• Title/Summary/Keyword: Hollow cathode

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Shape Characteristics of Exhaust Plume of Dual-Stage Plasma Thruster using Direct-Current Micro-Hollow Cathode Discharge (직류 마이크로 할로우 음극 방전을 이용한 이단 마이크로 플라즈마 추력기의 배기 플룸의 형상 특성)

  • Ho, Thi Thanh Trang;Shin, Jichul
    • Journal of the Korean Society of Propulsion Engineers
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    • v.20 no.3
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    • pp.54-62
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    • 2016
  • Micro plasma thruster (${\mu}PT$) was studied experimentally with a dual-stage micro-hollow cathode discharge (MHCD) plasma. Electrostatic-like acceleration exhibiting more directional and elongated exhaust plume was achieved by a dual layer MHCD at the total input power less than 10 W with argon flow rate of 40 sccm. V-I characteristic indicated that there was an optimal regime for dual-stage operation where the acceleration voltage across the second stage remained constant. Estimated exhaust plume length showed a similar trend to the analytic estimate of exhaust velocity which scales with an acceleration voltage. ${\mu}PT$ with multiple holes exhibited similar performance with single-hole thruster indicating that higher power loading is possible owing to decreased power through each hole. Boltzmann plot of atomic argon spectral lines showed average electron excitation temperature of about 2.6 eV (~30,170 K) in the exhaust plume.

Novel Water-Soluble Polyfluorenes as an Interfacial layer leading to Cathodes-Independent High Performance of Organic Solar Cells

  • Oh, Seung-Hwan;Shim, Hee-Sang;Park, Dong-Won;Jeong, Yon-Kil;Lee, Jae-Kwang;Moon, Seung-Hyeon;Kim, Dong-Yu
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.394-394
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    • 2009
  • Water solubility of conjugated polymers may offer many applications. Potential applications of water-soluble conjugated polymers include the polymer light-emitting diode and new materials for nano and micro hollow-capsules, and bio- or chemo-sensors. We synthesized neutral polyfluorenes containing bromo-alkyl groups by the palladium catalyzed Suzuki coupling reaction. Bromo-alkyl side groups in neutral polyfluorenes were quaternized by tri-methyl amine solution. The electrochemical and optical properties of water-soluble conjugated polymers are discussed. This novel synthesized water-soluble conjugated polymers were used as a interfacial dipole layer between active layer and metal cathode in polymer solar cell for enhancement of open-circuit voltage (Voc), which is one of the most critical factors in determining device characteristics. We also investigated the device performance of polymer solar cell with different metal cathode such as Al, Ag, Au and Cu. In polymer solar cell, novel cationic water-soluble conjugated polymers were inserted between active layer and high-work function cathode (Al, Ag, Au and Cu).

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Electrochemical Performance as the Positive Electrode of Polyaniline and Polypyrrole Hollow Sphere with Different Shell Thickness (껍질 두께가 다른 폴리아닐린과 폴리피롤 속 빈 구형체 양전극의 전기화학적 성능)

  • Yun, Su-Ryeon;Hwang, Seung-Gi;Cho, Sung-Woo;Kang, Yongku;Ryu, Kawng-Sun
    • Applied Chemistry for Engineering
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    • v.23 no.2
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    • pp.131-137
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    • 2012
  • Polyaniline (PANI) and polypyrrole (Ppy) hollow sphere structures with controlled shell thicknesses can be easily synthesized than those of using a layer-by-layer method for cathode active material of lithium-ion batteries. Polystyrene (PS) core was synthesized by emulsion polymerization using an anion surfactant. The shell thicknesses of PANI and Ppy were controlled by amounts of aniline and pyrrole monomers. PS was removed by an organic solution. This structure increased in contact with an electrolyte and a specific capacity in lithium-ion batteries. But polymers have disadvantages such as the difficult control of molecular weights and low densities. These disadvantages were completed by controlled shell thicknesses. The amount of aniline monomer increased from 1.2, 2.4, 3.6, 4.8 to 6.0 mL, and the shell thicknesses were 30.2, 38.0, 42.2, 48.2, and 52.4 nm, respectively. And the amount of pyrrole monomer was 0.6, 1.2, 2.4 and 3.6 mL, the shell thicknesses were 16.0, 22.0, 27.0 and 34.0 nm, respectively. In the cathode materials with controlled shell thicknesses, shell thicknesses of the PANI hollow spheres were 30.2, 42.2, and 52.4 nm, and discharge specific capacities of after 10 cycle were ~18, ~29, and ~62 mAh/g, respectively. The shell thicknesses of the Ppy hollow spheres were 16.0, 22.0, 27.0 and 34.0 nm, and discharge specific capacities of after 15 cycle were ~15, ~36, ~56, and ~77 mAh/g, respectively. Thus, shell thicknesses of PANI and Ppy increased, the specific capacities increased.

