• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.1
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• pp.16-22
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• 2008

We fabricated thermally-evaporated 10 nm-Ni/30 nm and 70 nm Poly-Si/200 nm-$SiO_2/Si$ structures to investigate the thermal stability of nickel silicides formed by rapid thermal annealing(RTA) of the temperature of $300{\sim}1100^{\circ}C$ for 40 seconds. We employed for a four-point tester, field emission scanning electron microscope(FE-SEM), transmission electron microscope(TEM), high resolution X-ray diffraction(HRIXRD), and scanning probe microscope(SPM) in order to examine the sheet resistance, in-plane microstructure, cross-sectional microstructure evolution, phase transformation, and surface roughness, respectively. The silicide on 30 nm polysilicon substrate was stable at temperature up to $900^{\circ}C$, while the one on 70 nm substrate showed the conventional $NiSi_2$ transformation temperature of $700^{\circ}C$. The HRXRD result also supported the existence of NiSi-phase up to $900^{\circ}C$ for the Ni silicide on the 30 nm polysilicon substrate. FE-SEM and TEM confirmed that 40 nm thick uniform silicide layer and island-like agglomerated silicide phase of $1{\mu}m$ pitch without residual polysilicon were formed on 30 nm polysilicon substrate at $700^{\circ}C\;and\;1000^{\circ}C$, respectively. All silicides were nonuniform and formed on top of the residual polysilicon for 70 nm polysilicon substrates. Through SPM analysis, we confirmed the surface roughness was below 17 nm, which implied the advantage on FUSI gate of CMOS process. Our results imply that we may tune the thermal stability of nickel monosilicide by reducing the height of polysilicon gate.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.56.2-56.2
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• 2012

Clinically-favored materials for bone regeneration are mainly based on bioceramics due to their chemical similarity to the mineral phase of bone. A successful scaffold in bone regeneration should have a 3D interconnected pore structure with the proper biodegradability, biocompatibility, bioactivity, and mechanical property. The pore architecture and mechanical properties mainly dependent on the fabrication process. Bioceramics scaffolds are fabricated by polymer sponge method, freeze drying, and melt molding process in general. However, these typical processes have some shortcomings in both the structure and interconnectivity of pores and in controlling the mechanical stability. To overcome this limitation, the rapid prototyping (RP) technique have newly proposed. Researchers have suggested RP system in fabricating bioceramics scaffolds for bone tissue regeneration using selective laser sintering, powder printing with an organic binder to form green bodies prior to sintering. Meanwhile, sintering process in high temperature leads to bad cost performance, unexpected crystallization, unstable mechanical property, and low bio-functional performance. The development of RP process without high thermal treatment is especially important to enhance biofunctional performance of scaffold. The purpose of this study is development of new process to fabricate ceramic scaffold at room temperature. The structural properties of the scaffolds were analyzed by XRD, FE-SEM and TEM studies. The biological performance of the scaffolds was also evaluated by monitoring the cellular activity.

• Corrosion Science and Technology
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• v.12 no.3
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• pp.132-141
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• 2013

This work is concerning a methodology of Ni-base superalloy development for a very high temperature gas-cooled reactor(VHTR) using design of experiments(DOE) and thermodynamic calculations. Total 32 sets of the Ni-base superalloys with various chemical compositions were formulated based on a fractional factorial design of DOE, and the thermodynamic stability of topologically close-packed(TCP) phases of those alloys was calculated by using the THERMO-CALC software. From the statistical evaluation of the effect of the chemical composition on the formation of TCP phase up to a temperature of 950 oC, which should be suppressed for prolonged service life when it used as the structural components of VHTR, 16 sets were selected for further calculation of the mechanical properties. Considering the yield and ultimate tensile strengths of the selected alloys estimated by using the JMATPRO software, the optimized chemical composition of the alloys for VHTR application, especially intermediate heat exchanger, was proposed for a succeeding experimental study.

• Journal of Astronomy and Space Sciences
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• v.21 no.1
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• pp.29-38
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• 2004

A ultra low noise Q-band HEMT receiver for VLBI has been developed using a local oscillator with a very high phase stability. The performance of receiver was verified by comparison with receivers which were developed at the other countries. The receiver noise temperature shows 65 K in the frequency ragne from 42 ㎓ to 44 ㎓, less than 100 K from 39 ㎓ to 46 ㎓, respectively. A receiver noise temperature at SiO major line of 43㎓ which will be mainly observed by using this receiver has been optimized.

• Journal of the Korean Vacuum Society
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• v.4 no.S2
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• pp.79-82
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• 1995

$N^+$ beam modified diffusion barriers have been proposed for Cu metallization . The crystalline phases of W and Ti thin films change from polycrytalline to amorphous phase by the N ion implantation of 1~$3\times 10^{17}$atoms/$\textrm{cm}^2$. The comparison between these amorphized diffusion barriers and the conventional W and TiN films shows that the amorphized W and Ti diffusion barriers are superior to the conventional w and TiN for protecting the Cu diffusion barriers are superior to the conventional W and TiN for protecting the Cu diffusion at the annealing temperature range $600^{\circ}C$~$800^{\circ}C$ for 30min. This is a worldwidely new and excellent result on the high temperature thermal stability of diffusion barrier.

