• 제목/요약/키워드: High-Precision Positioning

검색결과 324건 처리시간 0.033초

볼나사 구동 리니어 스테이지의 마그네틱 센서 위치결정 실험 (The Position Decision Experiment of Magnetic Sensor in Ball-screw Driven Linear Stage)

  • 차영엽
    • 제어로봇시스템학회논문지
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    • 제19권1호
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    • pp.10-14
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    • 2013
  • High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decision. Though ball-screw driven linear stages equipped linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decision if they have not equipped the accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a magnetic sensor as a home switch of ball-screw driven linear stage by using capacitance probe.

홀 센서와 포토 센서를 이용하는 선형 스테이지에서 위치결정 비교 실험 (The Position Decision Comparison Experiment of Hall and Photo Sensors in the Linear Stage)

  • 차영엽
    • 제어로봇시스템학회논문지
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    • 제21권2호
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    • pp.157-161
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    • 2015
  • For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decisions. Though ball-screw driven linear stages equipped with encoders have high precision feed drivers and a long stroke, they have some limitations for reference position decisions if they have not been equipped accurate home sensors. High precision machining technology has become one of the most important aspects of the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. This study is performed to experimentally compare the repeatability for home position decisions in the case of photo sensors and hall sensors as a home switch of the ball-screw driven linear stage.

포토 마이크로 센서를 이용한 볼나사 구동 리니어 스테이지의 위치결정 실험 (A Position Decision Experiment in Ball-screw Driven Linear Stage using a Photomicrosensor)

  • 차영엽
    • 제어로봇시스템학회논문지
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    • 제20권4호
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    • pp.463-467
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    • 2014
  • High precision machining technology has become one of the most important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though ball-screw driven linear stages equipped with linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a photo micro sensor as a home switch of a ball-screw driven linear stage by using a capacitance probe.

초정밀 구동을 위한 6 자유도 스테이지의 설계와 모델링 (Design and Modeling of a 6-dof Stage for Ultra-Precision Positioning)

  • 문준희;박종호;박희재
    • 한국정밀공학회지
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    • 제26권6호
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    • pp.106-113
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    • 2009
  • A 6-DOF precision stage was developed based on parallel kinematics structure with flexure hinges to eliminate backlash, stick-slip and friction and to minimize parasitic motion coupled with motions in the other-axis directions. For the stage, lever linkage mechanism was devised to reduce the height of system for the enhancement of horizontal stiffness. Frequency response comparison between experimental results and mathematical model extracted from dynamics of the stage was performed to identify the system parameters such as spring constants and damping coefficients of actuation modules, which cannot be calculated accurately by analytic methods owing to their complicated structures. This newly developed precision stage and its identified model will be very useful for precision positioning and control because of its high accuracy and non-coupled movement.

DTM가공을 위한 2축 Stage의 정밀 이송특성연구 (Positioning control error of 2-Axis Stage for Diamond Turning Machine)

  • 이응석;박종진;이민기
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.309-312
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    • 2005
  • DTM (Diamond Turning Machine) is using for ultra precision manufacturing such as, plastic lens die or aspherical optics. This study is on a design of precision 2-axis stage for DTM. We designed and manufactured a back lash free stage using different weights and measured the positioning accuracy using Interferometer. Also, the 2-D moving accuracy is measured using the high magnification CCD technique. Then, the stage is tested with the machining of spherical and aspherical lens in a DTM with air bearing spindle. It was shown that the back lash free stage is effective for improving the positioning accuracy. Also, positioning control errors in motion control board were able to be found using the proposed stages system.

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Trajectory Following Control Using Cogging Force Model in Linear Positioning System

  • Chung, Myung-Jin;Gweon, Dae-Gab
    • International Journal of Precision Engineering and Manufacturing
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    • 제3권3호
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    • pp.62-68
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    • 2002
  • To satisfy the requirement of the one axis linear positioning system, which is following control of the desired trajectory without following error and is the high positioning accuracy, feed-forward loop having cogging force model is proposed. In the one axis linear positioning system with linear PM motor, cogging force acting as disturbance is modeled analytically. Analytic model of cogging force is verified by result measured from positioning system constructed with linear PM motor. Measured result is very similar with proposed analytic model. Cogging force model is used as feet forward loop in control scheme of linear positioning system. Cogging force feed-forward'loop is obtained from analytic model of cogging farce. Trajectory following error is reduced from 300nm to 100nm by applying the proposed cogging farce feed-forward loop. By using analytic model of cogging force, the control scheme is simplified. Also this analytic model is applicable to calculation of characteristic value of positioning system in design process.

