• 한국안전학회지
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• 제31권3호
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• pp.42-46
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• 2016

In LCD Display or semiconductor manufacturing processes, the anti-static technology of glass substrates and wafers becomes one of the most difficult issues which influence the yield of the semiconductor manufacturing. In order to overcome the problems of wafer surface contamination various issues such as ionization in decompressed vacuum and inactive gas(i.e. $N_2$ gas, Ar gas, etc.) environment should be considered. Soft X ray radiation is adequate in air and $O_2$ gas at atmospheric pressure while UV radiation is effective in $N_2$ gas Ar gas and at reduced pressure. At this point of view, the "vacuum ultraviolet ray ionization" is one of the most suitable methods for static elimination. The vacuum ultraviolet can be categorized according to a short wavelength whose value is from 100nm to 200nm. this is also called as an Extreme Ultraviolet. Most of these vacuum ultraviolet is absorbed in various substances including the air in the atmosphere. It is absorbed substances become to transit or expose the electrons, then the ionization is initially activated. In this study, static eliminator based on the vacuum ultraviolet ray under the above mentioned environment was tested and the results show how the ionization performance based on vacuum ultraviolet ray can be optimized. These vacuum ultraviolet ray performs better in extreme atmosphere than an ordinary atmospheric environment. Neutralization capability, therefore, shows its maximum value at $10^{-1}{\sim}10^{-3}$ Torr pressure level, and than starts degrading as pressure is gradually reduced. Neutralization capability at this peak point is higher than that at reduced pressure about $10^4$ times on the atmospheric pressure and by about $10^3$ times on the inactive gas. The introductions of these technology make it possible to perfectly overcome problems caused by static electricity and to manufacture ULSI devices and LCD with high reliability.

• 한국군사과학기술학회지
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• 제7권4호
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• pp.138-145
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• 2004

Experimental study was conducted on cylindrical supersonic diffuser in order to investigate the effects of the ratios of diffuser area to nozzle throat area (Ad/At), diffuser area to nozzle exit area (Ad/Ae), nozzle exit area to its throat area (Ae/At), and diffuser length to its diameter (L/D), the free volume of vacuum chamber, and the relative distance between nozzle exit and diffuser inlet on the diffuser performance. The study showed that the minimum diffuser starting pressure (Po/Pa)st increased monotonically with increase in (Ad/At) as predicted by the normal shock and momentum theory models and the volume of vacuum chamber affected vacuum pressure level during diffuser operation at lower value of (Ad/Ae). The results of this investigation will be utilized in the design of real-scale high-altitude simulation test facility.

• 한국진공학회지
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• 제2권2호
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• pp.139-144
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• 1993

동적교정방법을 이용하여 $10^{-7}~10^{-10}$torr 영역에서 교정 가능한 초고진공 표준기를 제작하였다. $10^{-6}~10^{-9}$torr L/s 영역의 극미세 유량은 고진공 표준기에 porous plug를 연결하여 발생 제어시켰으며 일정한 배기속도를 유지함이 알려져 있는 refrigerator type cryopump를 이용하여 $3{\times}10^{-11}$torr의 base pressure를 얻을 수 있었다. 이 초고진공 표준기를 이용하여 두 개의 extractor gauge와 자체 제작한 nude 이온게이지들을 교정하고 그 직선성 및 재현도를 살펴보았다.

• 한국지반공학회논문집
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• 제38권12호
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• pp.125-134
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• 2022

세계 우주 기관들로 조직된 국제 우주탐사 협력 그룹이 발간하는 글로벌 우주탐사 로드맵에서는 미래 달 탐사 방향과 달 자원 활용을 위한 거주 계획을 반영하는 등 달은 심우주 탐사를 위한 전초기지로 주목받고 있다. 따라서 달 행성 지반 환경 재현 인프라 기술은 미래 달 지상 탐사를 위해 필요한 다양한 장비들의 성능검증에 활용될 수 있다. 본 연구에서는 달 착륙 및 기지 건설 후보지인 달 남극 영구음영지역의 고진공 및 극저온 지상 환경을 재현하고자 하였다. 현재까지 달 지상 환경 재현을 위한 효율적 장비 운용 프로세스는 제시되지 못한 실정으로, 본 연구에서는 파일럿 지반열진공챔버에 인공월면 지반을 조성한 뒤 다양한 진공 환경에 대해 일방향 지반냉각 실험을 진행하고 이를 평가하였다. 냉각효율 및 장비 안정성 측면에서 가장 유리한 진공 환경은 30-80 mbar인 것으로 파악되었으나, 고진공 환경에서 얼음이 승화되지 않기 위한 극저온의 온도를 구현하기 위해서는 주변부 냉각이 추가적으로 요구되었다. 이를 위해 본 연구에서는 동결비 개념을 적용해 효율적인 주변부 냉각 가동 시점을 제안하였다.

