to realize "Dirty energy smart" like reforming "Dirty fuel" for SOFC.

• Journal of the Korean Society of Propulsion Engineers
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• v.11 no.5
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• pp.78-84
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• 2007

In the regeneratively cooled combustion chambers of liquid rocket engine using hydrocarbon fuels, coking occurs as the wall temperature increases which results in compounds deposition on the wall of cooling channels. This phenomenon reduces cooling capability of the coolant which finally causes damage to the combustor by overheating of the chamber wall. In this paper, experiment results using an electrical heating equipment to simulate the regeneratively cooled channel are introduced and based on the results the compatibility of copper alloy with hydrocarbon fuel Jet A-1 is investigated.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.5
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• pp.473-481
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• 2007

Compared to other types of fuel cells, SOFC has advantages like a wide output range and the direct use of hydrocarbon fuel without the process of external reforming. Particularly because the direct use of fuel without reforming reaction is closely linked to overall system efficiency, it is a very attractive advantage. We tried the operation with methane. However, although methane has a small number of carbons compared to other hydrocarbon fuels, our experiment found the deposition of carbon on the surface of the SOFC electrode. To overcome the problem, we tried the operation through activating internal reforming. The reason that internal reforming was possible was that SOFC runs at high temperature compared to other fuel cells and its electrode is made of Ni, which functions as a catalyst favorable for steam reforming.

• Bulletin of the Korean Chemical Society
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• v.19 no.5
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• pp.544-548
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• 1998

A Monte Carlo simulation incorporated with the genetic algorithm is presented to describe the defect known as "transition from Y-to X-type deposition" of the cadmium arachidate Langmuir-Blodgett multilayer film. Simulation is performed based on the detachment models of XY-type deposition. The transition is simulated by introducing a probability of surface molecule detachment considering interaction between neighboring molecules. The genetic algorithm is incorporated into Monte Carlo simulation to get the optimum value of the probability factors. The distribution of layers having different thickness predicted by the simulation correlates well with the measured distribution of thickness using the small-angle X-ray reflectivity. The effect of chain length and subphase temperature on the detachment probability are investigated using the simulation. Simulation results show that an increase (or a decrease) of two hydrocarbon chain is roughly equivalent to the detachment probability to a temperature decrease (or increase) of 15 K.

• Journal of the Korean Chemical Society
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• v.15 no.2
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• pp.55-63
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• 1971

In this study, several nickel catalysts for the steam-hydrocarbon reforming process were prepared from various nickel salt, magnesium oxide, alumina and kaolinite. The activity and strength of the catalysts were investigated. 1. The proper composition of the calcined catalysts are: NiO (5-15%)-MgO(10-20%)-$Al_2O_3$(10-40%)-Kaolinite(50-80%). 2. The admixed or cosedimented ingredients of the catalysts was pelletized and calcinated at 1000 or $1150^{\circ}C$. Calcination at $1150^{\circ}C$ for an hour was optimum. 3. The water to oil ratio (W/O) for reforming of hexane should be above 7 mole/mole. As the W/O increases, more carbon dioxide and hydrogen, but less carbon monoxide was produced. Also carbon deposition become lessen at higher W/O. 4. Maximum conversion had attained at about $850^{\circ}C$. As the reaction temperature increases, more carbon monoxide and hydrogen, but less carbon dioxide and lower hydrocarbon was produced. 5. The percent conversion at $850^{\circ}C$ was about 80%, using a catalyst which the nickel oxide content are 5%.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.381.1-381.1
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• 2014

In this study, we investigated the deposition behavior and the etch resistivity of plasma polymerized carbon hardmask (ppCHM) film with the variation of process temperature. The etch resistivity of deposited ppCHM film was analyzed by thickness measurement before and after direct contact reactive ion etching process. The physical and chemical properties of films were characterized on the Fourier transform infrared (FT-IR) spectroscope, Raman spectroscope, stress gauge, and ellipsometry. The deposition behavior of ppCHM process with the variation of temperature was correlated refractive index (n), extinction coefficient (k), intrinsic stress (MPa), and deposition rate (A/s) with the hydrocarbon concentration, graphite (G) and disordered (D) peak by analyzing the Raman and FT-IR spectrum. From this experiment we knew an optimal deposition condition for structure of carbon hardmask with the higher etch selectivity to oxide. It was shown the density of ppCHM film had 1.6~1.9 g/cm3 and its refractive index was 1.8~1.9 at process temperature, $300{\sim}600^{\circ}C$. The etch selectivity of ppCHM film was shown about 1:4~1:8 to undoped siliconoxide (USG) film (etch rate, 1300 A/min).

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.503-506
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• 2008

Liquid hydrocarbon fuels, such as gasoline, kerosene, diesel and JP 8, can be good candidates for SOFC (solid oxide fuel cell) system fuel due to their high hydrogen density. Autothermal reforming (ATR) is suitable for liquid hydrocarbon fuel reforming because oxygen can decompose the aromatics in liquid fuel and steam can suppress the carbon deposition during catalytic reaction. The advantage of ATR is that it has a simple system construction due to exothermicity of ATR reaction. We control the exothermicity of reaction, make the reaction possible design a self-sustaining ATR reactor. A self-sustained 1kW-class kerosene autothermal reformer is introduced in this paper. The 1kW-class kerosene reformer was continuously operated for about 140 hours without degradation of reforming performance.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.1996-2000
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• 2008

In autothermal reforming reaction, oxygen to carbon ratio (OCR) and steam to carbon ratio (SCR) are significant factors, which control temperature and carbon deposition into the reactor. The OCR is more sensitive than the SCR to affect the temperature distribution and reforming efficiency. In conventional operation, hydrocarbon fuel, steam, and oxygen was homogeneously mixed and injected into the reactor in order to get hydrogen-rich gas. The temperature was abruptly raised due to fast oxidation reaction in the former part of the reactor. Deactivation of packed catalysts can be accelerated there. In the present study, therefore, the effect of the oxygen distribution is introduced and investigated to suppress the carbon deposition and to maintain the reactor in the mild operating temperature (e.g., $700{\sim}800^{\circ}C$). In order to investigate the effect numerically, the following models are adopted; heterogeneous reaction model and two-medium model for heat balance.