• Journal of the Korean Society of Safety
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• v.31 no.3
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• pp.42-46
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• 2016

In LCD Display or semiconductor manufacturing processes, the anti-static technology of glass substrates and wafers becomes one of the most difficult issues which influence the yield of the semiconductor manufacturing. In order to overcome the problems of wafer surface contamination various issues such as ionization in decompressed vacuum and inactive gas(i.e. $N_2$ gas, Ar gas, etc.) environment should be considered. Soft X ray radiation is adequate in air and $O_2$ gas at atmospheric pressure while UV radiation is effective in $N_2$ gas Ar gas and at reduced pressure. At this point of view, the "vacuum ultraviolet ray ionization" is one of the most suitable methods for static elimination. The vacuum ultraviolet can be categorized according to a short wavelength whose value is from 100nm to 200nm. this is also called as an Extreme Ultraviolet. Most of these vacuum ultraviolet is absorbed in various substances including the air in the atmosphere. It is absorbed substances become to transit or expose the electrons, then the ionization is initially activated. In this study, static eliminator based on the vacuum ultraviolet ray under the above mentioned environment was tested and the results show how the ionization performance based on vacuum ultraviolet ray can be optimized. These vacuum ultraviolet ray performs better in extreme atmosphere than an ordinary atmospheric environment. Neutralization capability, therefore, shows its maximum value at $10^{-1}{\sim}10^{-3}$ Torr pressure level, and than starts degrading as pressure is gradually reduced. Neutralization capability at this peak point is higher than that at reduced pressure about $10^4$ times on the atmospheric pressure and by about $10^3$ times on the inactive gas. The introductions of these technology make it possible to perfectly overcome problems caused by static electricity and to manufacture ULSI devices and LCD with high reliability.

• Journal of the Korea Institute of Military Science and Technology
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• v.7 no.4 s.19
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• pp.138-145
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• 2004

Experimental study was conducted on cylindrical supersonic diffuser in order to investigate the effects of the ratios of diffuser area to nozzle throat area (Ad/At), diffuser area to nozzle exit area (Ad/Ae), nozzle exit area to its throat area (Ae/At), and diffuser length to its diameter (L/D), the free volume of vacuum chamber, and the relative distance between nozzle exit and diffuser inlet on the diffuser performance. The study showed that the minimum diffuser starting pressure (Po/Pa)st increased monotonically with increase in (Ad/At) as predicted by the normal shock and momentum theory models and the volume of vacuum chamber affected vacuum pressure level during diffuser operation at lower value of (Ad/Ae). The results of this investigation will be utilized in the design of real-scale high-altitude simulation test facility.

• Journal of the Korean Vacuum Society
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• v.2 no.2
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• pp.139-144
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• 1993

The dynamic calibration system which can calibrate the ultrahigh vacuum pressure down to $10^{-10}$torr has been fabricated. The production and control of minute flow of $10^{-6}~10^{-9}$torr L/s range is done by a porous plug connected to the high vacuum standards system. The base pressure of the UHV standards system down to $10^{-11}$torr range was obtained by refrigerator type cryopump, whose pumping speed is known to be constant. By using the UHV standards system, 2 extractor gauges and 1 nude ion gauge were calibrated and their linearities and scatterings were studied.

• Journal of the Korean Geotechnical Society
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• v.38 no.12
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• pp.125-134
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• 2022

The Global Expansion Roadmap published by the International Space Exploration Coordination Group, which is organized by space agencies around the world, presents future lunar exploration guidance and stresses a lunar habitat program to utilize lunar resources. The Moon attracts attention as an outpost for deep space exploration. Simulating lunar surface environments is required to evaluate the performances of various equipment for future lunar surface missions. In this paper, an experimental study was conducted to simulate high vacuum pressure and cryogenic temperature of the permanent shadow regions in the lunar south pole, which is a promising candidate for landing and outpost construction. The establishment of an efficient dirty thermal vacuum chamber (DTVC) operation process has never been presented. One-dimensional ground cooling tests were conducted with various vacuum pressures with the Korean Lunar Simulant type-1 (KLS-1) in DTVC. The most advantageous vacuum pressure was found to be 30-80 mbar, considering the cooling efficiency and equipment stability. However, peripheral cooling is also required to simulate a cryogenic for not sublimating ice in a high vacuum pressure. In this study, an efficient peripheral cooling operation process was proposed by applying the frost ratio concept.

