• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.1
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• pp.17-21
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• 2011

Copper (Cu) had been attractive material due to its superior properties comparing to other metals such as aluminum or tungsten and considered as the best metal which can replace them as an interconnect metal in integrated circuits. CMP (Chemical Mechanical Polishing) technology enabled the production of excellent local and global planarization of microelectronic materials, which allow high resolution of photolithography process. Cu CMP is a complex removal process performed by chemical reaction and mechanical abrasion, which can make defects of its own such as a scratch, particle and dishing. The abrasive particles remain on the Cu surface, and become contaminations to make device yield and performance deteriorate. To remove the particle, buffing cleaning method used in post-CMP cleaning and buffing is the one of the most effective physical cleaning process. AE(Acoustic Emission) sensor was used to detect dynamic friction during the buffing process. When polishing is started, the sensor starts to be loaded and produces an electrical charge that is directly proportional to the applied force. Cleaning efficiency of Cu surface were measured by FE-SEM and AFM during the buffing process. The experimental result showed that particles removed with buffing process, it is possible to detect the particle removal efficiency through obtained signal by the AE sensor.

• Journal of the Korean earth science society
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• v.32 no.4
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• pp.360-372
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• 2011

In order to clarify the advection and dispersion characteristics of volcanic tephra to be emitted from the Mt. Baekdu, several numerical experiments were carried out using three-dimensional atmospheric dynamic model, Weather and Research Forecast (WRF) and Laglangian particles dispersion model FLEXPART. Four different temporally averaged meteorological values including wind speed and direction were used, and their averaged intervals of meteorological values are 1 month, 10 days, and 3days, respectively. Real time simulation without temporal averaging is also established in this study. As averaging time of meteorological elements is longer, wind along the principle direction is stronger. On the other hands, the tangential direction wind tends to be clearer when the time become shorten. Similar tendency was shown in the distribution of volcanic tephra because the dispersion of particles floating in the atmosphere is strongly associated with wind pattern. Wind transporting the volcanic tephra is divided clearly into upper and lower region and almost ash arriving the Korean Peninsula is released under 2 km high above the ground. Since setting up the temporal averaging of meteorological values is one of the critical factors to determine the density of tephra in the air and their surface deposition, reasonable time for averaging meteorological values should be established before the numerical dispersion assessment of volcanic tephra.

• Journal of The Korean Association For Science Education
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• v.40 no.1
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• pp.51-60
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• 2020

In this study, we propose research methods to explore the nature of earth science by applying the phenomenological approach and NOS-family resemblance approach based on literature review. The phenomenological approach exploring the nature of earth science is a method of collecting, analyzing and synthesizing multifaceted features of earth science from intuitive sensory phenomena without prejudice. As a way of exploring the nature of earth science from a phenomenological point of view, we propose the NOS-family resemblance approach to the NOS. This approach provides a comprehensive explanation of NOS by combining the characteristics shared by different areas of science with distinct differences. Applying this method to exploring the nature of earth science, we can identify both domain-general and domain-specific characteristics that make sub-areas of earth science a 'family.' For example, through the networking of features shared by such sub-areas as geology, atmospheric science, oceanography, astronomy, earth system science, etc., we can extract the family-resemblance characteristics that make these sub-areas a family called earth science. Through these approaches to the nature of earth science, the richness, complexity, and dynamic nature of earth science can be revealed as a whole. In addition, we will be able to grasp the change in the sub-areas that constitute the earth science, which in turn changes the nature of earth science, and to contribute to establishing the status and development system of earth science as a school subject.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.11
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• pp.18-24
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• 2000

(Ba,Sr)$TiO_3$ thin films have attracted great interest as new dielectric materials of capacitors for ultra-large-scale integrated dynamic random access memories (ULSI-DRAMs) such as 1 Gbit or 4 Gbit. In this study, inductively coupled $BCl_3/Cl_2/Ar$ plasmas was used to etch (Ba,Sr)$TiO_3$ thin films. RF power/dc bias voltage=600 W/-250 V and chamber pressure was 10 mTorr. The $Cl_2/(Cl_2+Ar)$ was fixed at 0.2 the (Ba,Sr)$TiO_3$ thin films were etched adding $BCl_3$. The highest (Ba,Sr)$TiO_3$ etch rate is $480{\AA}/min$ at 10 % $BCl_3$ to $Cl_2/Ar$. The change of Cl, B radical density measured by optical emission spectroscopy(OES) as a function of $BCl_3$ percentage in $Cl_2/Ar$. The highest Cl radical density was shown at the addition of 10% $BCl_3$ to $Cl_2/Ar$. To study on the surface reaction of (Ba, Sr)$TiO_3$ thin films was investigated by XPS analysis. Ion bombardment etching is necessary to break Ba-O bond and to remove $BaCl_2$. There is a little chemical reaction between Sr and Cl, but Sr is removed by physical sputtering. There is a chemical reaction between Ti and Cl, and $TiCl_4$ is removed with ease. The cross-sectional of (Ba,Sr)$TiO_3$ thin film was investigated by scanning electron microscopy (SEM), the etch slope is about 65~70$^{\circ}$.

