Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Development of Thin Film Type Humidity Sensor Materials by Sol-Gel Method(II)

졸겔법에 의한 박막형 습도센서 소제개발에 관한 연구(II)

  • You, D.H. (Dept. af Electrical Eng., Inha Univ.) ;
  • Kang, D.H. (Dept. of Electrical Eng., Pusan Nat'l Univ. of Tech.) ;
  • Na, D.K. (Dept. af Electrical Eng., Mokpo Jr. Col) ;
  • Hwang, M.W. (Dept. of Industrial Safety Eng., Inha Univ.) ;
  • Yuk, J.H. (Dept. of Electrical Eng., Yuhan Jr. Col) ;
  • Lee, D.C. (Dept. af Electrical Eng., Inha Univ.)
  • Published : 1994.07.21
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Abstract

In this paper, $TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and their humidity-sensing characteristics have been investigated. The microstructure of specimen is porous. The humidity-sensing characteristics of thin films are good according to increasing heat treatment temperature and decreasing measurement frequency.

Keywords