• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.233-233
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• 2010

Magnetic random access memory (MRAM), based on magnetic tunnel junction (MTJ) and CMOS, is a prominent candidate among prospective semiconductor memories because it can provide nonvolatility, fast access time, unlimited read/write endurance, low operating voltage and high storage density. The etching of MTJ stack with good properties is one of a key process for the realization of high density MRAM. In order to achieve high quality MTJ stack, the use of CoFeB and IrMn magnetic films as free layers was proposed. In this study, inductively coupled plasma reactive ion etching of CoFeB and IrMn thin films masked with Ti hard mask was investigated in a $Cl_2$/Ar gas mix. The etch rate of CoFeB and IrMn films were examined on varying $Cl_2$ gas concentration. As the $Cl_2$ gas increased, the etch rate monotonously decreased. The effective of etch parameters including coil rf power, dc-bais voltage, and gas pressure on the etch profile of CoFeB and IrMn thin film was explored, At high coil rf power, high dc-bais voltage, low gas pressure, the etching of CoFeB and IrMn displayed better etch profiles. Finally, the clean and vertical etch sidewall of CoFeB and IrMn free layers can be achieved by means of thin Ti hard mask in a $Cl_2$/Ar plasma at the optimized condition.

• Proceedings of the Korean Society for Bio-Environment Control Conference
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• 2004.11a
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• pp.139-143
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• 2004

To evaluate the biological and physiological response of Picea koraiensis Nakai to elevated $CO_2$ and nitrogen.3-year old seedlings were planted in an ambient and 700 ppm $CO_2$ at low (2mM $NH_4NO_3$) or high nitrogen (16mM $NH_4NO_3$) supplying treatments for 3 months. Photosynthetic parameters were measured monthly. Seedlings were harvested at monthly intervals and growth parameters of root system, stem and needle fractions were evaluated. The result showed that height of the seedlings grown at both of elevated $CO_2Xhigh$ nitrogen and elevated CO2×low nitrogen supplying treatments increased significantly more than that of at ambient CO2 treatments. Seedlings grown at elevated $CO_2Xhigh$ nitrogen produced more root biomass than at elevated $CO_2Xlow$ nitrogen and ambient $CO_2Xhigh$ nitrogen treatments. This result suggested that the root growth response of Picea koraiensis seedlings was greater in elevated $CO_2{\times}high$ nitrogen regime, which is very important for carbon sequestration in soil. $A_{max}$ of the seedlings grown at elevated $CO_2Xhigh$ nitrogen increased during the three months significantly, and $A_{max}$ of the seedlings grown at the other three treatments decreased significantly, suggesting that the interaction between elevated $CO_2$ and high nitrogen supplying stimulates the $A_{max}$ of Picea koraiensis. $A_{max}$ of the seedlings grown at elevated $CO_2Xlow$ nitrogen showed higher than other three treatments in the first month of the experiment, but decreased in succedent two months, suggesting that elevated $CO_2$ promotes the photosynthesis of the seedlings. However long term growth in elevated $CO_2Xlow$ nitrogen supplying condition resulted in an acclimatory decreased in leaf photosynthesis.

• The Korean Journal of Physiology
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• v.26 no.1
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• pp.45-54
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• 1992

