• Journal of IKEEE
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• v.20 no.1
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• pp.61-67
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• 2016

In this paper, a hardware design method is proposed for high speed high precision neutron radiation measurements. Our system is fabricated to use a high performance A/D Converter for digital data conversion of high precision and high speed analog signals. Using a neutron sensor, incident neutron radiation particles are detected; a precision microcurrent measurement module is also included: this module allows for more precise and rapid neutron radiation measurement design. The high speed high precision neutron measurement hardware system is composed of the neutron sensor, variable high voltage generator, microcurrent precision measurement component, embedded system, and display screen. The neutron sensor detects neutron radiation using high density polyethylene. The variable high voltage generator functions as a 0 ~ 2KV variable high voltage generator that is robust against heat and noise; this generator allows the neutron sensor to perform normally. The microcurrent precision measurement component employs a high performance A/D Converter to precisely and swiftly measure the high precision high speed microcurrent signal from the neutron sensor and to convert this analog signal into a digital one. The embedded system component performs multiple functions including neutron radiation measurement for high speed high precision neutron measurements, variable high voltage generator control, wired and wireless communications control, and data recording. Experiments using the proposed high speed high precision neutron measurement hardware shows that the hardware exhibits superior performance compared to that of conventional equipment with regard to measurement uncertainty, neutron measurement rate, accuracy, and neutron measurement range.

• Proceedings of the KIPE Conference
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• 1998.07a
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• pp.158-161
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• 1998

A precision high voltage generator for ion injection is implemented on HFZVS-PSCI (High Frequency Zero-Voltage-Switching Phase-Shift-Controlled Inverter). Some practical aspects of implementing precision high voltage generator with HFZVS-PSCI, such as a HFHV transformer, multiflier, and precision CR divider are discussed. The results show that the generator under the Phase-Shift-Controller has a fast dynamic response, low ripple voltage, and high accuracy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.663-667
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• 2000

The spindle unit is core parts in high precision machine tools. Diverse static and dynamic charateristics of spindle unit are needed for special purpose of machine tools. Specially, high damping ability may be very useful to high precision and high speed spindle unit. But commercial bearing system has very low damping value and high stiffness. In this paper, the combined bearing system with ball-hydrostatic bearing is suggested for high damping spindle unit. The suggested bearing system has 30% damping ability more than general ball bearing's. The average rotational accuracy of spindle with combined bearing in working speed is 24% better than with ball bearing. The unbalance rotating experiment in spindle show that rotating error with combined bearing is only half value of with ball bearing.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.1-4
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• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.617-620
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.39.1-39
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• 2002

We present nanoactuators and nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Major technical difficulties in the high-precision MEMS are arising from the fabrication uncertainty and electrical noise problems. In this paper, we present high-precision actuators and detectors, overcoming the technical limitations placed by the conventional MEMS technology. For the nano-precision actuation, we present a nonlinearly modulated digital actuator (NMDA). NMDA composed of a digital microactuator and a nonlinear micromechanical modulator. The nonlinear micromechanical modulator is intended to purify the actuation errors in the stroke of the digital a...

• Proceedings of the KIEE Conference
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• 2005.04a
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• pp.43-45
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• 2005

A High precision position control technique is used in many kind of industry areas. Especially this is to be one of the important parts in the development of precision machines. To get high precision and long range, dual servo voice coil motor(VCM) has been designed and implemented. In this paper, as a simulation and experimental result, the developed dual servo VCM shows the applicable possibility for precision machine system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.420-424
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• 1997

n the ballscrew slide system the ~najor problems in accomplishing the high-speed and high-precision are the friction between elements and the decrease of axial stiffness. Especially the friction on the guide have a bad effect on the precision of slidlng. Furthermore stick-slip occur when the low stiffness of slide system. The sticli-slip have a bad influence on the precision. In this research, the affection of stick-slip friction to the precision of the slide system is studied and the possible solution of the precision is proixjsed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.178-178
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• 2009

High-density optical information storing equipment, which is using Blu-ray, is the next generation information storing equipment that has about form six times to thirty-five times capacities. and high-density optical information storing equipment uses high NA(Numerical Aperture) aspheric glass objective lens as optical pick-up equipment to record and recognize high-density date. Generally this objective lens is developed and produced through a way of GMP(Glass Molding Press) that uses molding core that is performde by Ultra precision grinding, but grinding performing that has high-accuracy is very difficult because objective lens form is high NA. In this research, we preformed Ultra precision turning, using single crystal diamond bite, about WC(Co 0.5%), sintering brittleness material that is used molding core's material for GMP. and we confirmed aspheric glass lens compression of deformities molding core's Ultra precision turning possibility by measuring surface roughness(Ra) and processing surface's condition.