Study of Multichannel Pseudo-spark Switch for High-voltage and High-current (고전압 대전류 Multichannel Pseudo-spark 스위치 연구)

  • Park, S.S.;Han, Y.J.;Kim, S.H.;Kwon, Y.K.;Kim, S.H.;Park, Y.J.;Nam, S.H.
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1859-1861
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    • 2002
  • This paper attempts to discuss the pseudo-spark which is developed for high voltage and high current. The pseudo-spark switch is on the basic of the Paschen's law. The pseudo-spark switch fabricates the glass chamber. The pseudo-spark switch consists of hollow cathode, hollow anode, and trigger. The pseudo-spark switch is operated at the voltage of 20 kV and the pressure range of $20{\sim}80$ mtorr with He-gas. The switching current of the pseudo-spark switch was measured as 65 kA, and the duration of the pulse was about 100 ${\mu}s$. This paper describes the results of tests and the characteristics of the switch.

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Magnetron Sputtering Technology의 연구 및 개발 방향에 대한 동향

  • Park, Jang-Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.95-95
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    • 2012
  • 스터퍼링 기술이 1852년 Grove에 의해서 최초 발견되어 1979년 Chapin에 의해서 planar magnetron cathode 개발로 진공코팅기술의 새로운 영역을 열게 되어 현재까지 디스플레이, 반도체, 태양전지, 광학산업 및 전자부품 등 나노 산업에 필수적으로 적용되고 있다. 스퍼터링 입자는 운동량 전달에 의한 것으로 운동량을 갖는 나노 스퍼터링 입자는 기판에 대한 박막의 부착력이 우수하고 대면적에 균일하고 재현성 있게 성막되는 특징을 갖고 있다. 마그네트론 스퍼터링 기술이 산업에 응용되면서 주로 4분야에서 많은 연구, 개발이 되어져 왔다. 첫째는 타겟의 고순도 및 고밀도화와 더불어 가격이 고가로 됨에 따라 타겟 사용효율의 향상이다. 플라즈마를 발생시키는 캐소드의 자기회로를 1차원, 2차원 및 회전운동을 통해서 사용효율을 향상시키고 있다. 둘째는 기판에 대해서 박막특성이 균일하도록 코팅하는 것이다. 디스플레이에서는 글래스 기판이 대면적으로 됨에 따라서 핸들링이 어려워져 여러 개의 캐소드 자기회로를 선형적으로 이동시켜 박막두께분포를 최적화하며 반응성 가스를 사용해서 균일한 특성의 박막을 제작하는 경우에는 가스분사관과 배기펌프계의 기하학적 위치 및 가스 유동학적 해석이 필요하다. 셋째는 스퍼터링 입자의 이온화로 의한 박막의 특성향상과 반도체 trench의 높은 aspect ratio hole을 채우는 것이다. 이온화 방법으로는 inductively coupled plasma (ICP), microwave amplified (MA), high power impulse (HIPI), hollow cathode magnetron (HCM), self-sustained sputtering 등이 사용되어져 왔으며 최근에는(neutral beam-assisted sputtering (NBAS)에 의한 박막특성향상 방법이 발표되고 있다. 넷째는 플라즈마 및 박막두께 시뮬레이션에 대해서 많은 발표가 되고 있다. 본 발표에서는 상기의 4 분야를 포함한 향후 개발방향에 대해서 소개할 예정이다.

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CFD-ACE+를 이용한 Gas Flow Sputtering 공정 해석

  • Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.182.2-182.2
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    • 2016
  • Hollow cathode discharge(중공 음극)는 음극 표면에서 발생되는 2차 전자를 이용하여 높은 밀도의 플라즈마를 만들 수 있는 장점이 있다. 전원으로 microwave, RF, DC, pulsed dc등을 사용할 수 있으며 박막의 증착, 식각 등에 응용 가능하다. 물리적 현상으로는 중공 음극 재료 표면 물질의 가열 및 이온 스퍼터링, 2차 전자의 가열, 자기장 인가 구조의 경우 전자 거동이 있다. PIC(particle-in-cell)방식의 모델링과 fluid model을 이용한 방법이 있는데 본 연구에서는 상용 fluid model software인 ESI사의 CFD-ACE+를 사용하여 모델링 하였다. 구동 주파수는 13.56 MHz의 상용 고주파 전원과 보다 낮은 1 MHz, 100 kHz의 수치 모델을 이용하여 HF, MF, LF 영역에서의 동작 특성을 해석하였다. 1차적으로는 가스 유동의 특성을 2D, 3D로 조사하였고 플라즈마 거동은 2차원을 주로 진행하였으며 계산 시간이 오래 거리는 3차원 모델을 하나 만들어 그 특성을 조사하였다.