Effects of pH, $PCO_2$, and adenosine on the vascular contractility were investigated in the pig coronary arteries. The helical strips of isolated coronary arteries were immersed in the HEPES or $HCO_3^-/CO_2$-buffered Tyrode's solution equilibrated with 100% $O_2\;or\;95%\;O_2-5%\;CO_2\;at\;35^{\circ}C$. The contraction was recorded isometrically using a force transducer. The amplitudes of contraction induced by ACh, high $K^+$, and electrical Held stimulation (EFS) were decreased by elevating extracellular pH (pHo) and were increased by lowering pHo. A shift from $0%\;CO_2\;to\;5%\;CO_2$ at constant pHo (pH 7.4) reduced the contractions induced by ACh, high $K^+$, EFS. However the contraction induced by 100mM $K^+$ was less influenced by the change of pHo or $CO_2$. The contraction induced by ACh in $Ca^{2+}$free Tyrode's solution as well as the contraction developed by the addition of extracellular of $Ca^{2+}$ were decreased by lowering pHo and were increased by elevating pHo. High $K^+$ (25mM) induced contraction at pH 6.8 was not returned to the level of the contraction at pH 7.4 by the elevation of extracellular. calcium $[Ca^{2+}]_o$. Adenosine-induced relaxation was more significant with 5% $CO_2$ than 0% $CO_2$ in the high $K^+$-induced contraction and was more significant with low pHo than high pHo in the contraction induced by EFS. From the above results, it is suggested that $H^+$ and $CO_2$ inhibit $Ca^{2+}$ influx as well as $Ca^{2+}$ release from intracellular $Ca^{2+}$ storage sites and enhance the relaxing effect of adenosine in the pig coronary artery.

• Korean Chemical Engineering Research
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• v.48 no.3
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• pp.316-321
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• 2010

The $SO_2$ catalytic reduction was carried out under the condition of high pressure in this study. Sn-Zr based oxide and CO were used as the catalyst and reducing agent for the reduction of $SO_2$ to element sulfur, respectively. In order to compare the reactivity with the pressure on the catalytic process, the reactivity tests were performed under the conditions of atmospheric pressure and 20 atm. $SO_2$ conversion, the element sulfur yield and COS selectivity were also compared with changing the reaction temperature, $CO/SO_2$ mole ratio and the space velocity(GHSV). $SO_2$ conversion increased with increasing temperature and $CO/SO_2$ mole ratio under the condition of atmospheric pressure and element sulfur yield decreased due to the production of COS by the series reaction of CO and the produced sulfur. However, high $SO_2$ conversion and high element sulfur were obtained under the condition of 20 atm. It was concluded that COS decreased due to the condensation of the produced element sulfur under the condition of high pressure. Therefore, the high sulfur yield for $SO_2$ catalytic reduction could be profitably obtained under the condition of high pressure.

• Journal of Welding and Joining
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• v.28 no.3
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• pp.36-41
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• 2010

High Mn steel has been developed for automotive applications since the steel has an excellent combination of strength and ductility. However, from the viewpoint of welding, high Mn steel has a few problems related to its chemical composition. This paper describes characteristics of dissimilar $CO_2$ laser welding for expanding application of high Mn steel. From this work it was cleared that dissimilar laser welded joint between high Mn steel and carbon steel had poor formability due to the formation of martensite within weld metal. In order to improve ductility of welded joint, the method of controlling the dilution ratio of high Mn steel was suggested.

• Journal of the Korean Ceramic Society
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• v.34 no.9
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• pp.915-920
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• 1997

Tetragonal ZrO2 polycrystal (TZP), consisted of 90.24 mol% ZrO2-5.31 mol% Y2O3-4.45 mol% Nb2O5, were prepared using hot-press and mechanical properties and high-temperature degradation were investigated. The specimen, hot-pressed for 1 h at 140$0^{\circ}C$ in Ar atmosphere, exhibited flexural strength of 1010 MPa and fracture toughness of 7.5 MPam1/2 and experienced no low-temperature degradation below 40$0^{\circ}C$. However, as aged for 100h at temperatures higher than 40$0^{\circ}C$, TZP was suffered by high-temperature degradation due to an extensive cavitation caused by the oxidation of carbon. XPS observation revealed that the carbon incorporated in TZPs during hot-pressing exists as either an ether-type CO or a carbonyl-type C=O. Despite of the high-temperature degradation of t-ZrO2 co-doped with Y2O3 and Nb2O5, its flexural strength and fracture toughness were superior to those of the commercial 3 mol% Y2O3-TZP hot-pressed under the identical condition as determined before and after the aging treatments.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.5
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• pp.232-237
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• 2005