• Journal of the Economic Geographical Society of Korea
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• v.1 no.2
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• pp.85-102
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• 1998

The Changing Characteristics of Office Location in Central Seoul In recent years, central Seoul has been experiencing a dynamic transformation. In the process of reorganization of urban industrial structure including tertiarization and quaternarization of the economic base of Seoul, business services are growing very rapidly and large scale urban renewal projects are agilely implemented. Downtown office activities become a nucleus for economic performance of Seoul and high-rise office buildings steer the landscape transformation of central Seoul. Even though there appear to exist some evidences that office districts have dispersed to several subcenters, major office activities are still concentrated in the central Seoul. This paper redefines office industry in a narrow meaning comprising only relevant economic sectors and office buildings as office activity-functioning units. It then explores the industrial networking and territorial specialization of office activities focusing on the dual process of concentration and dispersion in Seoul. The changing characteristics of the downtown linkages of office activities in this post-industrial era transforms the spatial economy of central Seoul into more flexible and volatile, while territorial concentration of power and control functions are fortified at the same time. Finally, the paper addresses the development of manufacturing-tertiary-quaternary industrial complex, which can be regarded as new industrial clusters, selling cultural economy of urban space and possessing placeness or images for clients and customers, in relation to urban competitiveness and territorial specialization of large metropolitan areas.

• Journal of the Korean Society of Food Science and Nutrition
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• v.38 no.12
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• pp.1815-1819
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• 2009

Based on the soft and rigid extents, tissues are mainly divided into two groups in mammals, soft tissues including heart, lung, kidney and brain, and hard tissues including tendon, cartilage, teeth and bone. Among various tissues, bone, a dynamic rigid organ, is continuously remodeled by the opposing functional activity between bone formation by osteoblasts and bone destruction by osteoclasts. Bone protects the soft tissues and provides mineral reservoirs, which can supply the mineral needs of other soft tissues to normally maintain cellular function. While calcification in bone is an important action to fundamentally support the body and protect the soft tissues, calcification in soft tissues, including the heart, aorta, kidney, lung and spleen, results in severe organ damages, eventually causing sudden death. A growing body of evidence indicates that the osteoporotic patient who are aging, post-menopausal, diabetes and chronic kidney disease simultaneously represent a high clinical incidence of soft tissue calcification, illustrating a link between soft tissue calcification and bone decalcification (osteoporosis). This study will review what is currently known about the connection between bone decalcification and soft tissue calcification.

• Progress in Medical Physics
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• v.20 no.3
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• pp.174-179
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• 2009

To track moving tumor in real time, CyberKnife system imports a technique of the synchrony respiratory tracking system. The fiducial marker which are detectable in X-ray images were demand in CyberKnife Robotic radiosurgery system. It issued as reference markers to locate and track tumor location during patient alignment and treatment delivery. Fiducial marker implantation is an invasive surgical operation that carries a relatively high risk of pneumothorax. Most recently, it was developed a direct lung tumor registration method that does not require the use of fiducials. The purpose of this study is to measure the accuracy of target applying X-sight lung tracking using the Gafchromic film in dynamic moving thorax phantom. The X-sight Lung Tracking quality assurance motion phantom simulates simple respiratory motion of a lung tumor and provides Gafchromic dosimetry film-based test capability at locations inside the phantom corresponding to a typical lung tumor. The total average error for the X-sight Lung Tracking System with a moving target was $0.85{\pm}0.22$ mm. The results were considered reliable and applicable for lung tumor treatment in CyberKnife radiosurgery system. Clinically, breathing patterns of patients may vary during radiation therapy. Therefore, additional studies with a set real patient data are necessary to evaluate the target accuracy for the X-sight Lung Tracking system.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.2 no.2
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• pp.39-46
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• 1982

