• 제목/요약/키워드: High pure gas

검색결과 260건 처리시간 0.026초

High Quality Nickel Atomic Layer Deposition for Nanoscale Contact Applications

  • Kim, Woo-Hee;Lee, Han-Bo-Ram;Heo, Kwang;Hong, Seung-Hun;Kim, Hyung-Jun
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.22.2-22.2
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    • 2009
  • Currently, metal silicides become increasingly more essential part as a contact material in complimentary metal-oxide-semiconductor (CMOS). Among various silicides, NiSi has several advantages such as low resistivity against narrow line width and low Si consumption. Generally, metal silicides are formed through physical vapor deposition (PVD) of metal film, followed by annealing. Nanoscale devices require formation of contact in the inside of deep contact holes, especially for memory device. However, PVD may suffer from poor conformality in deep contact holes. Therefore, Atomic layer deposition (ALD) can be a promising method since it can produce thin films with excellent conformality and atomic scale thickness controllability through the self-saturated surface reaction. In this study, Ni thin films were deposited by thermal ALD using bis(dimethylamino-2-methyl-2-butoxo)nickel [Ni(dmamb)2] as a precursor and NH3 gas as a reactant. The Ni ALD produced pure metallic Ni films with low resistivity of 25 $\mu{\Omega}cm$. In addition, it showed the excellent conformality in nanoscale contact holes as well as on Si nanowires. Meanwhile, the Ni ALD was applied to area-selective ALD using octadecyltrichlorosilane (OTS) self-assembled monolayer as a blocking layer. Due to the differences of the nucleation on OTS modified surfaces toward ALD reaction, ALD Ni films were selectively deposited on un-coated OTS region, producing 3 ${\mu}m$-width Ni line patterns without expensive patterning process.

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CP-Ti 분말로부터 스파크 플라즈마 소결한 타이타늄의 미세구조와 기계적 성질에 미치는 가압력의 영향 (Effect of Applied Pressure on Microstructure and Mechanical Properties for Spark Plasma Sintered Titanium from CP-Ti Powders)

  • 조경식;송인범;김재;오명훈;홍재근;박노광
    • 대한금속재료학회지
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    • 제49권9호
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    • pp.678-685
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    • 2011
  • The aim of this study was to determine the effect of applied pressure and sintering temperature on the microstructure and mechanical properties for spark plasma sintering (SPS) from commercial pure titanium (CP-Ti) powders. Spark plasma sintering is a relatively new sintering technique in powder metallurgy which is capable of sintering metal and ceramic powers quickly to full density at a fairly low temperature due to its unique features. SPS of -200 mesh or -400 mesh CP-Ti powders was carried out in an $Ar+H_2$ mixed gas flowing atmosphere between $650^{\circ}C$ and $750^{\circ}C$ under 10 to 80 MPa pressure. When SPS was carried out at relatively low temperatures ($650^{\circ}C$ to $750^{\circ}C$), the high (>60 MPa) pressure had a marked effect on densification and grain growth suppression. The full density of titanium was achieved at temperatures and pressures above $700^{\circ}C$ and 60 MPa by spark plasma sintering. The crystalline phase and microstructure of titanium sintered up to $700^{\circ}C$ consisted of ${\alpha}$-Ti and equiaxed grains. Vickers hardness ranging from 293 to 362 Hv and strength ranging from 304 to 410 MPa were achieved for spark plasma sintered titanium.

유기질토에 대한 생분해처리 효과에 관한 연구 (A Study on the Effects of Biodegradation for Organic Soils)

