• Title/Summary/Keyword: Hollow cathode discharge

Search Result 71, Processing Time 0.026 seconds

The generation of nitrogen ion species in high-density plasma with HCD (고밀도 플라즈마 내에서의 plasma species의 변화)

  • Kim, Sang-Gwon;Kim, Seong-Wan;Takai, O.
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2009.05a
    • /
    • pp.234-234
    • /
    • 2009
  • 고밀도 플라즈마 질화를 위해 장비 내에 보조 HCD (Hollow Cathode Discharge) 전극을 설치하여 고밀도의 플라즈마가 발휘되도록 장비를 구축하였다. 기존 bias 플라즈마 질화는 1-10Torr의 공정압력인데 반하여 $10^{-1}-10^{-2}$Torr의 비교적 고 진동에서 고밀도의 플라즈마를 발생시켰다. HCD 질화는 bias plasma 질화 공정의 플라즈마를 비교하면 가스 비의 영향이 매우 큰 것드로 관찰되었으며 기존에 발표된 플라즈마 질화 관련 모델과 비교하여 관찰된 플라즈마 내에서는 ion species가 실제 공정에서도 영향을 미치는 것을 알 수 있었다.

  • PDF

Observation of Penning ionization using the optogalvanic effect

  • Jeong, Kee-Ju;Lee, Jun-Hoi
    • Journal of Korean Vacuum Science & Technology
    • /
    • v.7 no.1
    • /
    • pp.18-22
    • /
    • 2003
  • The optogalvanic effect is proposed and demonstrated as a technique for Penning ionization in a discharge of mixtures of metal vapors and rare gases. The gadolinium and argon mixture is used as a prototype. The lowest metastable of argon, 3P$_2$ (ls$\_$5/ in Paschen notation) at 93144 cm$\^$-1/, is within kT from the excited states of Gd ion. Thus Penning ionization occurs to an excited states of the ion. This process strongly alters the optogalvanic signal and has its own signatures.

  • PDF

Capacitively Coupled Radio Frequency Discharge System for Excitation of Gas Laser (기체레이저의 여기를 위한 용량결합고주파(ccrf) 방전시스템)

  • Choi, Sang-Tae
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.20 no.1
    • /
    • pp.19-26
    • /
    • 2006
  • The ccrf-discharge has in comparison with the hollow-cathode discharge and DC-discharge some advantages: Simple design of the tube and homogeneous plasma. The ccrf-discharge was researched with the goal, to use on the excitation of the gas laser. In this work a rf-exciting system was planned and developed. With it a homogeneous discharge was produced in the cw operation. To supply the rf-power with the frequency 13.56[MHz] effectively in the discharge, laser tube were used with inner diameter of 5[mm] and the specially developed rf-electrodes. A matching circuit was composed also. Thereby the impedance of the discharge tube was adjusted to the 50[$\Omega$] output resistance of the rf-source.

Multi-hole RF CCP 방전에서 방전 주파수가 미치는 영향

  • Lee, Heon-Su;Lee, Yun-Seong;Seo, Sang-Hun;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.08a
    • /
    • pp.145-145
    • /
    • 2011
  • Recently, multi-hole electrode RF capacitively coupled plasma discharge is being used in the deposition of microcrystalline silicon for thin film solar cell to increase the speed of deposition. To make efficient multi-hole electrode RF capacitively coupled plasma discharge, the hole diameter is to be designed concerning the plasma parameters. In past studies, the relationship between plasma parameters such as pressures and gas species, and hole diameter for efficient plasma density enhancement is experimentally shown. In the presentation, the relationship between plasma deriving frequency and hole diameter for efficient multi-hole electrode RF capacitively coupled plasma discharge is shown. In usual capacitively coupled plasma discharge, plasma parameter, such as plasma density, plasma impedence and plasma temperature, change as frequency increases. Because of the change, the optimum hole diameter of the multi-hole electrode RF capacitively coupled plasma for high density plasma is thought to be modified when the plasma deriving frequency changes. To see the frequency effect on the multi-hole RF capacitively coupled plasma is discharged and one of its electrode is changed from a plane electrode to a variety of multi-hole electrodes with different hole diameters. The discharge is derived by RF power source with various frequency and the plasma parameter is measured with RF compensated single Langmuir probe. The shrinkage of the hole diameter for efficient discharge is observed as the plasma deriving frequency increases.

