• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Journal of Magnetics
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• v.22 no.1
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• pp.150-154
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• 2017

A novel high precision spatial positioning method utilizing the electromagnetic momentum, i.e., Electromagnetic Momentum Positioning (EMP), is proposed in this paper. By measuring the momentum of the electromagnetic field around the small current loop, the relative position between the sensor and the current loop is calculated. This method is particularly suitable for the application of close-range and high-precision positioning, e.g., data gloves and medical devices in personal healthcare, etc. The simulation results show that EMP method can give a high accuracy with the positioning error less than 1 mm, which is better than the traditional magnetic positioning devices with the error greater than 1 cm. This method lays the foundation for the application of data gloves to meet the accurate positioning requirement, such as the high precision interaction in Virtual Reality (VR), Augmented Reality (AR) and personal wearable devices network.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.6
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• pp.164-169
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. As such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. Control performance and stability analysis were performed in advance by modeling and designing the controller with Simulink.

• Proceedings of the KIPE Conference
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• 1998.10a
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• pp.91-96
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• 1998

This study aims to realize high precision repetitive positioning control of the linear servo motor. The authors have previously improved the repeatability positioning precision by employing a two-degree-of-freedom PID controller in the positioning control, rather than equal distance positioning, and investigates the repeatability positioning precision.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.617-620
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.1-4
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• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.44-49
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• 2008

This paper describes the problem of ultraprecision positioning with a ball screw mechanism in the microdynamic range, along with its solution. We compared the characteristics of two ball screw mechanisms with different table masses. The experimental results showed that the vibration resulting from the low stiffness of the ball screw degraded the positioning performance in the microdynamic range for the heavyweight mechanism. The proposed nominal characteristic trajectory following (NCTF) controller was designed for ultra precision positioning of the ball screw mechanism. The basic NCTF control system achieved ultra precision positioning performance with the lightweight mechanism, but not with the heavyweight mechanism. A conditional notch filter was added to the NCTF controller to overcome this problem. Despite the differences in payload and friction, both mechanisms then showed similar positioning performance, demonstrating the high robustness and effectiveness of the improved NCTF controller with the conditional notch filter. The experimental results demonstrated that the improved NCTF control system with the conditional notch filter achieved ultra precision positioning with a positioning accuracy of better than 10 nm, independent of the reference step input height.

• Proceedings of the KSRS Conference
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• 2005.10a
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• pp.349-352
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• 2005

The telematics positioning testbed is an infrastructure to test and verify positioning technology, the sub-component of telernatics system. The positioning testbed provides the environment of performance analysis for acquisition of static and dynamic positioning information using telematics vehicle. This testbed consists of onboard positioning system, positioning reference station and lab positioning server. The onboard positioning system equipped in telematics vehicle, consists of target positioning system, reference positioning system, and analysis tool. A equipment acquiring high precision positioning data obtained from GPS combined with IMU was set as a reference positioning system. Analysis tool compares observed positioning data with high precision positioning information from a reference positioning system, and processes positioning information. Positioning reference station is RTK system used for reducing atmosphere error, and it transmits corrected information to reference positioning system. Positioning server which is located at laboratory manages positioning database and provides monitoring data to integrated testbed operating system. It is expected that the testbed supports commercialization of telernatics technology and services, integrated testing among component technology and verification.