• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.236-236
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• 2008

(Bi,La)$Ti_3O_{12}$(BLT) thin film is one of the most attractive materials for ferroelectric random access memory (FRAM) applications due to its some excellent properties such as high fatigue endurance, low processing temperature, and large remanent polarization [1-2]. The authors firstly investigated and reported the damascene process of chemical mechanical polishing (CMP) for BLT thin film capacitor on behalf of plasma etching process for fabrication of FRAM [3]. CMP process could prepare the BLT capacitors with the superior process efficiency to the plasma etching process without the well-known problems such as plasma damages and sloped sidewall, which was enough to apply to the fabrication of FRAM [2]. BLT-CMP characteristics showed the typical oxide-CMP characteristics which were related in both pressure and velocity according to Preston's equation and Hernandez's power law [2-4]. Good surface roughness was also obtained for the densification of multilevel memory structure by CMP process [3]. The well prepared BLT capacitors fabricated by CMP process should have the sufficient ferroelectric properties for FRAM; therefore, in this study the electrical properties of the BLT capacitor fabricated by CMP process were analyzed with the process parameters. Especially, the effects of CMP pressure, which had mainly affected the removal rate of BLT thin films [2], on the electrical properties were investigated. In order to check the influences of the pressure in eMP process on the ferroelectric properties of BLT thin films, the electrical test of the BLT capacitors was performed. The polarization-voltage (P-V) characteristics show a decreased the remanent polarization (Pr) value when CMP process was performed with the high pressure. The shape of the hysteresis loop is close to typical loop of BLT thin films in case of the specimen after CMP process with the pressures of 4.9 kPa; however, the shape of the hysteresis loop is not saturated due to high leakage current caused by structural and/or chemical damages in case of the specimen after CMP process with the pressures of 29.4 kPa. The leakage current density obtained with positive bias is one order lower than that with negative bias in case of 29.4 kPa, which was one or two order higher than in case of 4.9 kPa. The high pressure condition was not suitable for the damascene process of BLT thin films due to the defects in electrical properties although the better efficiency of process. by higher removal rate of BLT thin films was obtained with the high pressure of 29.4 kPa in the previous study [2].

• Journal of Sensor Science and Technology
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• v.27 no.3
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• pp.186-191
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• 2018

Smart textile industries have been precipitously developed and extended to electronic textiles and wearable devices in recent years. In particular, owing to an increasingly aging society, the elderly healthcare field has been highlighted in the smart device industries, and pressure sensors can be utilized in various elderly healthcare products such as flooring, mattress, and vital-sign measuring devices. Furthermore, elderly healthcare products need to be more lightweight and flexible. To fulfill those needs, textile-based pressure sensors is considered to be an attractive solution. In this research, to apply a textile to the second layer using a pressure sensing device, a novel type of conductive textile was fabricated using vapor phase polymerization of poly(3,4-ethylenedioxythiophene) (PEDOT). Vapor phase polymerization is suitable for preparing the conductive textile because the reaction can be controlled simply under various conditions and does not need high-temperature processing. The morphology of the obtained PEDOT-conductive textile was observed through the Field Emission Scanning Electron Microscope (FESEM). Moreover, the resistance was measured using an ohmmeter and was confirmed to be adjustable to various resistance ranges depending on the concentration of the oxidant solution and polymerization conditions. A 3-layer 81-point multi-pressure sensor was fabricated using the PEDOT-conductive textile prepared herein. A 3D-viewer program was developed to evaluate the sensitivity and multi-pressure recognition of the textile-based multi-pressure sensor. Finally, we confirmed the possibility that PEDOT-conductive textiles could be utilized by pressure sensors.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.59 no.1
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• pp.58-63
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• 2010