A model of substrate removal by rotating discs has been developed for a better understanding of the process, and the performance of the system has been evaluated under steady and unsteady state. The model was constructed based upon mass transfer of the substrate from the bulk solution to the biofilm and a simultaneous removal of the substrate by the biomass. The model is composed of a few sets of differential equations representing mass balance within the elements of a liquid film and a biofilm, and in the bulk solution. Substrate removal efficiency of the process is largely dependent on a diffusion coefficient of the substrate within the biofilm and a maximum rate of substrate removal of the biomass. The efficiency is affected to a greater extent when the substrate concentration is low and the maximum substrate removal rate is high. The efficiency increases proportionally with increasing film depth when the biofilm is shallow, however, the rate of increase gradually decreases with an increase of the film depth. As the film reaches a limiting depth, the efficiency remains constant. Unlike the steady state, the effluent quality is affected by the tank volume under dynamic state. Increasing tank volume decreases peak concentration of the effluent under peak loading. Additional tank volume provides a buffer capacitya.gainst a peak loading and the holding tank behaves like an equalization tank.

• Composites Research
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• v.24 no.1
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• pp.45-50
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• 2011

Transparent and conductive carbon nanotube on polyethylene terephthalate (PET) were prepared by dip-coating method for self-sensing multi-functional nanocomposites. The changes in the electrical and optical properties of CNT coating mainly depended on the number of dip-coating, concentration of CNT solution. Consequently, the surface resistance and transmittance of CNT coating were sensitively controlled by the processing parameters. Surface resistance of CNT coating was measured using four-point method, and surface resistance of coated CNT could be better calculated by using the dual configuration method. Optical transmittance of PET film with CNT coating was evaluated using UV spectrum. Surface properties of coated CNT investigated by wettability test via static and dynamic contact angle measurement were consistent with each other. As dip-coating number increased, surface resistance of coated CNT decreased seriously, whereas the transmittance exhibited little lower due to the thicker CNT networks layer. Interfacial microfailure properties were investigated for CNT and indium tin oxide (ITO) coatings on PET substrates by electrical resistance measurement under cyclic loading fatigue test. CNT with high aspect ratio exhibited no change in surface resistance up to 2000 cyclic loading, whereas ITO with brittle nature showed a linear increase of surface resistance up to 1000 cyclic loading and then exhibited the level-off due to reduced electrical contact points based on occurrence of many micro-cracks.

• The Korean Journal of Nuclear Medicine
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• v.32 no.1
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• pp.10-19
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• 1998

The SPECT radiopharmaceuticals labeled with I-123 for dopamine transporter imaging have been used to measure dopamine transporters in patients with movement disorders. However, a cyclotron produced I-123 limits its availiability and ease of use as a radioisotope to be labeled with pharmaceuticals in routine clinical diagnostic procedures. Recently, new radiophannaceuticals for Tc-99m which has optimal characteristic for SPECT imaging have been developed to overcome the limits of using I-123. The purpose of this study was to compare the quality of [Tc-99m]TRODAT-1 with [I-123]IPT SPECT data and then to evaluate the usefulness of [Tc-99m]TRODAT-1 SPECT by using three noninvasive simplified quantitative methods. TRODAT-1 labeled with Tc-99m($15.93{\pm}0.82mCi$) and IPT labeled with I-123($6.60{\pm}0.11mCi$) were injected into five normal controls. Dynamic [Tc-99m]TRODAT-1 SPECT scans of brain were performed for 10 minutes each over 180 minnutes, and for 20 minutes at 4 hrs and 5 hrs. [I-123]IPT SPECT scans were performed for 5 minutes each over 120 minutes. Time activity curves were generated for the left basal ganglia(LBG), right basal ganglia(RBG), and occipital cortex(OCC). Dopamine transporter parameters were ohtained using (BG-OCC)/OCC, graphical method($R_V$), and area ratio method($R_A$). TRODAT-1 and IPT SPECT imaging showed high uptake at the level of the basal ganglia. (BG-OCC)/OCC ratios for TRODAT-1 and IPT were $0.80{\pm}0.14$, and $3.22{\pm}0.81$, $R_Vs$ were $0.62{\pm}0.12$, and $2.30{\pm}0.35$, and $R_As$ were $0.37{\pm}0.08$ and $1.73{\pm}0.31$, respectively. In conclusion, further improvement of [Tc-99m]TRODAT-1 imaging characteristics may be required to estimate the dopamine transporter concentrations in human brains although it shows clear BG localization.