  • PDF

Formation of Ti-0 Biomedical Film on Ti6A14V Alloy by DC Glow Plasma Oxidizing

  • Zheng, C.L.;Cui, F.Z.;Xu, Z.
    • Journal of Korean Vacuum Science & Technology
    • /
    • v.6 no.1
    • /
    • pp.16-21
    • /
    • 2002
  • Ti-0 film is a kind of biocompatible surface materials. In this paper, a new method, glow discharge plasma oxidizing, has been used in synthesizing Ti-O gradient films on Ti6A14V substrates. The effects of ion bombardment and process parameters on the structures of titanium oxide layers have been investigated. The results demonstrate that DC glow plasma oxidizing is more efficient in preparation of dense, hard, and high adhesive Ti-O biomedical films on titanium and its alloys. Samples treated by this method show higher hardness values than by others. Especially, in the condition of hollow cathode discharge, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of titanium.

  • PDF

Study on High Degree of Efficiency Chemical Reactor for Air Purification Using the Glow Discharge (글로우 방전을 이용한 고효율 공기 정화용 화학 반응기의 특성관찰에 관한 연구)

  • Kim, Gi-Ho;Bu, Min-Ho;Lee, Sang-Cheon
    • Journal of the Korean Chemical Society
    • /
    • v.50 no.1
    • /
    • pp.14-22
    • /
    • 2006
  • the basic model of chemical reactor using glow discharge, we used cathode discharge cell with vacant cavity in the middle. Currently glow discharge is widely studied as a radiation source or atomization device in atomic spectroscopy and remarkable technological achievements are made through the graft with other analysis devices such as microanalysis and steel analysis.1 Additionally, as the characteristics of basic glow discharge and radiation have been reviewed many times, those results could be used in this experiment.2-3 In 1993, an article regarding the treatment of poisonous gas in the air using low temperature plasma was published. According to this article, if DC Glow Discharge is used under continuous atmospheric flow, poisonous gases such as SO2 and NO can be removed.4 Based on those findings, we designed highly efficient reactor where stable air plasma is composed and all air flow pass the negative glow area passing through the tube. It was observed that the cathode tube type glow discharge developed in this study would be economical, easy to use and could be used as radiation source as well.

Emission Plasma Spectroscopy of High-pressure Microdischarges

  • Lee, Byeong-Jun;Ju, Yeong-Do;Kim, Seung-Hwan;Ha, Tae-Gyun;Gong, Hyeong-Seop;Park, Yong-Jeong;Park, Jong-Do;Nam, Sang-Hun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2014.02a
    • /
    • pp.253.2-253.2
    • /
    • 2014
  • Micro hollow cathode discharges (MHCDs) are high-pressure, non-equilibrium discharges. Those MHCDs are useful to produce an excimer radiation. A major advantage of excimer sources is their high internal efficiency which may reach values up to 40% when operated under optimum conditions. To produce strong excimer radiation, the optimisation of the discharge conditions however needs a detailed knowledge of the properties of the discharge plasma itself. The electron density and temperature influence the excitation as well as plasma chemistry reactions and the gas temperature plays a major role as a significant energy loss process limiting efficiency of excimer radiation. Most of the recent spectroscopic investigations are focusing on the ultraviolet or vacuum ultraviolet range for direct detection of the excimer. In our experiments we have concentrated on investigating the micro hollow cathodes from the near UV to the near infrared (300~850 nm) to measure the basic plasma parameters using standard plasma diagnostic techniques such as stark broadening for electron density and the relative line intensity method for electron temperature. Finally, the neutral gas temperature was measured by means of the vibrational rotational structures of the second positive system of nitrogen.

