• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• Publications of The Korean Astronomical Society
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• v.32 no.1
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• pp.359-361
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• 2017

We report our research on aluminum mirror optics for future infrared astronomical satellites. For space infrared missions, cooling the whole instrument is crucial to suppress the infrared background and detector noise. In this aspect, aluminum is appropriate for cryogenic optics, because the same material can be used for the whole structure of the instrument including optical components thanks to its excellent machinability, which helps to mitigate optical misalignment at low temperatures. We have fabricated aluminum mirrors with ultra-precision machining and measured the wave front errors (WFEs) of the mirrors with a Fizeau interferometer. Based on the power spectral densities of the WFEs, we confirmed that the surface accuracy of all the mirrors satisfied the requirements for the SPICA Coronagraph Instrument. We then integrated the mirrors into an optical system, and examined the image quality of the system with an optical laser. As a result, the total WFE is estimated to be 33 nm (rms) from the Strehl ratio. This is consistent with the WFEs estimated from the measurement of the individual mirrors.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1034-1039
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• 2005

SALM(Simultaneous localization and mapping) and AI(Artificial intelligence) have been active research areas in robotics for two decades. In particular, localization is one of the most important tasks in mobile robot research. Until now expensive sensors such as a laser sensor have been used for mobile robot localization. Currently, the proliferation of RFID technology is advancing rapidly, while RFID reader devices, antennas and tags are becoming increasingly smaller and cheaper. So, in this paper, the smart floor using passive RFID tags is proposed and, passive RFID tags are mainly used for identifying location of the mobile robot in the smart floor. We discuss a number of challenges related to this approach, such as tag distribution (density and structure), typing and clustering. In the smart floor using RFID tags, the localization error results from the sensing area of the RFID reader, because the reader just knows whether the tag is in the sensing range of the sensor and, until now, there is no study to estimate the heading of mobile robot using RFID tags. So, in this paper, two algorithms are suggested to. The Markov localization method is used to reduce the location(X,Y) error and the Kalman Filter method is used to estimate the heading($\theta$) of mobile robot. The algorithms which are based on Markov localization require high computing power, so we suggest fast Markov localization algorithm. Finally we applied these algorithms our personal robot CMR-P3. And we show the possibility of our probability approach using the cheap sensors such as odometers and RFID tags for mobile robot localization in the smart floor

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.194-201
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• 2004

Optical fibers are indispensable fer optical communication systems that transmit large volumes of data at high speed. But the aligning technology under the sub-micron accuracy is required for the precise axis adjustment and connection. For the purpose of precise alignment of the optical arrays, in this research, we have developed the 12-axis(with 8 automated axis and 4 manual axis) automatic optical fiber alignment system including the image processing-based searching system, the automatic loading system using the robot and the suction toot and the automatic UV bonding system. In order to obtain the sub-micron alignment accuracy, two 4-axis PC-based motion controllers and the two 50nm resolution 6-aixs micro-stage actuated by micro stepping motors are adopted. The fiber aligning procedure consists of two steps. Firstly, the optical wave guide and an input optical array are aligned by the 6-axis input micro-stage with the IR camera. The image processing technique is introduced to reduce primary manual aligning time and result in achieving the 50% decrease of aligning time. Secondly, the IR camera is replaced by the output micro-stage and a wave guide and two optical arrays are aligned simultaneously before the laser power intensity delivered to the optical powermeter reached the threshold value. When the aligning procedure is finished, the wave guide and arrays are W bonded. The automatic loading/unloading system is also introduced and the entire wave guide handing time is reduced significantly compared to the former commercial aligning system.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.6
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• pp.496-503
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• 2016

Leakages at plant structures of power and petrochemistry plants have led to casualties and economic losses. These leakages are caused by fatigue failure of pipelines and their wall thickness. Vibration measurement methods for plant pipelines mainly use acceleration and laser sensors. These sensors are difficult to install and operate and thus lead to an increase in operational cost especially for wide area surveillance. Recently, measurements of leak and vibration displacements using cameras have attracted the interest of many researchers. This method has advantages such as simple installation, long distance monitoring, and wide area surveillance. Therefore, in this paper, we have developed a system that can measure the leakage and vibrational displacement by using a camera. Furthermore, the developed system was verified with experimental data.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.87.2-87.2
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• 2012

고출력 반도체 레이저 다이오드는 발진 파장 및 광 출력에 따라 다양한 분야에 응용되고 있으며, 특히 발진파장이 808 nm 및 1470 nm 인 고출력 레이저 다이오드의 경우 재료가공, 펌핑용 광원 (DPSSL, 광섬유 레이저), 의료, 피부미용 (점 제거), 레이저 다이오드 디스플레이 등 가장 다양한 응용분야를 가진 광원 중의 하나라고 할 수 있다. 일례로 재료가공의 경우, 레이저 용접, 레이저 인쇄, 하드디스크의 레이저 텍스쳐링 등 그 응용분야는 무수히 많으며, 최근에는 미래 성장동력 사업의 하나로 중요한 이슈가 되는 태양전지에서 에지 분리 (edge isolation), ID 마킹, 레이저 솔더링 등에서 필수불가결한 광원으로 각광받고 있다. 808 nm 대역 In(Ga)AlAs quantum dots laser diode (QDLD) 성장을 위하여 In(Ga)AlAs QD active 와 In(Ga)AlAs QD LD 성장으로 크게 분류하여 여러 가지 test 실험을 수행하였다. 우선 In(Ga)AlAs QD LD 성장에 앞서 high power LD에 적용 가능한 GaAs/AlGaAs quantum well의 성장 및 전기 측정을 수행하여 그 가능성을 보았다. In(Ga)AlAs QD active layer의 효과적인 실험 조건 조절을 위해 QD layer는 sequential mithod (ex. n x (InGaAlAs t sec + InAs t sec + As 10 sec)를 사용하였다. In(Ga)AlAs QD active layer는 성장 온도, 각 sequence 별 시간, 각 source 양, barrier 두께 조절 및 타입변형, Arsenic flux 등의 조건을 조절하여 실험하였다. 또한 위에서 선택된 몇 가지 active layer 를 이용하여 In(Ga)AlAs QD LD 성장 조건 변화를 시도하였다.

