• Title/Summary/Keyword: High density electron beam

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Development of Multimedia CRTs Using Low-Voltage-Drive Electron Guns

  • Soichiro, Okuda;Tetsuya, Shiroishi;Shuhei, Nakata;Katsumi, Oono;Fumiaki, Murakami;Hideya, Itoh
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.379-381
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    • 2002
  • Mitsubishi Electric Corporation has marketed a series of multimedia CRTs enabling bright picture windows in a high-resolution date display screen. The key components of the multimedia CRTs named Diamondtran $M^2$ are a high-gm (low drive-voltage) electron gun and an aperture grille mask. A high-gm electron gun has been developed by designing a beam forming region with high-gm configuration combining with a high current-density cathode. The development of next generation high-gm guns are also introduced

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DPSS UV laser projection ablation of 10μm-wide patterns in a buildup film using a dielectric mask (Dielectric 마스크 적용 UV 레이저 프로젝션 가공을 이용한 빌드업 필름 내 선폭 10μm급 패턴 가공 연구)

  • Sohn, Hyonkee;Park, Jong-Sig;Jeong, Su-Jeong;Shin, Dong-Sig;Choi, Jiyeon
    • Laser Solutions
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    • v.16 no.3
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    • pp.27-31
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    • 2013
  • To engrave high-density circuit-line patterns in IC substrates, we applied a projection ablation technique in which a dielectric ($ZrO_2/SiO_2$) mask, a DPSS UV laser instead of an excimer laser, a refractive beam shaping optics and a galvo scanner are used. The line/space dimension of line patterns of the dielectric mask is $10{\mu}m/10{\mu}m$. Using a ${\pi}$ -shaper and a square aperture, the Gaussian beam from the laser is shaped into a square flap-top beam; and a telecentric f-${\theta}$ lens focuses it to a $115{\mu}m{\times}105{\mu}m$ flat-top beam on the mask. The galvo scanner before the f-${\theta}$ lens moves the beam across the scan area of $40mm{\times}40mm$. An 1:1 projection lens was used. Experiments showed that the widths of the engraved patterns in a buildup film ranges from $8.1{\mu}m$ to $10.2{\mu}m$ and the depths from $8.8{\mu}m$ to $11.7{\mu}m$. Results indicates that it is required to increase the projection ratio to enhance profiles of the engraved patterns.

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Studies on Thermal Stability and Cure Behavior of Epoxy Resins using Electron-beam Curing Technique (전자선 경화를 이용한 에폭시 수지의 열안정성과 경화동력학에 관한 연구)

  • 박수진;허건영;이재락
    • Composites Research
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    • v.15 no.2
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    • pp.40-47
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    • 2002
  • The di-functional epoxy resins, i.e., diglycidylether of bisphenol A(DGEBA) and diglycidylethere of bisphenol F(DGEBF) were initiated by cationic catalyst, i.e., benzylquinoxalinium hexafluoroantimonate(BQH) using electron-beam(EB) technique. And the effect of structure of DGEBA and DGEBF on thermal stabilities and cure behaviors was investigated. According to the experimental results, the decomposed activation energy based on Horowitz-Metzger method was higher in the case of DGEBA, but intergral procedural decomposition temperature(IPDT) of DGEBA was lower than DGEBF. This could be interpreted in terms of high crosslink density resulted from hydroxyl bond of DGEBF backbone. It was confirmed in increasing the hydroxyl band at $7000\;cm^{-1}$ and $5235\;cm^{-1}$ using near-infrared spectroscopy(NIRS).

Effects of Electron Beam Treatment on the Characteristics of Pulping and Papermaking of Hemp Bast Fibers (전자빔 처리가 대마 인피섬유의 펄프화 및 초지 특성에 미치는 영향)

  • Bae, Paek-Hyun;Seo, Jae-Hwan;Jung, Jin-Ho;Lee, Jae-Jung;Paik, Ki-Hyun;Kim, Hyoung-Jin
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.44 no.4
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    • pp.51-61
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    • 2012
  • The new alkali pulping process combined with electron beam treatment was applied to utilize hemp bast tissues as a new valuable fibrous resource. Hemp bast tissues have some chemical properties with high lignin contents and holocellulose not to be defiberized by alkali pulping only, compared with the bast tissue of paper mulberry. To make up for the weakness of traditional alkali pulping process, electron beams were directly irradiated into the swelled bast tissue of hemp in NaOH solution and distilled water, and then facilitated the defiberization of hemp bast tissues. The papermaking from hemp bast fibers manufactured by the combination pulping process showed good apparent density, formation structure and air permeability, and had some mechanical properties with lower tensile, tear, burst strength and folding endurance. It is finally concluded that the combination pulping process with electron beam treatment could be suggested a new alternative for non-woody fibers.

A Development of SEM Applied Microjoining System (SEM을 이용한 미세 접합 시스템 개발)

  • 황일한;나석주
    • Journal of Welding and Joining
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    • v.21 no.4
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    • pp.63-68
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    • 2003
  • Scanning electron microscopy (SEM) has been used as a surface measurement instrument and a tool for lithography in semiconductor process due to its high density localized beam. For those purposes, however, the maximum current of SEM Is less than 100pA, which is not enough fo material processing. In this paper SEM was modified to increase the amount of current reaching a specimen from gun part where current is generated, the possibility of applying SEM to material processing, especially microjoining, was investigated. The maximum current of SEM after modifications was measured up to 10$\mu$A, which is about 10$^{5}$ times greater than before modifications. Through experiments such as eutectic solder wetting on thin 304 stainless steel foil and microjoining of 10$\mu$m thick 304 stainless steel, the intensity of electron beam of SEM proved to be great enough fur material processing as heat source. And a tight jig system was found necessary to hold materials close enough fur successful microloining.

