• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.1
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• pp.93-99
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• 1996

The formation properties and oxidation mechanism of electrochemically oxidized porous silicon(OPS) films have been studied. To examine the humidity-sensitive properties of OPS films, surface-type and bulk-type humidity sensors were fabricated. The oxidized thickness of porous silicon layer(PSL) increases with the charge supplied during electrochemical humidity sensor shows high sensitivity at high relative humidity in low temperature. The sensitivity and linearity can be improved by optimizing a porosity of PSL. (author). refs., figs.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.83-89
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• 2012

A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: $2.7{\times}2.7mm^2$ ; mid-size: $1.5{\times}1.5mm^2$ ; small-size: $0.7{\times}0.7mm^2$) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full range of relative humidity (RH) with excellent linearity(correlation coefficient > 0.994). This array structure exhibits unique advantages including easy fabrication process, high batch productivity, and high structural compatibility with various substrate materials. It is anticipated that this device structure will be potentially useful in unique applications including mapping spatial humidity variations over a meso-scale area and implementing flexible humidity sensing element arrays.

• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.343-348
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• 2009

$NiO{\cdot}(Co_{0.25}Mn_{0.75})_2O_3$(Mn-Ni-Co) and $Ba_{0.5}Sr_{0.5}TiO_3$(BST) thick films were screen printed on Pt patterned alumina substrate to investigate the effects of sintering temperature on humidity and temperature sensing properties of ceramic sensors. A raise in sintering temperature increased resistance and B constant of the Mn-Ni-Co temperature sensor. This may have derived from the synergic effects of the reduction in charge carriers caused by the substitution of Co for Mn as well as the formation of microcracks from the difference in thermal expansion coefficients. Dependence of resistance on humidity of the Mn-Ni-Co temperature sensor, however, was not found. BST films sintered at temperatures in the range of $1100^{\circ}C$ to $1150^{\circ}C$ showed excellent humidity sensing properties. The BST humidity sensor was faster in its response than the Mn-Ni-Co temperature sensor. The humidity sensor, however, proved to be unstable under various temperatures, suggesting a need for a temperature stabilizing device. In contrast, the Mn-Ni-Co temperature sensor was stable under humid conditions.

• Polymer(Korea)
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• v.36 no.2
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• pp.169-176
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• 2012

Based on our experience in developing resistive humidity sensor, interdigital gold electrodes with different fingers and gaps have been fabricated on a glass epoxy (GE) substrate using screen printing techniques. The basic structure of the electrode consisted of a 3-, 4- and 5-fingers with gaps of 310 and 460 ${\mu}m$. Gold electrode/GE was prepared by first printing silver nanopaste, followed by consecutive electroless plating of Cu, Ni and then Au. Copolymer of [2-(methacryloyloxy)ethyl] dimethyl benzyl ammonium chloride (MDBAC) and methyl methacrylate (MMA) was used as a humidity-sensing polyelectrolyte, which was fabricated by a screen printing method on the Au electrode/GE substrate. The flexible humidity sensor showed acceptable linearity between logarithmic impedance and relative humidity in the range of 20-95%RH, low hysteresis of 1.5%RH, good response and recovery time of 75 sec at 1 V, 1 kHz, and $25^{\circ}C$. Electrode construction had a significant influence on the humidity-sensing characteristics of polymeric humidity sensors. The activation energy between electrode and ion conducting polyelectrolyte plays an important role in explaining the differences of humidity sensing characteristics such as temperature dependence, sensitivity, linearity and hysteresis.

• Proceedings of the KIEE Conference
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• 1998.07d
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• pp.1561-1563
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• 1998

A capacitive humidity sensor is used as a test device to characterize the performance of iodine doped polyphenylacetylene(PPA) thin films in relative humidity sensing application In comparison with undoped PPA thin films. the iodine doped PPA films showed higher sensitivity(0.19pF/%RH), better linearity(4.2%FS), much lower hysteresis and lower temperature coefficients(0.043 $\sim$ 0.067pF/$^{\circ}C$) over a wide range of relative humidity.

• Journal of Industrial Technology
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• v.33 no.A
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• pp.67-72
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• 2013

CNT(carbon nanotube) humidity sensors with plasma treated electrodes exhibit a much faster response time and a higher sensitivity to humidity, compared to untreated CNT and porous Cr electrodes. These results may be partially due to their percolated pore structure being more accessible for water molecules and for expending the diffusion of moisture to the polyimide sensing film, and partially due to the oxygenated surface of CNT films. This paper shows a plasma process effect and selectivity characteristics of CNT film humidity sensor.

• Smart Structures and Systems
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• v.22 no.1
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• pp.1-11
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• 2018

This study presents early crack detection of steel fiber-reinforced concrete (SFRC) under varying temperature and humidity conditions using an instantaneous electrical impedance acquisition system. SFRC has the self-sensing capability of electrical impedance without sensor installation thanks to the conductivity of embedded steel fibers, making it possible to effectively monitor cracks initiated in SFRC. However, the electrical impedance is often sensitively changed by environmental effects such as temperature and humidity variations. Thus, the extraction of only crack-induced feature from the measured impedance responses is a crucial issue for the purpose of structural health monitoring. In this study, the instantaneous electrical impedance acquisition system incorporated with SFRC is developed. Then, temperature, humidity and crack initiation effects on the impedance responses are experimentally investigated. Based on the impedance signal pattern observation, it is turned out that the temperature effect is more predominant than the crack initiation and humidity effects. Various crack steps are generated through bending tests, and the corresponding impedance damage indices are extracted by compensating the dominant temperature effect. The test results reveal that propagated cracks as well as early cracks are successfully detected under temperature and humidity variations.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.6
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• pp.539-546
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• 2006

The Air Quality Sensor(AQS), located near the fresh air inlet, serves to reduce the amount of pollution entering the vehicle cabin through the HVAC(heating, ventilating, and air conditioning) system by sending a signal to close the fresh air inlet door/ventilation flap when the vehicle enters a high pollution area. The sensor module which includes two independent sensing elements for responding to diesel and gasoline exhaust gases, and temperature sensor and humidity sensor was designed for intelligent AQS in automobile. With this sensor module, AVR microcontroller was designed with back propagation neural network to a powerful gas/vapor pattern recognition when the motor vehicles pass a pollution area. Momentum back propagation algorithm was used in this study instead of normal backpropagation to reduce the teaming time of neural network. The signal from neural network was modified to control the inlet of automobile and display the result or alarm the situation in this study. One chip microcontroller, ATmega 128L(ATmega Ltd., USA) was used for the control and display. And our developed system can intelligently reduce the malfunction of AQS from the dampness of air or dense fog with the backpropagation neural network and the input sensor module with four sensing elements such as reducing gas sensing element, oxidizing gas sensing element, temperature sensing element and humidity sensing element.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1531-1533
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• 1997

We prepared polyimide film by electrophoretic deposition onto glass film as a sensing materials of humidity, and treated with plasma discharging as a function of discharging power to improve performance of the sensor. Then evaluated the characteristics of polyimide on humidity.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1472-1474
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• 1994

In this paper, $TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and their humidity-sensing characteristics have been investigated. The microstructure of specimen is porous. The humidity-sensing characteristics of thin films are good according to increasing heat treatment temperature and decreasing measurement frequency.