플렉셔 힌지 기반 6-자유도 초정밀 위치 결정 스테이지의 기구학 해석 (Kinematic Analysis of a 6-DOF Ultra-Precision Positioning Stage Based on Flexure Hinge)

  • 신현표;문준희
    • 한국정밀공학회지
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    • 제33권7호
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    • pp.579-586
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    • 2016
  • This paper describes kinematic analysis of a 6-degrees-of-freedom (DOF) ultra-precision positioning stage based on a flexure hinge. The stage is designed for processes which require ultra-precision and high load capacities, e.g. wafer-level precision bonding/assembly. During the initial design process, inverse and forward kinematic analyses were performed to actuate the precision positioning stage and to calculate workspace. A two-step procedure was used for inverse kinematic analysis. The first step involved calculating the amount of actuation of the horizontal actuation units. The second step involved calculating the amount of actuation of the vertical actuation unit, given the the results of the first step, by including a lever hinge mechanism adopted for motion amplification. Forward kinematic analysis was performed by defining six distance relationships between hinge positions for in-plane and out-of-plane motion. Finally, the result of a circular path actuation test with respect to the x-y, y-z, and x-z planes is presented.

위치결정 스테이지의 고속 정밀 위치결정을 위한 입력성형명령 생성 기법 (Command Generation Method for High-Speed and Precise Positioning of Positioning Stage)

  • 장준원;박상원;홍성욱
    • 한국정밀공학회지
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    • 제25권10호
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    • pp.122-129
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    • 2008
  • This paper deals with precise positioning of a high-speed positioning stage without inducing residual vibration by using an input shaping technique. Input shaping is well known to be a very effective tool for suppressing the residual vibration of flexible structures. However, the ordinary input shaping for positioning stages is designated mostly for velocity regulation, not for the residual vibration at the target position. The main difficulties in implementing input shaping along with precise positioning are the time delay caused by the servo system characteristics and the s-curve feature often employed in some motor controllers. This paper analyzes the dynamic responses of a single-mode-dominate stage system subjected to input shaping. A theoretical model is developed io investigate the nature of system. In order to overcome the difficulty, this paper proposes an improved input shaper based on modified command profile generation. The proposed method is proved effective through experiments and simulations.

고속가공기용 고추력 리니어모터 이송계의 특성 평가 (Characteristic Test of High Force Linear Motor Feed Unit for High Speed Machine Tool)

  • 송창규;황주호;박천홍;이후상;정재한
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 춘계학술대회 논문집
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    • pp.977-981
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    • 2000
  • Direct drive linear motors have large potential for use as high speed machine tool feed units since they can increase machining rates and improve servo accuracy by eliminating gear related machining problems. So, in this paper, characteristic of 2-axis linear motor feed unit are studied and control gain are adjusted considering positioning, velocity, acceleration and static stiffness. We confirm linear motor feed unit are affected value of control gain sensitively, because drive directly. From the experiment, this feed unit has l${\mu}{\textrm}{m}$ micro step resolution, 5.7${\mu}{\textrm}{m}$ positioning accuracy and under 60${\mu}{\textrm}{m}$ circularity.

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PZT를 이용한 초정밀 구동의 문헌적 고찰 (Review of A High Precision Actuator Mechanism Using PZT)

  • 최현석;이준;정명철;윤덕원;한창수;홍원표;강응구;최헌종
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.524-529
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    • 2004
  • Recently High precision positioning device is used in many kinds of manufacturing and scientific instruments. Piezoelectric transducer is applied to the positioning devive as actuator, PZT has a high resolution, however, moving range is short. Many researcher have developed the mechanism for increasing a motion range. The types of increasing motion range mechanism with PZT are inertial slider, friction driver, ultrasonic motor, etc. In this paper we discuss the review of the hish precision actuator mechanism with PZT. Many kinds of mechanism for high precision are shown and compared.

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