• Korean Membrane Journal
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• v.3 no.1
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• pp.24-31
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• 2001

Ultrafiltration membranes base on copoly(amide-imide) derivatives were prepared by the phase inversion method and the factors determining the permeation characteristics of membrane were investigated. The permeation behavior was observed by the relative ratio of permeate flux (J$\_$t/)/pure water flux (J$\_$o/). The characteristics through membrane were measured using aqueous solution of poly(ethyleneglycol) (MW 2.0$\times$10$\^$4/) over a temperature range of 10∼90$\^{C}$. With increasing the operating temperature, the relative ratio of flux became high. All the membranes had good chemical stability. Copoly(amide-imide) membranes having various Permeation properties could be obtained. Further, it was proved that the membrane performances could be determined from the preparation conditions as well as various operating conditions.

• Journal of the Korean Solar Energy Society
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• v.33 no.1
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• pp.73-78
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• 2013

Hexadecane and exfoliated graphite nanoplate (xGnP)composite was prepared as a shape-stabilized phase change material (SSPCM) in a vacuum to develope thermal energy storage. The Hexadecane as an organic phase change material (PCM) is very stable against phase separation of PCM and has a melting point at $18^{\circ}C$ that is under the thermally comfortable temperature range in buildings. The xGnP is a porous carbon nanotube material with high thermal conductivity. Scanning electron microscope (SEM) and Fourier transformation infrared spectrophotometer (FT-IR)were used to confirm the chemical and physical stability of Hexadecane/xGnP SSPCM. In addition, thermal properties were determined by Deferential scanning calorimeter(DSC) and Thermogravimetric analysis (TGA). The specific heat of Hexadecane/xGnPSSPCM was $10.0J/g{\cdot}K$ at $21.8^{\circ}C$. The melting temperature range of melting and freezing were found to be $16-25^{\circ}C$ and $17-12^{\circ}C$. At this time, the laten heats of melting and freezing were 96.4J/g and 94.8J/g. The Hexadecane was impregnated into xGnP as much about 48.8% of Hexadecane/xGnP SSPCM's mass fraction.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.5
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• pp.376-381
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• 2019

In this work, we evaluated the structural, electrical and optical properties of $Ge_8Sb_2Te_{11}$ and Cu-doped $Ge_8Sb_2Te_{11}$ thin films prepared by rf-magnetron reactive sputtering. The 200-nm-thick deposited films were annealed in a range of $100{\sim}400^{\circ}C$ using a furnace in an $N_2$ atmosphere. The amorphous-to-crystalline phase changes of the thin films were investigated by X-ray diffraction (XRD), UV-Vis-IR spectrophotometry, a 4-point probe, and a source meter. A one-step phase transformation from amorphous to face-centered-cubic (fcc) and an increase of the crystallization temperature ($T_c$) was observed in the Cu-doped film, which indicates an enhanced thermal stability in the amorphous state. The difference in the optical energy band gap ($E_{op}$) between the amorphous and crystalline phases was relatively large, approximately 0.38~0.41 eV, which is beneficial for reducing the noise in the memory devices. The sheet resistance($R_s$) of the amorphous phase in the Cu-doped film was about 1.5 orders larger than that in undoped film. A large $R_s$ in the amorphous phase will reduce the programming current in the memory device. An increase of threshold voltage ($V_{th}$) was seen in the Cu-doped film, which implied a high thermal efficiency. This suggests that the Cu-doped $Ge_8Sb_2Te_{11}$ thin film is a good candidate for PRAM.

• Journal of Powder Materials
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• v.19 no.4
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• pp.253-258
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• 2012

The characteristics of $Al_2TiO_5$ ceramics were influenced by the additives and the heat treatment that controls the microcrack behavior at grain boundaries. The effect of additives on $Al_2TiO_5$ ceramics were investigated in terms of mechanical properties and thermal expansion at high temperature. The $Al_2TiO_5$ were synthesized at $1500^{\circ}C$, $1550^{\circ}C$ and $1600^{\circ}C$ for 2h by reaction sintering. The formation of $Al_2TiO_5$ phase was increased by additives that enhanced the volume of the microcrack that can lead to low thermal expansion. The mechanical properties of the stabilized $Al_2TiO_5$ ceramics were increased remarkably at $1100^{\circ}C$, $1200^{\circ}C$ and $1300^{\circ}C$ due to the oneset of mechanical healing of grain-bondary microcracks at a high temperature. The amount of microcrack was decreased at lower sintering temperature that causes the increase of mechanical properties at high temperature.

• Journal of Power System Engineering
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• v.16 no.4
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• pp.60-65
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• 2012

This study was carried out to investigate the effect of reverse transformation on the damping capacity in high manganese austenitic stainless steel. ${\alpha}^{\prime}$-martensite was formed with the specific direction and surface relief by deformation. Over 95% of the austenite phase was transformed to deformation-induced ${\alpha}^{\prime}$-martensite by 70% cold rolling. Reverse transformation became rapid above an annealing temperature of $550^{\circ}C$, but there was no significant transformation above $700^{\circ}C$. In addition, with increasing annealing time at $700^{\circ}C$, reverse transformation was induced rapidly, but the transformation was almost completed at 10 min. Damping capacity was increased up to $700^{\circ}C$, and than unchanged with the increasing annealing temperature. Damping capacity increased steeply with an increasing reverse treatment time up to 10min, whereas there were no significant change with a treatment time of more than 10 min. Damping capacity increased with an increasing the reversed austenite and was strongly affected by reversed austenite.