Proceedings of the KIPE Conference (전력전자학회:학술대회논문집)

The Korean Institute of Power Electronics (전력전자학회)
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A Study of Precision High Voltage Generator for Ion Injection

이온주입용 정밀고압 발생장치 연구

  • 유동욱 (한국전기연구소 전력전자연구부) ;
  • 정창용 (한국전기연구소 전력전자연구부) ;
  • 백주원 (한국전기연구소 전력전자연구부) ;
  • 조정구 (한국전기연구소 전력전자연구부) ;
  • 조기연 (한국전기연구소 전력전자연구부) ;
  • 김학성 (동양공전) ;
  • 원충연 (성균관대학교 전력전자연구실)
  • Published : 1998.07.01
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Abstract

A precision high voltage generator for ion injection is implemented on HFZVS-PSCI (High Frequency Zero-Voltage-Switching Phase-Shift-Controlled Inverter). Some practical aspects of implementing precision high voltage generator with HFZVS-PSCI, such as a HFHV transformer, multiflier, and precision CR divider are discussed. The results show that the generator under the Phase-Shift-Controller has a fast dynamic response, low ripple voltage, and high accuracy.

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