• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.207-207
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• 2010

Both ZnO and GaN have excellent physical properties in optoelectronic devices such as blue light emitting diode (LED), blue laser diode (LD), and ultra-violet (UV) detector. The ZnO/GaN heterostructure, which has a potential to achieve the cost efficient LED technology, has been fabricated by using radio frequency (RF) sputtering, pyrolysis, metal organic chemical vapor deposition (MOCVD), direct current (DC) arc plasmatron, and pulsed laser deposition (PLD) methods. Among them, the PLD system has a benefit to control the composition ratio of the grown film from the mixture target. A 500-nm-thick ZnO film was grown by PLD technique on c-plane GaN/sapphire substrates. The post annealing process was executed at some varied temperature between from $300^{\circ}C$ to $900^{\circ}C$. The morphology and crystal structural properties obtained by using atomic force microscope (AFM) and x-ray diffraction (XRD) showed that the crystal quality of ZnO thin films can be improved as increasing the annealing temperature. We will discuss the post-treatment effect on film quality (uniformity and reliability) of ZnO/GaN heterostructures.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.292-292
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• 2014

Wide band gap semiconductors, such as III-nitrides (GaN, AlN, InN, and their alloys), SiC, and diamond are expected to play an important role in the next-generation electronic devices. Specifically, GaN-based high electron mobility transistors (HEMTs) have been targeted for high power, high frequency, and high temperature operation electronic devices for mobile communication systems, radars, and power electronics because of their high critical breakdown fields, high saturation velocities, and high thermal conductivities. For the stable operation, high power, high frequency and high breakdown voltage and high current density, the fabrication methods have to be optimized with considerable attention. In this study, low ohmic contact resistance and smooth surface morphology to AlGaN/GaN on 2 inch c-plane sapphire substrate has been obtained with stepwise annealing at three different temperatures. The metallization was performed under deposition of a composite metal layer of Ti/Al/Ni/Au with thickness. After multi-layer metal stacking, rapid thermal annealing (RTA) process was applied with stepwise annealing temperature program profile. As results, we obtained a minimum specific contact resistance of $1.6{\times}10^{-7}{\Omega}cm2$.

• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.839-846
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• 1996

Epitaxial (La, Sr)$CoO_3/Pb(Zr,\;Ti)O_3/(La,\;Sr)CoO_3$by pulsed laser deposition for ferroelectric field effect transistor. Epitaxial $LaCoO_3/Pb(Zr,\;Ti)O_3/(La,\;Sr)CoO_3$ heterostructures exhibited 70$\mu C/cm^2$ and 17 $\mu C/cm^2$at a positively and negatively poled states, respectively. On the other hand, epitaxial (La, Sr)$CoO_3/Pb(Zr,\;Ti)O_3/LaCoO_3$heterostructures show the remnant polarization states opposite to the $LaCoO_3/Pb(Zr,\;Ti)O_3/(La,\;Sr)CoO_3$ heterostructures. This indicates that the interface between (La, Sr)$CoO_3$ (LSCO) and $Pb(Zr, Ti)O_3(PZT)$ layers affects the asymmetric polarization remanence through electrochemical nature. The resistivity of $LaCoO_3$ (LCO) layer was found to be dependent on an ambient oxygen, primarily the ambient oxygen pressure during deposition. The resistivity of the LCO layer varied in the range of 0.1-100 $\Omega$cm. It is suggested that, with an appropriate resistivity of the LCO layer, the LCO/PZT/LSCO heterostructure can be used as the ferroelectric field effect transistor.

• Applied Microscopy
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• v.42 no.4
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• pp.207-211
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• 2012

We examined the electrical properties and microstructure of NiO produced using a sol-gel method and Ni nitrate hexahydrate ($Ni[NO_3]_2{\cdot}6H_2O$) to investigate if this NiO thin film can be used as an insulator layer for resistance random access memory (ReRAM) devices. It was found that as-prepared NiO film was polycrystalline and presented as the nonstoichiometric compound $Ni_{1+x}O$ with Ni interstitials (oxygen vacancies). Resistances-witching behavior was observed in the range of 0~2 V, and the low-resistance state and high-resistance state were clearly distinguishable (${\sim}10^3$ orders). It was also demonstrated that NiO could be patterned directly by KrF eximer laser irradiation using a shadow mask. NiO thin film fabricated by the sol-gel method does not require any photoresist or vacuum processes, and therefore has potential for application as an insulating layer in low-cost ReRAM devices.

• Journal of the Korean Vacuum Society
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• v.21 no.6
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• pp.322-327
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• 2012

The strain effects of ZnSe epilayer on ZnSe/GaAs heterojunction structure grown by molecular beam epitaxy have been investigated by using electroreflectance (ER) spectroscopy. The ER measurements were performed as a function of modulation voltage, dc bias voltage, and temperature. From the room temperature ER spectrum, we observed a heavy-hole (HH: 2.609 eV) and light-hole (LH: 2.628 eV) transitions due to a compressive strain. With increasing the bias voltage, the amplitude of HH transition signal decreased and the amplitude of LH transition signal was almost the same. From the temperature dependence of ER spectra, we have studied the interaction between the strain and the thermal expansion coefficient.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.378-378
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• 2011