  • 송영우;박준범;김형석
    • 한국지반공학회지:지반
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    • 제14권4호
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    • pp.151-162
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    • 1998
  • 유기질 지반은 압축성과 투수성이 매우 커서 구조물을 시공하는 데 많은 문제를 발생시켜 토지의 효율적인 이용을 어렵게 한다. 이러한 지반에 특별한 공법을 적용하여 유기물의 함량을 감소시킬 수 있다면, 지반의 공학적 성질을 어느 정도 개선할 수 있을 것이다. 본 연구에서는 유기질 지반내 유기물 함량을 감소시켜 시공후 침하문제를 해결하기 위해 호기성 생분해처리법(aerobic biodegradation)을 이용하여 지반내 유기물의 함량을 감소시키는 방안에 대해 연구하였다. 생분해처리 효과를 높이기 위해 고령토에 톱밥을 심어 조제한 모형 유기질 지반에 산소를 공급하고, 시간 에 따른 용존산소량, 유기물 함량의 변화를 관찰하였다. 산소원으로는 과산화수소 수용액과 산소가 스를 사용하였다. 본 실험을 위해 새로 제작한 직경 130 mm, 높이 300 mm 의 압축시험기로 100 일 동안 모형압축시험을 하였다. 시험결과 산소가스와 영양분을 공급한 시료는 그렇지 않은 경우에 비해 압축량이 30% 정도 더 크게 나타났다. 영양분으로는 $K_2aHPO_4,\; 보다 \;NaNO_2$>, 를 첨가하는 것이 더욱 효과적이었다. 또한 시료에 아지드 나트릅을 사용하여 미생물의 작용을 확인하였다.

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사용후핵연료 연소도 측정을 위한 이온 챔버 제작 (Fabrication of Ionization Chamber to Measure the Burnup of Spent Fuel)

  • 박세환;엄성호;신희성;임혜인;하장호;김한수
    • Journal of Radiation Protection and Research
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    • 제35권1호
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    • pp.21-25
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    • 2010
  • 사용후핵연료의 저장 및 이송시 핵임계 안전성 확보를 위하여 연소도를 정확히 결정할 필요가 있다. 특히, 정확한 연소도 결정을 위해서 핵연료 축방향 연소도 분포를 정확하게 측정할 필요가 있다. 본 연구에서는 사용후핵연료 제어봉 안내관에 삽입하여 축방향 감마선 선량 분포를 측정하기 위하여 이온 챔버를 개발하였다. 이온 챔버는 유도부, 가스주입부, 센서부 세 부분으로 구성되었다. 센서부 전극은 cathode와 anode 두 전극만을 가지도록 설계되었으며, 제어봉 안내관에 원할한 삽입을 위하여 guard 전극은 사용하지 않았다. 이온 챔버 내부에 불활성 기체를 충진하고 누설 전류와 포화곡선을 측정하였다. 한국원자력 연구원의 저준위 조사 시설을 이용하여 선량 변화에 따른 이온 챔버 전류 변화를 측정하여 5% 이내의 선형성을 확보하였다. 제작된 이온 챔버는 추가적인 성능 평가를 통하여 한국원자력연구원내 조사후 시험시설에 있는 사용후핵연료 집합체의 연소도분포 측정에 적용될 예정이다.

Assessment of absorption ability of air pollutant on forest in Gongju-city

  • Eom, Ji-Young;Jeong, Seok-Hee;Lee, Jae-Seok
    • Journal of Ecology and Environment
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    • 제41권12호
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    • pp.328-335
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    • 2017
  • Background: Some researchers have attempted to evaluate the ecological function of various additional services, away from the main point of view on the timber production of Korean forests. However, basic data, evaluation models, or studies on the absorption of air pollutants related to major plant communities in Korea are very rare. Therefore, we evaluated the functional value of the forest ecosystem in Gongju-city. Plantation manual for air purification, supplied from the Ministry of Environment in Japan, was referred to process and method for assessment of air pollutant absorption. Results: Gross primary production was calculated about average 18.2 t/ha/year. It was a relatively low value in forests mixed with deciduous broad and evergreen coniferous compared to pure coniferous forest. Net primary production was the highest value in deciduous coniferous and was the lowest value in mixed forest with deciduous broad and evergreen broad. And the mean sequestration amount of each air pollutant per unit area per year assessed from gross primary production and concentration of gas was the highest with 75.81 kg/ha/year in $O_3$ and was 16.87 and 6.04 kg/ha/year in $NO_2$ and $SO_2$, respectively. In addition, total amounts of $CO_2$ absorption and $O_2$ production were 716,045 t $CO_2$/year and 520,760 t $O_2$/year in all forest vegetation in Gongju-city. Conclusions: In this study, we evaluated the absorption ability of air pollutant in 2014 on forest in Gongju-city area. Gongju-city has the broad mountain area about 70.3%, and area of deciduous broad leaves forest was established the broadest with 47.4% of genus Quercus. Pg was calculated about average 18.2 t/ha/year. The mean sequestration amount of each air pollutant per unit area per year assessed from Pg and $C_{gas}$ was the highest with 75.81 kg/ha/year in $O_3$ and were 16.87 and 6.04 kg/ha/year in $NO_2$ and $SO_2$, respectively. Absorption rates of $O_3$, $NO_2$, and $SO_2$ were the highest in evergreen coniferous forest about $14.87kgO_3/ha/year$, $3.30kgNO_2/ha/year$, $1.18kgSO_2/ha/year$, and the lowest were $5.95kgO_3/ha/year$, $1.32kgNO_2/ha/year$, and $0.47kgSO_2/ha/year$ in deciduous broad forest. In conclusion, it was evaluated that Japanese model is suitable for estimating air pollutants in Japan to Korean vegetation. However, in Korea, there is a very limited basic data needed to assess the ability of forests to absorption of air pollutants. In this study, the accuracy of a calculated value is not high because the basic data of trees with similar life form are used in evaluation.