In this paper, we proposed a wearable respiration measurement system with textile capacitive pressure sensor. Belt typed textile capacitive pressure sensor approach of respiration measurement, from which respiration signatures and rates can be derived in real-time for long-term monitoring, are presented. Belt typed textile capacitive pressure sensor has been developed for this measurement system. the distance change of two plates by the pressure of motion has been used for the respiration measurement in chest area. Respiration rates measured with the textile capacitive pressure sensor was compared with standard techniques on 8 human subjects. Accurate measurement of respiration rate with developed sensor system is shown. The data from the method comparison study is used to confirm theoretical estimates of change in capacitance by the distance change. The current version of respiratory rate detection system using textile capacitive pressure sensor can successfully measure respiration rate. It showed upper limit agreement of $3.7997{\times}10^{-7}$ RPM, and lower limit of agreement of $-3.8428{\times}10^{-7}$ RPM in Bland-Altman plot. From all subject, high correlation were shown(p<0.0001). The proposed measurement method could be used to monitor unconscious persons, avoiding the need to apply electrodes to the directly skin or other sensors in the correct position and to wire the subject to the monitor. Monitoring respiration using textile capacitive pressure sensor offers a promising possibility of convenient measurement of respiration rates. Especially, this technology offers a potentially inexpensive implementation that could extend applications to consumer home-healthcare and mobile-healthcare products. Further advances in the sensor design, system design and signal processing can increase the range and quality of the rate-finding, broadening the potential application areas of this technology.

• Transactions of Materials Processing
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• v.26 no.5
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• pp.314-322
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• 2017

In the high-speed forming analysis, dynamic material properties considering a high strain rate are required. The split Hopkinson pressure bar (SHPB) experiment was performed for measuring dynamic material properties under high strain rate. The pulse shaping method was used to improve the accuracy of the SHPB experiment. A pulse shaper attached to the front of the incident bar was used for specimen dynamic stress equilibrium through stress wave control. Numerical analysis and SHPB test were performed to verify whether the pulse shaper affects the dynamic stress equilibrium in copper and Al6061 specimens. The results of SHPB test and numerical analysis show that the pulse shaper contributes to the dynamic stress equilibrium. Based on the improved stress equilibrium using a pulse shaper, the flow stress curves for copper and Al6061 materials were obtained at strain rates of 1344.4/sec and 1291.6/sec, respectively.

• Fibers and Polymers
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• v.4 no.3
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• pp.135-144
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• 2003

Permeability of the preform is one of key factors in design of RTM (Resin Transfer Molding) mold, determination of processing conditions, and modeling of flow in the mold. According to previous studies, permeability measured in the unsaturated fiber mats are higher than that in the saturated fiber mats by about 20% because of the capillary pressure. In this study, permeabilities of several fiber preforms are measured for both saturated and unsaturated flows. A saturated experiment of radial flow has been adopted to measure the permeability of anisotropic fiber preforms with high fiber content, i.e., circular braided preforms. In this method, four pressure transducers are used to measure the pressure distribution. Permeabilities in different directions are determined and the experimental results show a good agreement with the theory. Since permeability is affected by the capillary effect, permeability should be measured in the unsaturated condition for the textile composites to be manufactured under lower pressure as in the Vacuum Assisted Resin Transfer Molding (VARTM).

• Korean Journal of Metals and Materials
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• v.48 no.4
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• pp.315-319
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• 2010

In this study, the hydrogen reduction behavior of ball-milled NiO nanopowder was investigated depending on the partial pressure of water vapor. The hydrogen reduction behavior was analyzed by thermogravimetry and hygrometry under heating to 873 K in hydrogen. In order to change the partial pressure of the water vapor, the dew point of hydrogen was controlled in the range of 248 K~293 K by passing high-purity hydrogen through a saturator that contained water. Interestingly, with the increase in the dew point of the hydrogen atmosphere, the first step of the hydrogen reduction process decreased and the second step gradually increased. After the first step, a pore volume analysis revealed that the pore size distribution in the condition with a higher water vapor pressure shifted to a larger size, whereas the opposite appearedat a lower pressure. Thus, it was found that the decrease in the pore volume during the chemical reaction controlled process at a dew point of 248 K caused a reduction in retardation in the diffusion controlled process.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.11
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• pp.1193-1201
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• 2013

