• 한국진공학회지
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• 제12권3호
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• pp.182-192
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• 2003

밀리미터파 대역용 고속 PHEMT 소자 제작 및 개발을 위하여 다층 리지스트 및 다원자 기판 구조에서 전자빔 리소그래피 공정을 분석할 수 있는 새로운 몬테 카를로 시뮬레이션 모델을 개발하였다. 전자빔에 의해 다층 다원자 타겟 기판 구조에 전이되는 에너지를 정확하고 효율적으로 계산하기 위하여 다층 리지스트 및 다층 다원자 기판 구조에서 시뮬레이션 가능하도록 새로이 모델링하였다. 본 논문에서 제안 개발된 모델을 사용하여 PHEMT 소자의 전자빔 리소그래피에 의한 T-게이트 형성 공정을 시뮬레이션하고 SEM측정 결과와 비교 분석하여 타당성을 검증하였다.

• 한국방사선학회논문지
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• 제17권5호
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• pp.641-649
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• 2023

본 연구에서는 3D 프린팅 기술을 활용하여 제작한 차폐체의 성능을 비교 분석하여, 고에너지 전자선 치료 시 차폐체로서의 적용 가능성에 대해 알아보고자 한다. 고에너지 전자선에 대한 3D 프린팅 재료의 차폐성능 평가를 위해 실측과 몬테카를로 기반의 모의실험을 수행하였다. 첫 번째, 모의실험에 대한 신뢰성 확보를 위해 IAEA의 TRS-398 권고를 참조하여 선원항 평가를 수행하였다. 두 번째, PLA+W (93%) 재료에 대한 차폐 성능 분석을 위해 3D 프린터를 이용하여 시편을 제작하였고, 전자선 에너지에 따른 두께별 차폐율을 평가하였다. 세 번째, PLA+W (93%)와 기존 차폐체 간 차폐 성능 비교 분석을 통해 전자선 치료 시 필요한 차폐 두께를 산정하였다. 연구 결과, 첫 번째, 실측과 모의실험을 통한 선원항 평가 결과, 1% 이내의 오차로 TRS-398 권고를 만족하여 모의실험에 대한 신뢰성을 확보하였다. 두 번째, PLA+W (93%)에 대한 차폐 성능 분석 결과, 6 MeV 전자선은 3.12 mm에서 95% 이상의 차폐율을 나타냈고, 15 MeV 전자선은 10 mm 두께에서 90% 이상의 차폐율을 나타내었다. 세 번째, 모의실험을 통해 PLA+W (93%) 재료와 기존 차폐체 간 비교 분석을 통해 동일 두께 내에서 텅스텐, 납, 구리, PLA+W (93%), 알루미늄 순서로 차폐율이 높은 결과를 나타내었으며, 6 MeV 전자선은 5 mm 이상, 15 MeV 전자선은 10 mm 이상 두께에서 거의 유사한 차폐율을 나타내었다. 향후 본 연구를 통해 고에너지 전자선 치료 시 PLA+W (93%) 재료를 이용한 환자의 맞춤형 차폐체 제작을 위한 기초자료로서 활용될 수 있을 것으로 판단된다.

• 한국의학물리학회지:의학물리
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• 제19권4호
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• pp.285-290
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• 2008

본 연구를 통하여 개발된 1차원 광섬유 방사선량계는 PMMA 팬텀에 10개의 광섬유 방사선 선세를 배열하여 제작하였다. 1차원 광섬유 방사선량계를 구성하는 각각의 광섬유 방사선 센서는 플라스틱 광섬유와 유기섬광체로 구성되어 있다. 각각의 유기섬광체는 치료용 선형가속기에서 발생되는 고 에너지 방사선에 의해 섬광빛을 방출하고 방출된 섬광빛은 플라스틱 광섬유를 통하여 광 계측장비인 다채널의 포토다이오드 증폭 시스템으로 전달된다. 본 연구에서는 1차원 광섬유 방사선량계를 이용하여 에너지와 조사야의 크기에 따른 치료용 전자선의 1차원적 선량분포를 측정하였고 섬광체의 광신호 측정에 있어 방해요소로 작용하는 체렌코프 빛을 전자선의 입사각도에 따라 계측 및 분석하였다. 또한 PMMA 팬텀의 깊이에 따른 선량을 계측함으로써 3차원적 심부선량백분율을 측정하였고 그에 따른 등선량곡선을 도시화하였다. 본 연구를 통하여 개발된 1차원 광섬유 방사선량계는 고 분해능, 실시간 측정, 쉬운 보정 등 많은 장점을 가지고 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제26회 학술발표회 초록집
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• pp.169-169
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• 2004

• 한국전기전자재료학회논문지
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• 제22권10호
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• pp.897-903
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• 2009

We have designed the backward wave oscillator. A power-pulsed generator oscillated at 24 GHz has higher frequency than current one. It is very inportant to prevent microwave from going into the beam diode, since intence microwave will harmfully affect beam generation. Due to the axial mode operation, there exist a critial value of beam energy for the oscillation. By changing the condition at the SWS end, an enhanced performance of the K-band oversized BWO is observed in a low magnetic field region about 0.8T.