수정진동자를 이용한 프탈로시아닌 LB박막의 $NO_2$ 감지 특성 (The Application of Octa-Substituted Metallophthalocyanine Langmuir-Blodgett films for $NO_2$ Measurement)

  • 권현정;이영진;장용근;김종득
    • 센서학회지
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    • 제7권4호
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    • pp.254-262
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    • 1998
  • 수정진동자(QCM)위에 네 종류의 프탈로시아닌($MPc(OEH)_8$, M ${\equiv}$ Cu, Co, Sn, $H_2$) LB박막을 여러 층 적층시킨 후 순수한 질소 분위기 하에서 $NO_2$에 노출시켜 그 농도를 정량화 하였다. 사용한 네 종류의 프탈로시아닌 중에서 중심위치에 금속 이온이 자리하지 않은 $H_2Pc(OEH)_8$ 감응막이 $NO_2$에 대하여 가장 민감한 것으로 나타났다. 그러나 이 박막은 $NO_2$에 노출된 후 질소로 퍼지해도 처음의 주파수를 회복하지 못하는 비가역적인 흡착 양상을 보였다. NMR과 FTIR 스펙트럼 조사 결과 비가역적인 흡착은 빙고링과 프탈로시아닌 곁가지의 결합부위인 ether 그룹에서 일어나는 것으로 판명되었다. 따라서 비가역적으로 흡착이 일어나는 부분을 미리 고농도에서 포화시키는 방법으로 박막을 전처리 한 후 반복실험에 사용하였다. $CuPc(OEH)_8$박막 사용 시 수십 ppm 수준부터 4 ppm의 $NO_2$ 농도까지 정량화가 가능하였고 $H_2Pc(OEH)_8$ 박막의 경우에는 수 ppm부터 35 ppb까지의 낮은 농도까지 정량화가 가능하였다. 또한, 실제 대기 조건을 모사하기 위하여 운반기체를 순수한 질소 대신 공기로 교체하여 $H_2Pc(OEH)_8$ 감응막의 성능을 실험한 결과 산소의 영향으로 센싱 가능 한계가 수백 ppb 수준으로 증가하였다. 습기가 운반기체에 포함된 경우 감지 성능에 매우 큰 영향을 미쳤다.

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Modern Paper Quality Control