• Journal of the Korean Chemical Society
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• v.48 no.5
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• pp.461-466
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• 2004

Kinetics for the nucleophiles have been studied under high vacuum and high pressures in various temperatures. Pseudo-first order rate constants, second order rate constants, thermodynamic parameters and Hammett ${\rho}$-values are determined. The values of ${\Delta}V^{\neq},\;{\Delta}{\beta}^{\neq}\;and\;{\Delta}S^{\neq}$are all negative. The Hammett r-values are negative for the nucleophile (${\rho}$x) over the pressure range studied. The results of kinetic studies for pressure and nucleophilet show that these reactions proceed in typical $S_N2$ reaction mechanism and change of mechanism.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.60-60
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• 2011

Giant magnetoresistance (GMR), tunneling magnetoresistance (TMR), and magnetic random-access memory (MRAM) are currently active research areas in spintronics. The high magnetoresistance and the high spin polarization (P) of electrons in the ferromagnetic electrodes of tunnel junction or intermediate layers are required. Magnetite, Fe3O4, is predicted to possess as half-metallic nature, P ~ 100% spin polarization, and has a high Curie temperature (TC~850 K). Experiments demonstrated that the P~($80{\pm}5$)%, ~($60{\pm}5$)%, and ~40-55% for epitaxial (111), (110) and (001)-oriented Fe3O4 thin films, respectively. Epitaxial Fe3O4 films may enable us to investigate the effects of half metals on the spin transport without grain-boundary scattering.In addition, it has been reported that the Verwey transition (TV, a first order metal-insulator transition) of 120 K in bulk Fe3O4 is strongly affected by many parameters such as stoichiometry and stress, etc. Here we report that the growth modes, magnetism and transport properties of Fe3O4 thin films were strongly dependent on the oxygen pressure during film growth. The average roughness decreases from 1.021 to 0.263 nm for the oxygen pressure increase from $2.3{\times}10-7$ to $8.2{\times}10^{-6}$ Torr, respectively. The 120 K Verwey transition in Fe3O4 was disappeared for the sample grown under high oxygen pressure.

• Journal of Korea Foundry Society
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• v.20 no.3
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• pp.181-187
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• 2000

There are two types of vacuum die casting, one is known as the chill block method, and the other is the valve block method. Efficiency of the valve block method is better than the chill block method. However purchasing and maintaining cost of the former one is very high, the latter method is popular in many small and medium die casting shops. Simple evacuation system using chill vent was prepared to investigate the effect of the air pressure, hose length and chill vent type on the pressure change in die cavity in this study. The rate of evacuation was influenced by the evacuation method, chill vent condition and hose length. Evacuation time became longer and vacuum level lower when evacuating cavity via chill vent. It took a longer time to evacuate the cavity when a longer hose was used. Vacuum level in the cavity also decreased with increase in hose length.

• Journal of the Korean Vacuum Society
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• v.9 no.1
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• Journal of the Korean Society of Industry Convergence
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• v.21 no.1
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• pp.1-8
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• 2018

The purpose of this study is to develop a high-strength, high-toughness, thin-walled aluminum shock absorber housing product by applying a high vacuum die casting method to improve internal gas defect and formability. The analysis program dedicated for the casting was used because it was too costly and time-consuming to adopt the gating system design. The final casting plan was designed based on the flow pattern of the material filled into the mold and the result of air pressure and air pocket after the material was completely filled in the mold. Gaty shape was designed as a split type. The runner was designed to have the same shape as the initial inlet curve of the cavity, and the flow of the molten metal was prevented from turbulent flow. The most favorable results were obtained when the injection speed was $V_2=4.0m/s$. Defects on pores were reduced by applying high vacuum level inside the mold.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.59 no.3
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• pp.311-316
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• 2010

According to increase of combined cycle power generation, the manufacturing market of gas turbine generator has become more competitive, so there is high pressure on the manufacturer to reduce generator price. Global VPI(vacuum pressure impregnation) method is effective to save the production cost and time for manufacturing stator windings, but it has an abrasion problem by vibration between stator windings and slots. This paper presents the insulation breakdown case, which is for VPI type generator during high voltage insulation tests, and also shows the cause analysis, repair works as well as reliability test. the purpose of this paper is to understand the insulation properties of VPI type generator and to know prevention of insulation weakness.