• Korean Chemical Engineering Research
• /
• v.55 no.6
• /
• pp.754-761
• /
• 2017

UV-curable hydrophilic coating solutions were prepared by mixing colloidal silica dispersed in alcohol with an acrylic monomer, pentaerythritol triacrylate (PETA). Hydrophilic coating films were also prepared by spin coating the hydrophilic coating solutions on PC substrates and UV curing for 10 minutes subsequently. The effect of the amount of colloidal silica in the coating solutions, which was varied from 10 g to 50 g, was investigated on the hydrophilic properties of UV-cured coating films. The results showed that the amount of colloidal silica had a great influence on the hydrophilic properties of UV-cured coating films and the coating film prepared with 30 g of colloidal silica showed a lowest contact angle of $37^{\circ}$ and an excellent pencil hardness of H.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.14 no.4
• /
• pp.281-288
• /
• 2001

PZT thin films (3500$\AA$) have been prepard on the Ru/Ru $O_2$ and Ru $O_2$ bottom electrodes with a RF magnetron sputtering system using P $b_{1.05}$(Z $r_{0.52}$, $Ti_{0.48}$) $O_3$ ceramic target. Ru/Ru $O_2$ bottom electrode was fabricated by in-situ processing controlled the $O_2$ partial pressure. The PZT thin films deposited on the Ru/Ru $O_2$ bottom electrode were preferred oriented (101) plane. The PZT thin films deposited on the Ru/Ru $O_2$ bottom electrodes showed better electrical properties than those with Ru $O_2$ bottom electrodes because Ru $O_2$ prevented oxygen vacancies and impurities from existing withing the interface and substrate.e.

• Journal of the Korean Ceramic Society
• /
• v.56 no.3
• /
• pp.317-324
• /
• 2019

Cr-diamond-like carbon (Cr-DLC) films were deposited using a hybrid method involving both physical vapor deposition and plasma-enhanced chemical vapor deposition. DLC sputtering was carried out using argon and acetylene gases. With an increase in the DC power, the Cr content increased from 14.7 to 29.7 at%. The Cr-C bond appeared when the Cr content was 17.6 at% or more. At a Cr content of 17.6 at%, the films showed an electrical conductivity of > 363 S/cm. The current density was 9.12 × 10^-2 ㎂/㎠, and the corrosion potential was 0.240 V. Therefore, a Cr content of 17.6 at% was found to be optimum for the deposition of the Cr-DLC thin films. The Cr-DLC thin films developed in this study showed high conductivity and corrosion resistance, and hence, are suitable for applications in separators.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11a
• /
• pp.394-397
• /
• 2001

In this paper, in-situ deposited Ru/RuO$_2$ bottom electrodes have been investigated as new bottom electrodes for PZT thin film capacitor application. As a comparison, structural and electrical properties of PZT thin films on Pt/Ti and RuO$_2$ bottom electrodes are also investigated. The use of Ru/RuO$_2$ hybrid electrodes showed better electrical properties in compression with RuO$_2$ bottom electrode. With increasing Ru electrode thickness, the PZT thin films showed preferred orientation along the (110) direction and leakage current of PZT thin films were improved. The PZT thin films on Ru (100nm)/RuO$_2$ electrodes exhibited excellent ferroelectric properties such as remant polarization and coercive field of 7.2 C/$\textrm{cm}^2$ and 46.35 kV/cm, respectively.

• Journal of the Korean institute of surface engineering
• /
• v.45 no.3
• /
• pp.117-122
• /
• 2012

ZTO/GZO double layered films were prepared on unheated non-alkali glass substrates. ZTO films were deposited by RF/DC hybrid magnetron co-sputtering using ZnO (RF) target and $SnO_2$ (DC) targets, and then GZO films were deposited by DC magnetron sputtering using an GZO ($Ga_2O_3$:5.57 wt%) target. These films were post-annealed at temperature of 200, $300^{\circ}C$ in air and vacuum ambient for 30 min. In the case of post-annealing in air, ZTO/GZO double layer showed relatively low resistivity change, compared to GZO single layer. Furthermore, ZTO/GZO double layer revealed low WVTR, compared to GZO single layer. Therefore, it can be confirmed that ZTO film doing a role with barrier for water or oxygen diffusion.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2007.02a
• /
• pp.124-124
• /
• 2007

• Proceedings of the Korean Ceranic Society Conference
• /
• 2003.04a
• /
• pp.65.1-65
• /
• 2003

• 한국초전도학회:학술대회논문집
• /
• 2007.07a
• /
• pp.34-34
• /
• 2007

• Proceedings of the Korean Vacuum Society Conference
• /
• 1995.06a
• /
• pp.75-75
• /
• 1995

• Proceedings of the Korean Vacuum Society Conference
• /
• 2006.02a
• /
• pp.188-188
• /
• 2006