  • Olavi Komppa
    • 한국펄프종이공학회:학술대회논문집
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    • 한국펄프종이공학회 2000년도 제26회 펄프종이기술 국제세미나
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    • pp.16-23
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    • 2000
  • The increasing functional needs of top-quality printing papers and packaging paperboards, and especially the rapid developments in electronic printing processes and various computer printers during past few years, set new targets and requirements for modern paper quality. Most of these paper grades of today have relatively high filler content, are moderately or heavily calendered , and have many coating layers for the best appearance and performance. In practice, this means that many of the traditional quality assurance methods, mostly designed to measure papers made of pure. native pulp only, can not reliably (or at all) be used to analyze or rank the quality of modern papers. Hence, introduction of new measurement techniques is necessary to assure and further develop the paper quality today and in the future. Paper formation , i.e. small scale (millimeter scale) variation of basis weight, is the most important quality parameter of paper-making due to its influence on practically all the other quality properties of paper. The ideal paper would be completely uniform so that the basis weight of each small point (area) measured would be the same. In practice, of course, this is not possible because there always exists relatively large local variations in paper. However, these small scale basis weight variations are the major reason for many other quality problems, including calender blacking uneven coating result, uneven printing result, etc. The traditionally used visual inspection or optical measurement of the paper does not give us a reliable understanding of the material variations in the paper because in modern paper making process the optical behavior of paper is strongly affected by using e.g. fillers, dye or coating colors. Futhermore, the opacity (optical density) of the paper is changed at different process stages like wet pressing and calendering. The greatest advantage of using beta transmission method to measure paper formation is that it can be very reliably calibrated to measure true basis weight variation of all kinds of paper and board, independently on sample basis weight or paper grade. This gives us the possibility to measure, compare and judge papers made of different raw materials, different color, or even to measure heavily calendered, coated or printed papers. Scientific research of paper physics has shown that the orientation of the top layer (paper surface) fibers of the sheet paly the key role in paper curling and cockling , causing the typical practical problems (paper jam) with modern fax and copy machines, electronic printing , etc. On the other hand, the fiber orientation at the surface and middle layer of the sheet controls the bending stiffness of paperboard . Therefore, a reliable measurement of paper surface fiber orientation gives us a magnificent tool to investigate and predict paper curling and coclking tendency, and provides the necessary information to finetune, the manufacturing process for optimum quality. many papers, especially heavily calendered and coated grades, do resist liquid and gas penetration very much, bing beyond the measurement range of the traditional instruments or resulting invonveniently long measuring time per sample . The increased surface hardness and use of filler minerals and mechanical pulp make a reliable, nonleaking sample contact to the measurement head a challenge of its own. Paper surface coating causes, as expected, a layer which has completely different permeability characteristics compared to the other layer of the sheet. The latest developments in sensor technologies have made it possible to reliably measure gas flow in well controlled conditions, allowing us to investigate the gas penetration of open structures, such as cigarette paper, tissue or sack paper, and in the low permeability range analyze even fully greaseproof papers, silicon papers, heavily coated papers and boards or even detect defects in barrier coatings ! Even nitrogen or helium may be used as the gas, giving us completely new possibilities to rank the products or to find correlation to critical process or converting parameters. All the modern paper machines include many on-line measuring instruments which are used to give the necessary information for automatic process control systems. hence, the reliability of this information obtained from different sensors is vital for good optimizing and process stability. If any of these on-line sensors do not operate perfectly ass planned (having even small measurement error or malfunction ), the process control will set the machine to operate away from the optimum , resulting loss of profit or eventual problems in quality or runnability. To assure optimum operation of the paper machines, a novel quality assurance policy for the on-line measurements has been developed, including control procedures utilizing traceable, accredited standards for the best reliability and performance.

녹색 발광의 $CaZrO_3:\;HO_{3+}$ 축광성 형광체의 합성 및 발광 특성 (Synthesis and luminescent properties of a new green $CaZrO_3:\;HO_{3+}$ long persistent phosphors)

  • 박병석;최종건
    • 한국결정성장학회지
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    • 제18권3호
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    • pp.109-114
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    • 2008
  • 새로운 녹색의 $CaZrO_3$ : $HO_{3+}$ 축광성 형광체를 고온의 약한 환원 분위기에서 전통적인 고상 반응법으로 합성하였다. $CaZrO_3$ : $HO_{3+}$ 축광성 형광체에 첨가 된 융제 $H_3BO_3$의 역할과 부활제의 적정농도에 대하여 연구하였으며, 합성한 축광성 형광체의 형광 분석 및 광 발광 분석을 행하였다. 고온의 질소 분위기에서 합성한 $CaZrO_3$ : $HO_{3+}$ 축광성 형광체는 546nm의 발광 피크가 나타남을 확인 하였으며, 장잔광 스펙트럼 또한 폭이 좁은 546 nm의 발광 피크가 나타남에 따라 순수한 녹색의 발광색을 띄고 있음을 확인하였다 녹색의 $CaZrO_3$ : $HO_{3+}$ 축광성 형광체의 발광 지속시간은 254 nm UV lamp로 여기 시킨 후 어두운 곳에서 5시간 이상 발광이 유지되었다. 발광 피크는 $HO_{3+}$ 이온의 $^5F_4$, $^5S_2{\to}^5I_3$ 전이에 의한 것이며, 잔광 특성은 $CaZrO_3$ 격자 내에 trap center가 생성됨 의하여 발생되는 것으로 판단된다.