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Effects of Electron Beam Heating(EBH) on the Properties of ion Plated Ti(C, N) Films (이온도금된 Ti(C, N)피막의 물성에 대한 전자빔가열 효과)

  • 김치명;고경현;안재환;배종수;정형식
    • Journal of the Korean institute of surface engineering
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    • v.28 no.5
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    • pp.267-275
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    • 1995
  • Electron beam can provide convenient way to heat the substrate during Hollow Cathode Discharge (HCD) ion plating of Ti(C, N)films. Densification of columnar structrue is enhanced by longer duration of electron beam heating(EBH). While strong(111) texture is identified always to be formed, the amount of (200) oriented grains which coherently interfaced with carbide particles of the substrate increased with heating(EBH). In turns, these crystallogaphical change lead to the increase of micro hardness and adhesion of coating. Adhesion of Ti(C, N) films increased more dramatically in case of ASP30 substrate of which carbide particles dispersed more finely than M42. Therefore, it could be concluded that both the density of film and interfacial structure can affect the adhesion property. Overheating of substrate could be resulted in low adhesion resistance due to high residual stress developed in the film.

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Numerical Study on the Discharge Characteristics of Cylindrical Discharge Devices (원통형 방전소자의 방전특성 연구)

  • Seo, Jeong-Hyun;Shin, Bhum-Jae
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.62 no.7
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    • pp.980-986
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    • 2013
  • In this paper, the discharge characteristics of ac-type cylindrical discharge devices with diameters (D) in the $50{\sim}400{\mu}m$ range have been investigated numerically. The cylindrical devices have much lower breakdown voltages compared to the coplanar electrode structures. The breakdown voltage of the cylindrical structures increases with the decrease of diameters in $50{\sim}100{\mu}m$ range. In $100{\sim}200{\mu}m$ range, however, the breakdown voltage decreases slightly with the decrease of diameters. Also, as the diameter gets smaller, the electron heating efficiency is greatly improved.

Formation of Ti-0 Biomedical Film on Ti6A14V Alloy by DC Glow Plasma Oxidizing

  • Zheng, C.L.;Cui, F.Z.;Xu, Z.
    • Journal of Korean Vacuum Science & Technology
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    • v.6 no.1
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    • pp.16-21
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    • 2002
  • Ti-0 film is a kind of biocompatible surface materials. In this paper, a new method, glow discharge plasma oxidizing, has been used in synthesizing Ti-O gradient films on Ti6A14V substrates. The effects of ion bombardment and process parameters on the structures of titanium oxide layers have been investigated. The results demonstrate that DC glow plasma oxidizing is more efficient in preparation of dense, hard, and high adhesive Ti-O biomedical films on titanium and its alloys. Samples treated by this method show higher hardness values than by others. Especially, in the condition of hollow cathode discharge, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of titanium.

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ITO deposition by Ion beam sputtering

  • 한영건;조준식;최성창;고석근;김동환
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.97-97
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    • 1999
  • 이온빔 스퍼터링을 이용해 유리 기판위에 Tin-doped Indium Oxide (ITO) 투명 전도성 박막을 성장시켜 이온빔의 전류밀도와 에너지 그리고 기판 온도에 따르는 ITO박막의 구조적, 전기적, 광학적 특성을 분석하였다. 또한, 반응성 가스인 산소의 아르곤에 대한 유량비를 변화시켜 이온 빔 스퍼터링시에 산소 분압이 ITO 박막의 물성에 미치는 영향을 조사하였다. 이온 소스는 직경 5-cm인 cold hollow cathode ion gun을 이용하였으며 base pressure는 2$\times$10-5 Torr이며 가스 주입 후의 3$\times$10-4 Torr이하의 working pressure에서 박막을 증착하였다. 이온 전류 밀도는 5$\mu$A~15$\mu$A까지 변화시켰으며 이온 에너지는 0.7keV~1.3keV까지 변화시켰다. 반응성 가스는 아르곤에 대하여 Zmrp 0, 50, 100%까지 변화시켰으며 기판 온도는 50, 100, 150, 20$0^{\circ}C$로 변화시켰다. ITO 박막의 결정구조는 Ar 이온만으로 스퍼터링한 경우에는 XRD 상에서 [400] 방향으로 우선성장하였으며 산소분압이 증가함에 따라 [222] 방향으로 우선 성장함을 확인 할 수 있었다. 전기적 특성은 Ar ion에 Oxygen ion의 비율이 약간만 증가하여도 비저항의 큰 증가를 보여 주었다. 이는 산소 vacancy의 감소에 의한 것으로 여겨진다.

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