• Corrosion Science and Technology
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• 제7권6호
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• pp.328-331
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• 2008

Corrosion behaviour of water intake gate steel structures with different protective measures was investigated. Five material alternatives were taken for investigation, including: imported and recycled stainless steel, carbon steel with hot zinc spraying, painting and composite coatings. Results of corrosion rate for carbon steel, SUS 304, hot zinc spray coats in three water systems of Mekong river basin (saline, blackish and fresh) were also presented. Corrosion rate of carbon steel decreased with decreasing salinity in the investigated water environments. Meanwhile, these values for zinc coated steel, behaved by another way. Environmental data for these systems were filed and discussed in relation with corrosion characteristics. Method of Life Cycle Assessment (LCA) was applied in materials selection for water intake gate construction. From point of Life Cycle Cost (LCA) the following ranking was obtained: Zinc sprayed steel < Recycled stainless steel < Composite coated steel < Painting steel < SUS 304 From investigated results, hot zinc spray coating has been applied as protective measure for steel structures of water intake systems in Mekong river basin.

• 한국기계가공학회지
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• 제18권1호
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• pp.94-100
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• 2019

This study was conducted on a high-temperature/high-pressure washer in which low-pressure cold water in a boiler is heated to a temperature range of $70{\sim}80^{\circ}C$ by supplying diesel combustion heat. The high-temperature water is sent to a compressor to increase its pressure to 200 bar, thereby making high-temperature/high-pressure water, which is sprayed through a spray nozzle. In the results of this study, the spray temperature of the high-pressure washing was shown to be the highest when the ratio between the actual amount of combustible air and the theoretical amount of air was 1:1 and the energy consumption rate of the low-pressure boiler type high-pressure washer was shown to be much lower than that of the high-pressure boiler type high-pressure washer.

• 한국유체기계학회 논문집
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• 제18권1호
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• pp.29-36
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• 2015

Recently, Stirling engines are emerging as a key device for power conversion of renewable energy or waste energy. This study develops a LTDSE(Low Temperature Differential Stirling Engine) using a water spray for higher heat transfer and performs load performance tests for various flow rates and temperatures of hot water spray for variable engine loads emulated by a mechanical friction device. Internal temperature and pressure, working frequency and inlet and outlet temperature of the supply water are measured. As a result, the increases in flow rate and temperature of hot water respectively enhance the power output, efficiency and the working frequency, while the increasing engine load leads to decreases in working frequency but increases in the pressure amplitude. Eventually, it is revealed there exists a maximum shaft power of the test engine.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 대한기계학회논문집B
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• 제29권2호
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• pp.279-286
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• 2005

This study presents experimental results on the heat transfer coefficients in the film boiling region of spray cooling for actual metallurgical process. In this study, the heat flux distributions of a two dimensional dilute spray impinging on a hot plate were experimentally investigated. A stainless steel block was cooled down from intial temperature of about $800^{\circ}C$ by twin fluid (air-water) flat spray. It was found from the experimental results that the heat transfer area was classified into the stagnation region and wall-flow region. In the stagnation region, the experimental data of local heat transfer coefficient was closely correlated with the local droplet-flow-rate supplied from the spray nozzle directly. Thus, the local heat transfer coefficients are in good agreement with the predicted values from the correlations proposed by our previous study. In wall-flow region, however, remarkable differences are observed between experimental data and predicted values because the number of rebound droplets increase with increasing the distance from the stagnation point.

• 한국화재소방학회논문지
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• 제34권4호
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• pp.7-12
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• 2020

본 연구에서는 미세물분무의 특성이 열복사 감쇠에 미치는 영향을 살펴보기 위한 수치해석 연구를 수행하였다. 고온의 복사 패널로부터 전파되는 열복사가 미세물분무를 통과하여 약화되는 과정을 FDS를 이용하여 해석하였고, 미세물분무의 분사유량, 액적평균입경과 분무각에 따른 영향을 분석하였다. 해석 결과로부터 분사유량의 증가와 액적크기의 감소가 열복사 감쇠 효과를 증가시키는 것을 알 수 있었다. 복사열이 통과하는 분무 공간 분포의 영향을 살펴보기 위해 분사각을 변화시켜 열복사 특성을 분석하였으며 분사각이 클수록 복사 감쇠 효과가 커지는 것을 확인하였다. 이것은 유사한 액적크기분포와 유량조건에서도 액적들이 공간적으로 더 넓게 퍼져 있는 경우 복사의 감쇠 효과가 더 커질 수 있음을 보여준다.

• 한국분무공학회지
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• 제4권1호
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• pp.27-33
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• 1999

An experimental study has been conducted to clarify the effect of vapor on droplet evaporation. Droplets of water, ethanol, n-hexadecane and n-heptane were exposed in air stream. Temperature, pressure, and flow velocity in the ambient air are 470K, 1 atm, and 2m/s, respectively. Measurements are carried out for the wide range of water vapor concentration$(0%\sim40%)$. To obtain the time histories of droplet diameter, suspended droplet in hot and humid air stream was synchronized with a back flash light, and enlarged droplet images were taken on a CCD camera. With the vapor concentration increasing, the evaporation rate constant of water droplet decrease slightly and the droplet of ethanol and n-heptane increase actively. The evaporation rate constant of n-hexadecane which has higher boiling point than water increases within around 30% of the concentration.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2 \; (PN_2)$ gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and $PN_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권5호
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• pp.191-195
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• 2002

Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 한국추진공학회지
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• 제19권1호
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• pp.61-67
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• 2015

연소기 시험 장치의 구축 시 고온의 연소 가스의 냉각은 중요한 설계요구조건이다. 물 분무(Water spray) 냉각 방식은 증발 과정에서 물의 잠열을 이용하므로, 효과적인 연소 가스 냉각이 가능하다. 본 연구에서는 연소기 시험 설비 구축 과정의 일환으로, 물 분무를 이용한 연소 가스의 냉각을 이해하기 위하여 연속방정식, 에너지 보존식과 포화 증기의 압력-온도 관계식을 이용한 1차원 해석을 수행하였다. 연소기 시험 장치에서 배출되는 고온, 고압의 연소 가스는 냉각수와의 혼합과정에서 배출가스의 온도가 낮아지며, 분무된 물의 일부는 기화하여 연소가스와 함께 배출되고, 일부는 다시 응축 되어 집수조로 모인다. 냉각수는 연소 가스의 온도를 낮춰주는 동시에, 증발된 증기는 연소기 내부의 압력을 증가시키므로 1차원 해석에서 증기의 압력-온도 관계식을 고려하여 해석을 수행하였다. 1차원 해석으로부터 연소가스의 적절한 냉각과 배기 덕트 내부의 압력의 지나친 상승을 피하기 위한 최적의 물 분무량을 확인하였으며, 물 분무 냉각 방식에 대한 물리적 이해를 얻을 수 있었다.