• 한국정밀공학회지
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• 제25권6호
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• pp.150-158
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• 2008

This research considered that the significance of the NT(Nano Technology) which gradually increased the importance of it and investigated the technology development current situation of the Korea, U.S.A, Japanese, Europe. Therefore, in domestic and foreign, this research was widely used. It includes the tendency of the technology about processing methods using the ion beam and electron beam among the In-line system related technique field for the high efficiency energy beam application nano scale manufacturing components. The technique level of Korea, the international trend of technology and cooperation research present condition are dealt in. The information about the checked out of business of research and development of the country consistency and policy establishment try to be provided.

• Journal of Welding and Joining
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• 제20권4호
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• pp.525-534
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• 2002

During laser spot welding of the braun tube electron gun, phenomena such as serious spattering and oxidative reaction, etc. were occurred. The spatter occurred from weld pool affects the braun tube, namely it blocks up a very small hole on the shadow mask and causes short circuit between two roles of the electron gun. We guessed that high power density and oxidative reaction are main sources of these problems. So, we studied to prevent and to reduce spatter occurring in spot welding of the braun tube electron gun using pulsed Nd:YAG laser. The characteristics of laser output power was estimated, and the loss of laser energy by optical parameter and spatter was measured by powermeter. The effects of welding parameters, laser defocused distance and incident angle, were investigated on the shape and penetration depth of the laser welded bead in flare and flange joints. From these results, the laser peak power was a major factor to control penetration depth and to occur spatter. It was found that the losses of laser energy by optic parameter and sticked spatter affect seriously laser weldability of thin sheets. The deepest penetration depth is gotten on focal position, and a "bead transition" occurred with a slight displacement of focal position relative to the workpiece surface and the absorption rate of the laser energy is affected by the shape factor of the workpiece. When we changed the incident angle of laser beam, the penetration depth was decreased a little with increasing of the incident angle, and the bead width was increased. The spattering was prevented by considering laser beam energy and incident angle.ent angle.

• Applied Microscopy
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• 제50권
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• pp.17.1-17.9
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• 2020

Recent advances in fabrication have enabled radial-junction architectures for cost-effective and high-performance optoelectronic devices. Unlike a planar PN junction, a radial-junction geometry maximizes the optical interaction in the three-dimensional (3D) structures, while effectively extracting the generated carriers via the conformal PN junction. In this paper, we report characterizations of radial PN junctions that consist of p-type Si micropillars created by deep reactive-ion etching (DRIE) and an n-type layer formed by phosphorus gas diffusion. We use electron-beam induced current (EBIC) microscopy to access the 3D junction profile from the sidewall of the pillars. Our EBIC images reveal uniform PN junctions conformally constructed on the 3D pillar array. Based on Monte-Carlo simulations and EBIC modeling, we estimate local carrier separation/collection efficiency that reflects the quality of the PN junction. We find the EBIC efficiency of the pillar array increases with the incident electron beam energy, consistent with the EBIC behaviors observed in a high-quality planar PN junction. The magnitude of the EBIC efficiency of our pillar array is about 70% at 10 kV, slightly lower than that of the planar device (≈ 81%). We suggest that this reduction could be attributed to the unpassivated pillar surface and the unintended recombination centers in the pillar cores introduced during the DRIE processes. Our results support that the depth-dependent EBIC approach is ideally suitable for evaluating PN junctions formed on micro/nanostructured semiconductors with various geometry.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2004년도 춘계학술대회 논문집
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• pp.374-377
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• 2004

We present a detailed design study of high power large diameter backward wave oscillator operating at 24 GHz for a beam energy of 100 keV. The ratio of the mean diameter of the slow wave structure to the wavelength of output microwaves is increased to be 4.8. Analysis is made within the scope of linear theory of absolute instability.

• 한국재료학회지
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• 제20권12호
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• pp.636-639
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• 2010

ZnO thin films were prepared on a glass substrate by radio frequency (RF) magnetron sputtering without intentional substrate heating and then surfaces of the ZnO films were irradiated with intense electrons in vacuum condition to investigate the effect of electron bombardment on crystallization, surface roughness, morphology and hydrogen gas sensitivity. In XRD pattern, as deposited ZnO films show a higher ZnO (002) peak intensity. However, the peak intensity for ZnO (002) is decreased with increase of electron bombarding energy. Atomic force microscope images show that surface morphology is also dependent on electron bombarding energy. The surface roughness increases due to intense electron bombardment as high as 2.7 nm. The observed optical transmittance means that the films irradiated with intense electron beams at 900 eV show lower transmittance than the others due to their rough surfaces. In addition, ZnO films irradiated by the electron beam at 900 eV show higher hydrogen gas sensitivity than the films that were electron beam irradiated at 450 eV. From XRD pattern and atomic force microscope observations, it is supposed that intense electron bombardment promotes a rough surface due to the intense bombardments and increased gas sensitivity of ZnO films for hydrogen gas. These results suggest that ZnO films irradiated with intense electron beams are promising for practical high performance hydrogen gas sensors.