DIAGNOSTICS OF PLASMA INDUCED IN Nd:YAG LASER WELDING OF ALUMINUM ALLOY

  • Kim, Jong-Do;Lee, Myeong-Hoon;Kim, Young-Sik;Seiji Katayama;Akira Matsunawa
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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    • pp.612-619
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    • 2002
  • The dynamic behavior of Al-Mg alloys plasma was very unstable and this instability was closely related to the unstable motion of keyhole during laser irradiation. The keyhole fluctuated both in size and shape and its fluctuation period was about 440 ${\mu}{\textrm}{m}$. This instability has been estimated to be caused by the evaporation phenomena of metals with different boiling point and latent heats of vaporization. Therefore, the authors have conducted the spectroscopic diagnostics of plasma induced in the pulsed YAG laser welding of Al-Mg alloys in air and argon atmospheres. In the air environment, the identified spectra were atomic lines of Al, Mg, Cr, Mn, Cu, Fe and Zn, and singly ionized Mg line, as well as strong molecular spectrum of AlO, MgO and AIH. It was confirmed that the resonant lines of Al and Mg were strongly self-absorbed, in particular in the vicinity of pool surface. The self-absorption of atomic Mg line was more eminent in alloys containing higher Mg. These facts showed that the laser-induced plasma was relatively a low temperature and high density metallic vapor. The intensities of molecular spectra of AlO and MgO were different each other depending on the power density of laser beam. Under the low power density irradiation condition, the MgO band spectra were predominant in intensity, while the AlO spectra became much stronger in higher power density. In argon atmosphere the band spectra of MgO and AlO completely vanished, but AlH molecular spectra was detected clearly. The hydrogen source was presumably the hydrogen solved in the base Metal, absorbed water on the surface oxide layer or H$_2$ and $H_2O$ in the shielding gas. The temporal change in spectral line intensities was quite similar to the fluctuation of keyhole. The time average plasma temperature at 1 mm high above the surface of A5083 alloy was determined by the Boltzmann plot method of atomic Cr lines of different excitation energy. The obtained electron temperature was 3, 280$\pm$150 K which was about 500 K higher than the boiling point of pure aluminum. The electron number density was determined by measuring the relative intensities of the spectra1lines of atomic and singly ionized Magnesium, and the obtained value was 1.85 x 1019 1/㎥.

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발효방법 및 대두품종을 달리한 청국장의 향기성분 (Volatile Compounds of Chonggugjang Prepared by Different Fermentation Methods and Soybean Cultivars)

  • 유선미;김행란;김진숙;장창문;최정숙
    • Applied Biological Chemistry
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    • 제42권2호
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    • pp.111-115
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    • 1999
  • 발효방법에 따른 청국장의 휘발성 성분을 비교 조사하기 위해 증자대두에 Bacillus subtilis를 접종시킨 시험구(I), 1차 종균으로서 Lactobacilli(ll) 혹은 Aspergillus oryzae(III)를 접종시켜 소정시간 발효후 Bacillus subtilis를 추가 접종시킨 시험구, 그리고 볏짚을 접종원으로 한 시험구(IV)의 청국장제품을 각각 연속증류추출장치를 사용하여 휘발성 성분을 추출 농축하고 GC와 GC/MS를 이용하여 휘발성 성분을 분석 동정하였다. 그 결과 Bacillus subtilis 단용 발효구(I)와 볏짚을 접종원으로 사용한 시험구(IV)에서 각각 35종과 46종의 휘발성 성분이 검출되었고 Lactobacilli처리구(II)에서는 29종의 휘발성 성분이 검출되었는데 시험구(I), (IV)에 비해 향미성분으로 알려진 2,3,5-trimethyl pyrazine, 2,5-dimethyl pyrazine 등의 함량이 각각 2.2배, 1.5배 증가되었다. 또한 Asp. oryzae처리구(III)에서는 총 36종의 휘발성 성분이 분리 동정되었고 이들 성분 중에서 hexadecanoic acid, 2-methyl pyrazine성분이 많이 검출된 반면 청국장의 불쾌취로 알려진 butyric valeric acid는 검출되지 않았다. 대두 품종별로 제조한 청국장의 휘발성 성분을 비교 검토한 결과 신팔달콩을 원료대두로 사용한 시험구의 청국장이 향미성분은 증가한 반면 불쾌취 성분은 감소되었다.

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