ZnO 나노선 구조는 나노선 구조를 통해 입사한 빛을 산란시켜 광흡수를 촉진시키고, 바닥 전극으로 바로 이어진 수직의 1차원 구조를 통해 전자가 빠르게 이동할 수 있으며, 넓은 표면적을 가지고 있는 등의 장점을 가지고 있어 오래전부터 광전소자에 이용되었다. 하지만 ZnO 물질 자체의 밴드갭 에너지가 3.2 eV로 비교적 큰 편이라 가시광 영역의 빛을 흡수, 이용하기 위해서는 작은 밴드갭을 가지는 광감응 물질이 필요하다. 본 연구에서는 저온의 수열합성법을 통해 합성한 ZnO 나노선 구조 상에 Cd 계열의 무기물 양자점을 증착하여 이종구조를 형성하는 방법을 개발하였다. 본 연구에서 사용한 양자점인 CdS와 CdSe는 벌크 밴드갭 에너지가 각각 2.3 eV, 1.7 eV로 가시광 영역의 빛을 흡수할 수 있으며, ZnO 나노선과 type-II 밴드구조를 가지기 때문에 전자-정공 분리 및 포집에 유리하다. 합성된 구조를 이용하여 photoelectrochemical 특성을 분석하였으며, 그 결과 양자점의 증착으로 광전류 생성이 향상됨을 확인하였다. 특히 ZnO 나노선 상에 CdS 양자점 증착 후 추가적으로 CdSe 양자점을 증착하여 다중접합 나노선 구조를 형성한 경우 광전류 생성이 가장 크게 향상된 결과를 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.313-313
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• 2011

최근, 산화물 반도체를 통한 나노선 연구가 활발히 진행되고 있다. 1차원 나노선은 넓은 표면적을 가지며 다양한 특성을 지녀 미래 nanodevice로의 중요한 building block 소자로의 활용이 가능하다. 본 연구에서는 이종의 나노선을 합성하여 hierarchical nanojunction structure를 제작, 특성을 확인하였다. 이러한 구조는 나노선이 가지는 넓은 표면적의 특성과 동시에, multi-component fuctional nanodevice를 구현하는데에 적합한 구조이다. 본 연구는 텅스텐 기판 위에 고온의 열증착 방식을 이용하여 텅스텐 산화물 나노선을 제작시켜 그 위에 저온의 수열합성을 통한 산화아연 나노선을 제작한 후 향상된 field emission emitter로서의 특성을 살펴보았다. 합성된 텅스텐 산화물 나노선은 quasi-allign된 구조를 가지며, 이러한 구조 위에 ZnO를 스퍼터링하여 seed layer를 형성시키고, 암모니아수와 아연염을 이용한 수열합성법을 통하여 합성된 나노선 위에 nanobranch의 산화아연 나노선을 형성하였다. 이러한 성장특성은 SEM, TEM을 통하여 확인하였고 각각의 특성과 계면을 살펴보았다. 또한 이러한 구조를 이용하여 전계방출특성을 확인하였는데, 약 5.7 eV의 일함수를 갖는 텅스텐 산화물 나노선 위에 더 작은 값의 일함수를 갖는 산화아연 나노선을 합성하여 전계방출특성을 보았으며, 더 향상된 결과를 얻을 수 있었다. 또한 산화아연의 합성방법에 따른 전계방출 특성의 차이도 비교하였다.

• Ceramist
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• v.22 no.1
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• pp.36-55
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• 2019

Atomically thin two-dimensional (2D) nanomaterials, including transition metal dichalcogenides (TMDs), graphene, boron nitride, and black phosphorus, have opened up new opportunities for the next generation optoelectronics owing to their unique properties such as high absorbance coefficient, high carrier mobility, tunable band gap, strong light-matter interaction, and flexibility. In this review, photodetectors based on 2D nanomaterials are classified with respect to critical element technology (e.g., active channel, contact, interface, and passivation). We discuss key ideas for improving the performance of the 2D photodetectors. In addition, figure-of-merits (responsivity, detectivity, response speed, and wavelength spectrum range) are compared to evaluate the performance of diverse 2D photodetectors. In order to achieve highly reliable 2D photodetectors, in-depth studies on material synthesis, device structure, and integration process are still essential. We hope that this review article is able to render the inspiration for the breakthrough of the 2D photodetector research field.

• Proceedings of the Optical Society of Korea Conference
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• 2001.02a
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• pp.6-11
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• 2001

More than ten kinds of oxide thin films and their heterostructure have been successfully fabricated on SrTiO$_3$(001) substrates by laser molecular beam epitaxy (laser MBE). Measurements of atomic force microscopy (AFM), high-resolution transmission electron microscopy (HRTEM) and X-ray small-angle reflectivity reveal that the surfaces and interfaces are atom-level-smooth. The unit cell layers and the lattice structure are perfect. The electrical and optical properties of BaTiO$_3$-x thin films and BaTiO$_3$/SrTiO$_3$ (BTO/STO) superlattices were examined. The all-perovskite oxide P-N junctions have been successfully fabricated and the better I-V curves were observed.

• Journal of Magnetics
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• v.21 no.1
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• pp.6-11
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• 2016

The magnetic anisotropy energy (MAE) and the saturation magnetization $B_s$ of (110) $Fe_nCo_n$ heterostructures with n = 1, 2, and 3 are investigated in first-principles within the density functional theory by using the precise full-potential linearized augmented plane wave (FLAPW) method. We compare the results employing two different exchange correlation potentials, that is, the local density approximation (LDA) and the generalized gradient approximation (GGA), and include the spin-orbit coupling interaction of the valence states in the second variational way. The MAE is found to be enhanced significantly compared to those of bulk Fe and Co and the magnetic easy axis is in-plane in agreement with experiment. Also the MAE exhibits the in-plane angle dependence with a two-fold anisotropy showing that the $[1{\overline{I}}0]$ direction is the most favored spin direction. We found that as the periodicity increases, (i) the saturation magnetization $B_s$ decreases due to the reduced magnetic moment of Fe far from the interface, (ii) the strength of in-plane preference of spin direction increases yielding enhancement of MAE, and (iii) the volume anisotropy coefficient decreases because the volume increase outdo the MAE enhancement.