Study of Surface Alloying of TiC, TiB2 and VC with Carbon Steel Using High Energy Electron Beam Irradiation (고에너지 전자빔 투사를 이용한 TiC, TiB2 및 VC/ 탄소강 표면합금화 연구)

  • Yoo, Jung-Hoon;Shin, Kee-Sam;Yoon, Jae-Hong;Lee, Chan-Gyu;Hur, Sung-Gang;Lee, Je-Hyun;Oh, Jun-Chul;Lee, Sung-Hak;Euk, Kwang-Jun
    • Korean Journal of Materials Research
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    • v.12 no.12
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    • pp.904-910
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    • 2002
  • Surface alloying using TiC, $TiB_2$ and VC ceramic particles on carbon steel has been performed using high voltage electron beam. Each type of ceramic particles was mixed with flux of Al and $MgF_2$ in 1 to 4 ratio. The microstructures of the surface alloyed layers consisted of melted region, interface region. heat affected region and the unaffected matrix. The surface layer of the TiC surface alloyed had a cubed primary and a eutectic type of TiC. $TiB_2$ in surface layer of $TiB_2$ surface alloyed were incompletely melted with$ TiB_2$ particles as observed before the alloying. On the surface layer of the VC surface alloyed, very well defined cell structure was observed with VC on the cell boundary. In addition, ~50 nm in diameter VC particles in high density were ubiquitous in the matrix. Those fine VC particles prominently improved the hardness and wear resistance of the surface layer of the VC surface alloyed.

Plasma Sources for Production of High Flux Particle Beams in Hyperthermal Energy Range (하이퍼써멀 에너지 영역에서 높은 플럭스 입자빔 생성을 위한 플라즈마 발생원)

  • Yoo, S.J.;Kim, S.B.
    • Journal of the Korean Vacuum Society
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    • v.18 no.3
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    • pp.186-196
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    • 2009
  • Since it is difficult to extract a high flux ion beam directly at an energy of hyperthermal range ($1{\sim}100\;eV$), especially, lower than 50 eV, the ions should be neutralized into neutral particles and extracted as a neutral beam. A plasma source required to generate and efficiently transport high flux hyperthermal neutral beams should be easily scaled up and produce a high ion density (${\ge}10^{11}\;cm^{-3}$) even at a low working pressure (${\le}$ 0.3 mTorr). It is suggested that the required plasma source can be realized by Electron Cyclotron Resonance (ECR) plasmas with diverse magnetic field configurations of permanent magnets such as a planar ECR plasma source with magnetron field configuration and cylindrical one with axial magnetic fields produced by permanent magnet arrays around chamber wall. In both case of the ECR sources, the electron confinement is based on the simple mirror field structure and efficiently enhanced by electron drifts for producing the high density plasma even at the low pressure.

Fabrication and Characterization of C/SiC Composite by Electron Beam Curing (전자선 가교 방법을 이용한 탄소/탄화규소 복합재 제조 및 특성)

  • Shin, Jin-Wook;Jeun, Joon-Pyo;Kang, Phil-Hyun
    • Polymer(Korea)
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    • v.33 no.6
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    • pp.575-580
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    • 2009
  • Carbon fabric-reinforced silicon carbide composites (C/SiC) have attracted a considerable attention for high temperature structural application because of their outstanding oxidation resistance property and thermal shock resistance. In this study, we reported on the preparation of C/SiC composites by the polymer impregnation and pyrolysis (PIP) method. For this, polycarbosilane solution was impregnated into the carbon fabric and then cured by electron beam irradiation under argon atmosphere. Afterwards, the cured composite was pyrolyzed at $1300^{\circ}C$ for 1 h under argon atmosphere to produce the C/SiC composite. The porosity and density of the C/SiC composite were 13.5% and $2.44\;g/cm^3$, respectively, when the impregnation of the carbon fabric with the 30 wt% polycarbosilane solution conducted four times. In addition, in the isothermal experiment at $1500\;^{\circ}C$ in air for 5 h, the 95.9 wt% of the C/SiC composite was remained, indicating that the prepared C/SiC composite has a outstanding oxidation resistance.

Generation of 1/f Noise in Interfacial Structures between Silicon Substrate and Cobalt Thin Film (실리콘과 코발트 박막의 계면구조에서 발생하는 1/f 잡음현상 연구)

  • 조남인;남형진;박종윤
    • Journal of the Korean Vacuum Society
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    • v.5 no.1
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    • pp.48-53
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    • 1996
  • We present a microscopic description for generation of 1/f noise in interfaces between cobalt thin film and silicon substrate. Along with surface resistance measurements and transmission electron diffraction observations. 1/f noise power spectral density has been measured for the interfacial structures at the liquid nitrogen temperature . The cobalt films have been deposited by the electron-beam evaporation technique onto p-type (100) silicon in the high vacuum condition. The measured noise power spectral density shows highest magnitude near the structural transition and metallization transition region. The noise magnitude rapidly decreased after the cobalt silicide nucleation. The noise parameter is concluded to be originated form the structural fluctuations.

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