전력전자학회:학술대회논문집 (Proceedings of the KIPE Conference)
- 전력전자학회 1998년도 전력전자학술대회 논문집
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- Pages.158-161
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- 1998
이온주입용 정밀고압 발생장치 연구
A Study of Precision High Voltage Generator for Ion Injection
초록
A precision high voltage generator for ion injection is implemented on HFZVS-PSCI (High Frequency Zero-Voltage-Switching Phase-Shift-Controlled Inverter). Some practical aspects of implementing precision high voltage generator with HFZVS-PSCI, such as a HFHV transformer, multiflier, and precision CR divider are discussed. The results show that the generator under the Phase-Shift-Controller has a fast dynamic response, low ripple voltage, and high accuracy.
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