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http://dx.doi.org/10.5207/JIEIE.2006.20.1.019

Capacitively Coupled Radio Frequency Discharge System for Excitation of Gas Laser  

Choi, Sang-Tae (경주대학교 컴퓨터정보시스템공학부)
Publication Information
Journal of the Korean Institute of Illuminating and Electrical Installation Engineers / v.20, no.1, 2006 , pp. 19-26 More about this Journal
Abstract
The ccrf-discharge has in comparison with the hollow-cathode discharge and DC-discharge some advantages: Simple design of the tube and homogeneous plasma. The ccrf-discharge was researched with the goal, to use on the excitation of the gas laser. In this work a rf-exciting system was planned and developed. With it a homogeneous discharge was produced in the cw operation. To supply the rf-power with the frequency 13.56[MHz] effectively in the discharge, laser tube were used with inner diameter of 5[mm] and the specially developed rf-electrodes. A matching circuit was composed also. Thereby the impedance of the discharge tube was adjusted to the 50[$\Omega$] output resistance of the rf-source.
Keywords
ccrf-discharge; gas laser; rf-electrode; matching circuit;
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