Improved far field type(improved type) megasonic applicable to the cleaning equipment of single wafer processing type has been developed. In this study, to improve the uniformity of acoustic pressure distribution(APD), we utilize far field with relatively uniform APD, piezoelectric ceramic with a triangle hole in its center to prevent standing wave resulted from radial mode, and reflected wave from the wall of waveguide. On the basis of these methods, two analysis models of improved type were designed to which piezoelectric ceramic of different shape of electrode attached, and APD were analyzed by means of finite element method, and then one of them was selected by analysis results, finally, the selected model was fabricated. Test results show that the fabricated is better in the uniformity of APD than the imported and the conventional, also the fabricated shows high particle removal efficiency of 92.3% using DI water alone as a cleaning solution.

• Korean Journal of Materials Research
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• v.12 no.7
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• pp.580-586
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• 2002

The effect of processing and designing variables such as pouring temperature(1400 or $1500^{\circ}C$), inoculation and risering design(T and H type) on the formation of defects such as external depression, primary and secondary shrinkage cavities in GC150 gray cast iron was investigated. In T type risering design, external depression or primary shrinkage cavity due to liquid contraction was formed in all of the eight cases. Regardless of its modulus value, the riser could not function properly in T type risering design because directional solidification was not promoted toward the riser. On the other hand, the four cases of H type risering design in which thermal sleeves were set onto the risers produced defect-free castings. In both types of the risering designs, secondary shrinkage cavity caused by solidification contraction was not observed in the casting because of the expansion pressure due to graphite precipitation and the application of rigid pep-set mold. The degree of external depression or primary shrinkage cavity was reduced with lowered pouring temperature. The effect of inoculation was diminished because of the high carbon equivalent of GC 150 gray cast iron.

• Transactions of Materials Processing
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• v.28 no.1
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• pp.15-20
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• 2019

The superplastic forming/diffusion bonding process has been developed to fabricate a core frame structure with joint nodes out of tubes, for the development of a titanium high performance bicycle. The hydroforming process has been applied for bulging of a tube in the superplastic condition before, and during the diffusion bonding process. In this experiment, a commercial Ti-3Al-2.5V tube was selected as raw material for the study. The forming experiment has been performed using a servo-hydraulic press with a capacity of 200 ton. Next, nitrogen gas was used to acquire necessary pressure for the bulging and bonding of the tubes to fabricate the joint nodes. The pertinent processing temperature was $870^{\circ}C$ for the superplastic hydroforming/diffusion bonding (SHF/DB) process, using the Ti-3Al-2.5V tube. The bonding quality and the progress of bulging and diffusion bonding have been observed by the investigation of the joining interfaces at the cross section of the joint structure. The control of the nitrogen pressure throughout the SHF/DB process, was an important factor to avoid any significant defects in the joint structure. The whole progress stage of the diffusion bonding could be observed at a joint interface. A core structure with 5 joint nodes to manufacture a titanium bicycle could be obtained in a SHF/DB process.

• Transactions of Materials Processing
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• v.33 no.3
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• pp.193-199
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• 2024

The friction welding characteristics of stainless steels, mainly used in energy and chemical plant industries due to its excellent corrosion resistance and high strength, was evaluated in this study. Friction welding was introduced and conducted at a rotation speed of 2,000 RPM, friction pressure of 30 MPa, burn-off length of 5 mm and upset pressure of 110 ~ 200 MPa on rod typed specimens. The grain boundary characteristics distributions such a grain size, shape, misorientation angle and kernel average misorientation of the welds were clarified by electron backscattering diffraction method. The application of friction welding on SUS304 alloy resulted in a significant refinement of the grain size in the weld zone (5.11 mm) compared to that of the base material (48.09 mm). The mechanical properties of the welds, on the other hand, appeared to be relatively low or similar to those of the base material, which were mainly caused by dislocation density in the initial material and grain refinement in the welds.