Atomic-scale Controlled Epitaxial Growth and Characterization of Oxide Thin Films

  • Yang, G.Z. (Laboratory of Optical Physics, Institute of Physics, Center for Condensed Matter Physics, Chinese Academy of Sciences) ;
  • Lu, H.B. (Laboratory of Optical Physics, Institute of Physics, Center for Condensed Matter Physics, Chinese Academy of Science) ;
  • Chen, F. (Laboratory of Optical Physics, Institute of Physics, Center for Condensed Matter Physics, Chinese Academy of Science) ;
  • Zhao, T. (Laboratory of Optical Physics, Institute of Physics, Center for Condensed Matter Physics, Chinese Academy of Science) ;
  • Chen, Z.H. (Laboratory of Optical Physics, Institute of Physics, Center for Condensed Matter Physics, Chinese Academy of Sciences)
  • Published : 2001.02.01

Abstract

More than ten kinds of oxide thin films and their heterostructure have been successfully fabricated on SrTiO$_3$(001) substrates by laser molecular beam epitaxy (laser MBE). Measurements of atomic force microscopy (AFM), high-resolution transmission electron microscopy (HRTEM) and X-ray small-angle reflectivity reveal that the surfaces and interfaces are atom-level-smooth. The unit cell layers and the lattice structure are perfect. The electrical and optical properties of BaTiO$_3$-x thin films and BaTiO$_3$/SrTiO$_3$ (BTO/STO) superlattices were examined. The all-perovskite oxide P-N junctions have been successfully fabricated and the better I-V curves were observed.

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