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

• Corrosion Science and Technology
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• v.7 no.2
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• pp.69-76
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• 2008

Common methods for large scale hydrogen production, such as steam reforming and coal gasification, also involve production of carbonaceous gases. It is therefore necessary to handle process gas streams involving various mixtures of hydrocarbons, $H_2$, $H_2O$, CO and $CO_2$ at moderate to high temperatures. These gases pose a variety of corrosion threats to the alloys used in plant construction. Carbon is a particularly aggressive corrodent, leading to carburisation and, at high carbon activities, to metal dusting. The behaviour of commercial heat resisting alloys 602CA and 800, together with that of 304 stainless steel, was studied during thermal cycling in $CO/CO_2$ at $650-750^{\circ}C$, and also in $CO/H_2/H_2O$ at $680^{\circ}C$. Thermal cycling caused repeated scale separation, which accelerated chromium depletion from the alloy subsurface regions. The $CO/H_2/H_2O$ gas, with $a_C=2.9$ and $p(O_2)=5\times10^{-23}$ atm, caused relatively rapid metal dusting, accompanied by some internal carburisation. In contrast, the $CO/CO_2$ gas, with $a_C=7$ and $p(O_2)=10^{-23}-10^{-24}$ atm caused internal precipitation in all three alloys, but no dusting. Inward diffusion of oxygen led to in situ oxidation of internal carbides. The very different reaction morphologies produced by the two gas mixtures are discussed in terms of competing gas-alloy reaction steps.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.5
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• pp.222-227
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• 2018

$Zn_{1-x}Co_x$ Zeolitic Imidazolate Framework (ZIF) (x = 0~0.05) were prepared by the co-precipitation of $Zn^{2+}$ and $Co^{2+}$ using 2-methylimidazole, which were converted into pure and Co-doped ZnO nanoparticles by heat treatment at $600^{\circ}C$ for 2 h. Homogeneous Zn/Co ZIFs were achieved at x < 0.05 owing to the strong coordination of the imidazole linker to $Zn^{2+}$ and $Co^{2+}$, facilitating atomic-scale doping of Co into ZnO via annealing. By contrast, heterogeneous Zn/Co ZIFs were formed at $x{\geq}0.05$, resulting in the formation of $Co_3O_4$ second phase. To investigate the potential as high-performance gas sensors, the gas sensing characteristics of pure and Co-doped ZnO nanoparticles were evaluated. The sensor using 3 at% Co-doped ZnO exhibited an unprecedentedly high response and selectivity to trimethylamine, whereas pure ZnO nanoparticles did not. The facile, bimetallic ZIF derived synthesis of doped-metal oxide nanoparticles can be used to design high-performance gas sensors.

• Journal of Magnetics
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• v.8 no.3
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• pp.124-127
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• 2003

HDDR (hydrogenation, disproportionation, desorption, recombination) and mechanical milling processes have been applied to the $SmCo_{5}$ alloy in an attempt to produce a highly coercive powder. The $SmCo_{5}$ alloy had very high structural stability under the hydrogen atmosphere and the 1:5 phase was only partially disproportionated under up to 10 kgf/$\textrm{cm}^2$ hydrogen gas. The partially disproportionated material was recombined not into 1:5 phase after the HDDR, but rather into multi-phase mixture consisting of 1:5, 2:17, 2:7 and 1:7 phases. The $SmCo_{5}$ alloy HDDR-treated with hydrogen up to 10 kgf/$\textrm{cm}^2$ had poor coercivity. For a useful HDDR to prepare a high coercivity $SmCo_{5}$ alloy powder, much higher hydrogen pressure well exceeding 10 kgf/$\textrm{cm}^2$ would be required. The $SmCo_{5}$ alloy lump was amorphized by an intensive mechanical milling, and it was crystallised ultra-finely by a subsequent optimum annealing. The optimally annealed material had very high coercivity, and it was found that the mechanical milling followed by an annealing was an effective way of producing highly coercive $SmCo_{5}$ alloy powder.