• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.2
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• pp.22-26
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• 2006

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.

• Proceedings of the KIEE Conference
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• 2006.10c
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• pp.597-599
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• 2006

In this paper, we propose an artificial intelligence method to compensate the nonlinearity error which occurs in the heterodyne laser interferometer. Some superior properties such as long measurement range, ultra-precise resolution and various system set-up lead the laser interferometer to be a practical displacement measurement apparatus in various industry and research area. In ultra-precise measurement such as nanometer or subnanometer scale, however, the accuracy is limited by the nonlinearity error caused by the optical parts. The feedforward neural network trained by back-propagation with a capacitive sensor as a reference signal minimizes the nonlinearity error and we demonstrate the effectiveness of our proppsed algorithm through some experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1195-1198
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• 2003

Micro former has been known as a useful tool for machining micro parts. It makes micro holes automatically with punches, a hole-shape die and material by rotation of crank shaft synchronously. Micro displacement in micro forming affects on the performance of machining because micro forming size is similar with its mechanical displacement. Therefore, the measurement of this micro displacement is essential to be guaranteed to obtain high forming precision in the whole machine as well as its devices. This paper addresses the development of a laser interferometer to measure micro displacement for a micro former. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. For the experiment, a laser probe is installed on the optical table with optical devices and a micro displacement generating device. The velocity decoding board is also added to calculate doppler shift frequency directly. