• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1995년도 추계학술대회 논문집
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• pp.9-13
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• 1995

In this paper, Zinc Oxide films, with a high degree of c-axis orientation, have been grown on glass substrates by a rf magnetron sputtering. The maximum crystal orientation was found to occur with substrate temperature 150$^{\circ}C$, input power 190W, oxygen rate 50%, target-substrate distance 55mm. It is proposed to achieve high-resistivity ZnO films by increasing the annealing temperature. The piezoelectric layers, preferred oriented with (002) perpendicular to the layer with 4.9$^{\circ}$, could be obtained by the annealing temperature 300$^{\circ}C$ in oxygen atmosphere. It is indicated that the relative permittivity is range from 8.9 to 9.8 in the frequency ranging from 10KHz to 5MHz.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.14-20
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• 2023

The electrostatic chuck is a technology that uses electroadhesion to attach objects and is widely used in semiconductor and display processes. This research conducted Maxwell by varying parameters to examine the distribution and variations of chucking force in a bipolar-type ESC. The parameters that were changed include the material properties of the dielectric layer and attachment substrate, applied voltage to the electrode, and the gap and width between the electrodes. The analysis results showed that as the relative permittivity of the dielectric layer and substrate increased, the chucking force also increased, with the relative permittivity of the substrate having a greater impact on the chucking force. And increasing the applied voltage led to an increase in both the chucking force and its rate of change. Lastly, as the gap between the electrodes increased, the chucking force rapidly decreased until a certain distance, after which the decrease became less significant. On the contrary, increasing the electrode width resulted in a rapid increase in the chucking force until a certain width, beyond which the increase became less pronounced, eventually converging to a chucking force of 1700 Pa. This paper is expected to have high potential for the development and research of ESC for OLED deposition.

• Journal of Electrical Engineering and Technology
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• 제13권5호
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• pp.2004-2010
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• 2018

We propose a small active antenna to receive Global Navigation Satellite System (GNSS) signals, i.e., Global Positioning System (GPS) L1 (1,575MHz) and Russian Global Navigation Satellite System (GLONASS) L1 (1,600 MHz) signals. A two-stage low-noise amplifier (LNA) with more than 27 dB gain is implemented in the bottom layer of a three-layer antenna package. In addition, a hybrid coupler is used to combine signals from pair of proximately coupled orthogonal feeds with $90^{\circ}$ phase difference to achieve the circular polarization (CP) characteristic. Three layers of high permittivity (${\varepsilon}_r=10$) substrates are stacked and effectively integrated to have a small dimension of $64mm{\times}64mm{\times}7.42mm$ (including both circuit and antenna). The reflection coefficient of the fabricated antenna at the target frequency is below -10 dB, the measured antenna gain is above 26 dBic and the measured noise figure is less than 1.4 dB.

• Transactions on Electrical and Electronic Materials
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• 제16권3호
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• pp.142-145
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• 2015

In this work, open stubs were fabricated on a polyether sulfone (PES) substrate, and their basic radio frequency (RF) characteristics were investigated for application to RF matching components of a flexible monolithic microwave integrated circuit (MMIC). According to the results, an open stub employing coplanar waveguide (OSCPW) on PES exhibited much lower loss than that on silicon substrate. The OSCPW with a length of $500{\mu}m$ on PES showed capacitance values of 0.031 ~ 0.044 pF from 0.5 to 50 GHz. For application to a relatively high-value capacitive matching, an open stub employing a fishbone-type transmission line (OSFTTL) was fabricated on PES, and its characteristics were investigated. The OSFTTL showed much higher capacitance values than the OSCPW due to the high effective permittivity value. Specifically, the OSFTTL on PES showed capacitance values of 0.066 ~ 0.24 pF from 0.5 to 50 GHz, which are higher than those for the open stub on silicon substrate. The above results indicate that the OSCPW and OSFTTL on PES can be effectively used for application to low/high-value capacitive matching components on microwave and millimeter wave flexible MMIC. To the best of the authors' knowledge, this work is the first report of the investigation of RF capacitive matching components on PES substrate.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.290-294
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• 2001

In this study, ZnO is evaporated to be coated on n-type Si wafer substrate. Refractive coefficient of thin film that is evaporating TiO$_2$ onto ZnO increases linearly as thickness is getting thinner to have high value and high angle and it satisfies theoretical equation I(x)=Io exp (-$\alpha$x) theory that represents the strength of photon energy advancing through ZnO thin film. And dielectric constant of TiO$_2$ thin film evaporated onto ZnO is high and $\varepsilon$$_2$ is smaller than $\varepsilon$$_1$. The specimen TiO$_2$ thin film evaporated onto ZnO has much higher dielectric constant when photon energy is increased.

• 한국전자파학회논문지
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• 제12권4호
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• pp.513-520
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• 2001

본 논문에서는 세층 마이크로스트립 유전체 기판을 이용한 방향성 결합기를 제안하고, 설계방법을 제시하였다. 제안된 구조는 re-entrant mode 결합기의 구조를 수정하여. 결합이 이루어지는 두 전송선로의 위에 한 층의 매질을 추가시키고 그 위에 부동도체를 위치시킨 형태이다. 이러한 구조는 기 모드 정전용량의 증가로 인해 높은 결합도를 얻을 수 있고, 각 모드별 유효 유전율의 차이가 크지 않기 때문에 정재파비, 격리도, 위상차 등에서도 우수한 특성을 얻을 수 있다. 우, 기 모드 해석 방법을 통해 임피던스, 유효 유전율, 결합계수 등을 계산하여 결합기를 설계하였다. 시뮬레이션 및 측정결과 제안된 구조가 기존의 구조보다 2dB 정도 높은 결합도를 가지고, 정재파비, 격리도, 위상 특성 또한 우수함을 알 수 있었다.

• 한국전기전자재료학회논문지
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• 제15권6호
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• pp.529-534
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• 2002

Recently, As the higher frequency in clock of digital system being demanded and the density of circuits gets high for purpose of making light and minimizing system, the study for solution of digital signal distortion being interested. In this paper, the distortion of square pulse caused by dispersion as it propagates along a single microstrip line and crosstalk between lines on the Multi-Transmission Lines (MTL) is investigated. The dispersion and crosstalk of pulse signals is analyzed regarding to the structure of transmission line such as relative permittivity, substrate height, strip width of the microstrip line and pulse width of signal pulse.

• 한국정밀공학회지
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• 제24권11호
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• pp.108-115
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• 2007

We have designed a high transmission C-shaped aperture using finite differential time domain (FDTD) technique. The C-shaped aperture was fabricated in the aluminum thin film on a glass substrate using a focused ion beam (FIB) milling. Nano-size patterning was demonstrated with a vacuum contact device to keep tight contact between the Al mask and the photoresist. Using 405 nm laser, we recorded a 50 nm-size dot pattern on the photoresist with the aperture and analyzed the spot size dependent on the dose illuminated on the aperture.

• 한국항행학회논문지
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• 제6권2호
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• pp.113-118
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• 2002

본 논문에서는 휴대단말기 내장형 GPS(Global Positioning System) 안테나를 설계 제작하였다. 안테나를 소형화하는 방법으로 비유전율이 높은 유전체 기판(${\varepsilon}_r$=90)과 작은 접지면($13{\times}13$ mm)을 사용하였다. 또한 안테나의 수신이득 증대를 위하여 증폭회로가 포함된 능동형으로 구성했다. 제작된 안테나의 특성을 측정한 결과, 안테나의 최대이득은 약 12 dBi, 축비는 3 dB 이하이며 증폭회로의 소비전류는 4 mA 이하이다.

• 한국콘텐츠학회논문지
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• 제6권2호
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• pp.99-104
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• 2006

이 논문은 GPS 안테나로 사용될 수 있는 Offset Slotted 직사각형 마이크로스트립 패치 안테나를 디자인하기 위한 기법을 제안하였다. 안테나 특성을 해석하기 위해 Multi-port connection 기법과 Desegmentation 기법을 사용하였고, 고유전율의($\varepsilon_{\gamma}$=10.2) 기판과 직사각형 슬롯을 이용하여 안테나의 사이즈를 줄일 수 있었다. 제작된 안테나의 치수는 $20\times30\times1.27$[mm]로 작은 사이즈이므로 GPS 안테나 또는 핸드폰에 사용될 수 있을 것이다.