• 전기학회논문지
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• 제63권9호
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• pp.1227-1232
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• 2014

The purpose of this paper is to establish the optimum fabricating condition of specimens using silk screen printing, and to develop humidity sensor which has good humidity sensing properties. The specimens are fabricated under the condition of 90[wt%] $SnO_2$-10[wt%] $TiO_2$, and their microstructure, crystalline structure, humidity sensing properties are examined. From the microstructure analyses, porosity is best at 700[$^{\circ}C$]. From the crystalline structure analyses, intensity of peak becomes strong according to increasing heat treatment temperature. From the humidity sensing properties analyses, an overall results of capacitance changes, linearity and hysteresis for the specimens is best at 600[$^{\circ}C$] and 700[$^{\circ}C$]. Capacitance of specimens increases according to decreasing measurement frequency, and to increasing relative humidity.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.82-86
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• 2000

Humidity sensors using $TiO_2$ thin films were fabricated on the multi-electrode device by Sol-Gel method and their wettability, surface potential decays and humidity sensing characteristics were investigated. Contact angle of thin films was $28^{\cic}\;at\; 400^{\circ}C$ and surface potential decayed rapidly at $400^{\circ}C$. The specimen showed best humidity sensing characteristics at $400^{\circ}C$. From the results, they were confirmed that humidity sensing characteristics of thin films have connection with contact angle and surface potential decays.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 추계학술대회 논문집
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• pp.113-117
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• 1994

In this paper, an experiment about humidity sensing properties of oxide aluminum films by Anodic oxidation method was made. The humidity sensing properties of films were investigated in the relative humidity range of 10∼85(%RH) , changing the frequency from 1[kHz] to 100[kHz]. The impedance of humidity sensing films were decreased in accordance with the increase of relative humidity. The decreasing rate of impedance were larger at low measuring frequency. The decreasing difference changes from 17.7M$\Omega$ to 3.68M$\Omega$ at low measuring frequency.

• Nuclear Engineering and Technology
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• 제52권8호
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• pp.1689-1696
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• 2020

In this study, we developed a fiber-optic humidity sensor (FOHS) system for the monitoring and detection of coolant leakage in nuclear power plants. The FOHS system includes an FOHS, a spectrometer, a halogen white-light source, and a Y-coupler. The FOHS is composed of a humidity-sensing material, a metal tube, a multi-mode plastic optical fiber, and a subminiature version A (SMA) fiber-optic connector. The humidity-sensing material is synthesized from a mixture of polyvinylidene fluoride (PVDF) in dimethyl sulfoxide (DMSO) and hydroxyethyl cellulose (HEC) in distilled water. We measured the optical intensity of the light signals reflected from the FOHS placed inside the humidity chamber with relative humidity (RH) variation from 40 to 95%. We found that the optical intensity of the sensing probe increased linearly with the RH. The reversibility and reproducibility of the FOHS were also evaluated.

• 전자공학회논문지A
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• 제31A권4호
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• pp.70-76
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• 1994

A humidity sensing device based on a new humidity sensing principle is designed and fabricated in this study. The silicon thermopile is consisted of 25 couples of p-type diffused layer/Al strips. The internal resistance and the Seebeck coefficient are 300kl and 537$\mu$V/K, respectively Fabricated sensors showed linear response characteristics proportional to relative humidity changes with a sensitivity of 9$\mu$V/%RH in the range from 20% to 90%.

• 한국전기전자재료학회논문지
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• 제34권5호
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• pp.314-320
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• 2021

Controlling ambient humid condition through high performance humidity sensors has become important for various fields, including industrial process, food storage, and the preservation of historic remains. Although aerosol deposited humidity sensors using ceramic BaTiO₃ (BT) material have been widely studied because of their longtime stability, there remain critical disadvantages, such as low sensitivity, low linearity, and slow response/recovery time in case of the sensors fabricated at room temperature. To achieve superior humidity sensing properties even at room temperature condition, BT-Cu composite films utilizing aerosol deposition (AD) process have been proposed based on the percolation theory. The BT-Cu composite films showed gradually improved sensing properties until the Cu concentration reached 15 wt% in the composite film. However, the excessive Cu (above 30 wt%) containing BT-Cu composite films showed a rapid decrease of the sensing properties. The results of observed surface morphology of the AD fabricated composite films, to figure out the metal filler effect, showed correlation between surface topography as well as size and the amount of open pores according to the metal filler content. Overall, it is very important not only dielectric constant of the humidity sensing films but also microstructures, because they affect either the variation range of capacitance by ambient humidity or adsorption/desorption of ambient humidity onto/from the humidity sensing films.

• 한국전기전자재료학회논문지
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• 제13권4호
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• pp.294-299
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• 2000

For practical application as a humidity sensor SnO$_2$thick films devices were fabricated on the refresh type electrode by screen printing method and their material and humidity sensing properties were investigated. As a function of Sb$_{2}$/O$_{3}$ addition rate grain size was increased while porosity and initial resistance were rapidly decreased. And the area of resistance variation according to relative humidity was decreased with increasing heat treatment temperature. SnO$_2$thick film device heat treated at 95$0^{\circ}C$ and contained 0.05mole% Sb$_{2}$/O$_{3}$ had a best humidity sensing properties. From this result it is conformed that humidity sensing properties of SnO$_2$thick film devices could be approved by very small amount of Sb$_{2}$/O$_{3}$ addition.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1993년도 춘계학술대회 논문집
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• pp.142-145
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• 1993

$TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and humidity sensing properties have been investigated. As the results of humidity sensing properties of thin films fabricated as humidity sensor, it is confirmed to have good humidity sensing properties in high humidity and low frequency regions.

• 센서학회지
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• 제12권1호
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• pp.24-33
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• 2003

This research is about a comfort sensing system for human environmental monitoring using a one-bodied humidity and temperature sensor and an air flow sensor. The thermal comfort that a human being feels in indoor environment has been known to be influenced mostly by six parameters, i.e. air temperature, radiation, air flow, humidity, activity level and clothing thermal resistance. Considering an environmental monitoring, we have designed and fabricated a one-bodied humidity and temperature sensor and an air flow sensor that detect air relative humidity, temperature and air flow in human environment using surface micromachining technologies. Micro-controller calculates a PMV (predicted mean vote) and CSV (comfort sensing vote) with sensing signals and display a PMV on LCD (liquid crystal display) for human comfort on indoor climate. Our work has demonstrated that a comfort sensing system can provide an effective means of measuring and monitoring the indoor comfort sensing index of a human being. Experimental results with simulated environment clearly suggest that our comfort sensing system can be used in many applications such as air conditioning system, feedback controlling in automobile, home and hospital etc..

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 추계학술발표대회 논문집
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• pp.141-144
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• 2005

Sensing and interfacial evaluation of Ni nanowire strands/polymer composites were investigated using Electro-micromechanical technique. Electro-micromechanical techniques can be used as sensing method for micro damage, loading, temperature of interfacial properties. Using Ni nanowire strands/silicone composites with different content, load sensing response of electrical contact resistivity was investigated under tensile and compression condition. The mechanical properties of Ni nanowire strands with different type/epoxy composites were measured using uniformed cyclic loading and tensile test. Ni nanowire strands/epoxy composites showed humidity and temperature sensing within limited ranges, 20 vol% reinforcement. Some new information on temperature and humidity sensing plus loading sensing of Ni nanowire strands/polymer composites could be obtained from the electrical resistance measurement as a new concept of the nondestructive interfacial evaluation.