• Title/Summary/Keyword: Hot embossing and Microinjection molding

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Modeling and Replication of Microlens Arrays Fabricated by a Modified LIGA Process (변형 LIGA 공정을 통해 제작된 마이크로 렌즈 어레이의 모델링 및 성형)

  • Kim D. S.;Lee H. S.;Lee B. K.;Yang S. S.;Lee S. S.;Kwon T. H.
    • Transactions of Materials Processing
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    • v.15 no.1 s.82
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    • pp.34-41
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    • 2006
  • Microlens arrays were fabricated by a modified LIGA process composed of the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, both hot embossing and microinjection molding processes have been successfully utilized with the fabricated mold insert. Replicated microlenses showed very good surface roughness with the order of 1 nm. The focal lengths of the injection molded microlenses were successfully estimated theoretically and also measured experimentally.

Modeling and Replication of Microlens Arrays Fabricated by a Modified LIGA Process (변형 LIGA 공정을 통해 제작된 마이크로 렌즈 어레이의 모델링 및 성형)

  • Kim D. S.;Lee H. S.;Lee B. K.;Yang S. S.;Lee S. S.;Kwon T. H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.09a
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    • pp.23-28
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    • 2005
  • Microlens arrays were fabricated using a modified LIGA process based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, the hot embossing and the microinjection molding processes have been successfully utilized with the fabricated mold insert. Fabricated microlenses showed good surface roughness than the mold insert. The focal lengths of the injection molded microlenses were successfully measured experimentally and also estimated theoretically.

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Formation of Microlens Array via a Modified LIGA Process: Molding and Modeling (변형 LIGA 공정을 이용한 마이크로 렌즈 어레이 개발: 몰딩 및 모델링)

  • Kim, D. S.;Lee, H. S.;S. S. Yang;Lee, B.K.;Lee, S.K.;T. H. Kwon;Lee, S. S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.05a
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    • pp.465-469
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    • 2003
  • Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for microlens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of microlens which depend on the thermal treatment. For the replication of microlens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of microlenses. Fabricated microlenses showed good surface roughness with the order of 1 nm.

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Fabrication and Modeling of Microlens Array by a Modified LIGA Process

  • Kim Dong Sung;Lee Hyun Sup;Yang Sang Sik;Lee Bong-Kee;Lee Sung-Keun;Kwon Tai Hun;Lee Seung S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.04a
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    • pp.7-13
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    • 2003
  • Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for micro lens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of micro lens which depend on the thermal treatment. For the replication of micro lens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of micro lenses. Fabricated microlenses showed good surface roughness with the order of 1nm.

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