  • PDF

Synthesis and Electrochemical Performance of Mesoporous Hollow Sphere Shape LiMn2O4 using Silica Template (실리카 템플레이트를 이용하여 다공성 중공형태를 갖는 LiMn2O4 합성 및 전기화학적 특성 연구)

  • Ryu, Seong-Hyeon;Ryu, Kwang-Sun
    • Journal of the Korean Electrochemical Society
    • /
    • v.14 no.3
    • /
    • pp.184-190
    • /
    • 2011
  • $LiMn_2O_4$ with mesoporous hollow sphere shape was synthesized by precipitation method with silica template. The synthesized $LiMn_2O_4$ has nanosized first particle and mesoporous hollow sphere shape. Silica template was removed by chemical etching method using NaOH solution. When the concentration of NaOH solution was increased, first particle size of manganese oxide was decrease and confirmed mesoporous hollow shpere shape. X-ray diffraction(XRD) patterns revealed that the synthesized samples has spinel structure with Fd3m space group. In case the ratio of silica and maganese salt increased, the size of first particles was decreased. The tetragoanal $LiMn_2O_4$ with micron size was synthesized at ratio of silica and manganese salt over 1 : 9. The prepared samples were assembled as cathode materials of Li-ion battery with 2032 type coin cell and their electrochemical properties are examined by charge-discharge and cyclic performance. Electrochemical measurements show that the nano-size particles had lower capacity than micron-size particles. But, cyclic performance of nano-size particles had better than that of micron-size particles.

Electrochemical Performance as the Positive Electrode of Polyaniline and Polypyrrole Hollow Sphere with Different Shell Thickness (껍질 두께가 다른 폴리아닐린과 폴리피롤 속 빈 구형체 양전극의 전기화학적 성능)

  • Yun, Su-Ryeon;Hwang, Seung-Gi;Cho, Sung-Woo;Kang, Yongku;Ryu, Kawng-Sun
    • Applied Chemistry for Engineering
    • /
    • v.23 no.2
    • /
    • pp.131-137
    • /
    • 2012
  • Polyaniline (PANI) and polypyrrole (Ppy) hollow sphere structures with controlled shell thicknesses can be easily synthesized than those of using a layer-by-layer method for cathode active material of lithium-ion batteries. Polystyrene (PS) core was synthesized by emulsion polymerization using an anion surfactant. The shell thicknesses of PANI and Ppy were controlled by amounts of aniline and pyrrole monomers. PS was removed by an organic solution. This structure increased in contact with an electrolyte and a specific capacity in lithium-ion batteries. But polymers have disadvantages such as the difficult control of molecular weights and low densities. These disadvantages were completed by controlled shell thicknesses. The amount of aniline monomer increased from 1.2, 2.4, 3.6, 4.8 to 6.0 mL, and the shell thicknesses were 30.2, 38.0, 42.2, 48.2, and 52.4 nm, respectively. And the amount of pyrrole monomer was 0.6, 1.2, 2.4 and 3.6 mL, the shell thicknesses were 16.0, 22.0, 27.0 and 34.0 nm, respectively. In the cathode materials with controlled shell thicknesses, shell thicknesses of the PANI hollow spheres were 30.2, 42.2, and 52.4 nm, and discharge specific capacities of after 10 cycle were ~18, ~29, and ~62 mAh/g, respectively. The shell thicknesses of the Ppy hollow spheres were 16.0, 22.0, 27.0 and 34.0 nm, and discharge specific capacities of after 15 cycle were ~15, ~36, ~56, and ~77 mAh/g, respectively. Thus, shell thicknesses of PANI and Ppy increased, the specific capacities increased.