• 대한화학회지
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• 제48권5호
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• pp.461-466
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• 2004

고진공 및 고압에서 친핵체변화에 따른 반응을 온도변화에 따라 속도론적으로 연구하였다. 유사1차반응속도상수, 2차반응속도상수, 열역학함수 및 Hammett ${\rho}$ 값을 구하였다. ${\Delta}V^{\neq},\;{\Delta}{\beta}^{\neq}\;및\;{\Delta}S^{\neq}$는 모두 음의 값을 나타내었으며, 모든 압력 조건에서 친핵체의 치환기효과 ${\rho}$x는 음의 값을 나타내었다. 전체적인 반응은 전형적인 $S_N2$ 반응메카니즘을 따르며, 압력과 친핵체 변화에 따라 반응메카니즘에 변화가 생김을 알 수 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.60-60
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• 2011

Giant magnetoresistance (GMR), tunneling magnetoresistance (TMR), and magnetic random-access memory (MRAM) are currently active research areas in spintronics. The high magnetoresistance and the high spin polarization (P) of electrons in the ferromagnetic electrodes of tunnel junction or intermediate layers are required. Magnetite, Fe3O4, is predicted to possess as half-metallic nature, P ~ 100% spin polarization, and has a high Curie temperature (TC~850 K). Experiments demonstrated that the P~($80{\pm}5$)%, ~($60{\pm}5$)%, and ~40-55% for epitaxial (111), (110) and (001)-oriented Fe3O4 thin films, respectively. Epitaxial Fe3O4 films may enable us to investigate the effects of half metals on the spin transport without grain-boundary scattering.In addition, it has been reported that the Verwey transition (TV, a first order metal-insulator transition) of 120 K in bulk Fe3O4 is strongly affected by many parameters such as stoichiometry and stress, etc. Here we report that the growth modes, magnetism and transport properties of Fe3O4 thin films were strongly dependent on the oxygen pressure during film growth. The average roughness decreases from 1.021 to 0.263 nm for the oxygen pressure increase from $2.3{\times}10-7$ to $8.2{\times}10^{-6}$ Torr, respectively. The 120 K Verwey transition in Fe3O4 was disappeared for the sample grown under high oxygen pressure.

• 한국주조공학회지
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• 제20권3호
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• pp.181-187
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• 2000

There are two types of vacuum die casting, one is known as the chill block method, and the other is the valve block method. Efficiency of the valve block method is better than the chill block method. However purchasing and maintaining cost of the former one is very high, the latter method is popular in many small and medium die casting shops. Simple evacuation system using chill vent was prepared to investigate the effect of the air pressure, hose length and chill vent type on the pressure change in die cavity in this study. The rate of evacuation was influenced by the evacuation method, chill vent condition and hose length. Evacuation time became longer and vacuum level lower when evacuating cavity via chill vent. It took a longer time to evacuate the cavity when a longer hose was used. Vacuum level in the cavity also decreased with increase in hose length.

• 한국진공학회지
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• 제9권1호
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• 한국산업융합학회 논문집
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• 제21권1호
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• pp.1-8
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• 2018

The purpose of this study is to develop a high-strength, high-toughness, thin-walled aluminum shock absorber housing product by applying a high vacuum die casting method to improve internal gas defect and formability. The analysis program dedicated for the casting was used because it was too costly and time-consuming to adopt the gating system design. The final casting plan was designed based on the flow pattern of the material filled into the mold and the result of air pressure and air pocket after the material was completely filled in the mold. Gaty shape was designed as a split type. The runner was designed to have the same shape as the initial inlet curve of the cavity, and the flow of the molten metal was prevented from turbulent flow. The most favorable results were obtained when the injection speed was $V_2=4.0m/s$. Defects on pores were reduced by applying high vacuum level inside the mold.

• 전기학회논문지P
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• 제59권3호
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• pp.311-316
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• 2010

According to increase of combined cycle power generation, the manufacturing market of gas turbine generator has become more competitive, so there is high pressure on the manufacturer to reduce generator price. Global VPI(vacuum pressure impregnation) method is effective to save the production cost and time for manufacturing stator windings, but it has an abrasion problem by vibration between stator windings and slots. This paper presents the insulation breakdown case, which is for VPI type generator during high voltage insulation tests, and also shows the cause analysis, repair works as well as reliability test. the purpose of this paper is to understand the insulation properties of VPI type generator and to know prevention of insulation weakness.