• Smart Structures and Systems
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• v.7 no.1
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• pp.1-13
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• 2011

It has been shown in the literature that active adjustment of the intake area of a jet engine has potential to improve its fuel efficiency. This paper presents the design and control of a novel proof-of-concept active jet engine intake using Nickel-Titanium (Ni-Ti or Nitinol) shape memory alloy (SMA) wire actuators. The Nitinol SMA material is used in this research due to its advantages of high power-to-weight ratio and electrical resistive actuation. The Nitinol SMA material can be fabricated into a variety of shapes, such as strips, foils, rods and wires. In this paper, SMA wires are used due to its ability to generate a large strain: up to 6% for repeated operations. The proposed proof-of-concept engine intake employs overlapping leaves in a concentric configuration. Each leaf is mounted on a supporting bar than can rotate. The supporting bars are actuated by an SMA wire actuator in a ring configuration. Electrical resistive heating is used to actuate the SMA wire actuator and rotate the supporting bars. To enable feedback control, a laser range sensor is used to detect the movement of a leaf and therefore the radius of the intake area. Due to the hysteresis, an inherent nonlinear phenomenon associated with SMAs, a nonlinear robust controller is used to control the SMA actuators. The control design uses the sliding-mode approach and can compensate the nonlinearities associated with the SMA actuator. A proof-of-concept model is fabricated and its feedback control experiments show that the intake area can be precisely controlled using the SMA wire actuator and has the ability to reduce the area up to 25%. The experiments demonstrate the feasibility of engine intake area control using an SMA wire actuator under the proposed design.

• Progress in Superconductivity and Cryogenics
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• v.16 no.2
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• pp.1-6
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• 2014

The five-year national project in Japan for R&D of coated conductors and applications, named as the Materials and Power Applications of Coated Conductors (M-PACC) project, was finished at the end of FY2013. The project consists of four sub-themes as cable, transformer, SMES and coated conductors. In the theme of coated conductors, the fabrication process had been developed to satisfy the requirements from the applications such as in-field $I_c$ performance, low AC loss in the long tapes etc. Through the project, the remarkable progress was achieved as follows; a high in-field minimum $I_c$ value over 54A/cm-width under 3T at 77K was realized in a 200m long EuBCO tape with artificial pinning centers of $BaHfO_3$ by the pulsed laser deposition (PLD) technique on the IBAD template. On the other hand, the AC loss reduction was confirmed in the tapes fabricated by both PLD and the metal organic deposition (MOD) techniques by scribing 100m tapes into 10-filamments. Additionally, the mechanism of the delamination phenomenon was systematically investigated and the strength was improved by eliminating the origins of the weak points in the films. Through the development, all targeted goals were accomplished and the several results were appreciated as a world champion data.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.22 no.2
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• pp.43-50
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• 2022

In this paper, we designed and verified a Far-field measurement system for measuring the performance of an antenna operating in millimeter wave(W-band). For the antenna test, a measurement system should be selected according to the type of antenna, measurement items, measurement environment and period, etc. In the case of near-field measurement, it takes a lot of time because the number of measurement items increases when the antenna has multiple channels or various beams. Such an antenna can reduce the measurement time through Far-field measurement, and only necessary measurement items can be measured. Therefore, this study secured precise alignment of the far-field measurement system using a high-power laser and improved the measurement accuracy by applying a double amplifier system. The designed system was built in the anechoic chamber and verified by comparison with the verified Near-field measurement system.

• Journal of IKEEE
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• v.27 no.1
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• pp.122-126
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• 2023

In this paper, a control system for a complex microbial incubator was proposed. The proposed control system consists of a control unit, a communication unit, a power supply unit, and a control system of the complex microbial incubator. The controller of the complex microbial incubator is designed and manufactured to convert analog signals and digital signals, and control signals of sensors such as displays using LCD panels, water level sensors, temperature sensors, and pH concentration sensors. The water level sensor used is designed and manufactured to enable accurate water level measurement by using the IR laser method with excellent linearity in order to solve the problem that existing water level sensors are difficult to measure due to foreign substances such as bubbles. The temperature sensor is designed and used so that it has high accuracy and no cumulative resistance error by measuring using the thermal resistance principle. The communication unit consists of two LAN ports and one RS-232 port, and is designed and manufactured to transmit signals such as LCD panel, PCT panel, and load cell controller used in the complex microbial incubator to the control unit. The power supply unit is designed and manufactured to supply power by configuring it with three voltage supply terminals such as 24V, 12V and 5V so that the control unit and communication unit can operate smoothly. The control system of the complex microbial incubator uses PLC to control sensor values such as pH concentration sensor, temperature sensor, and water level sensor, and the operation of circulation pump, circulation valve, rotary pump, and inverter load cell used for cultivation. In order to evaluate the performance of the control system of the proposed complex microbial incubator, the result of the experiment conducted by the accredited certification body showed that the range of water level measurement sensitivity was -0.41mm~1.59mm, and the range of change in water temperature was ±0.41℃, which is currently commercially available. It was confirmed that the product operates with better performance than the performance of the products. Therefore, the effectiveness of the control system of the complex microbial incubator proposed in this paper was demonstrated.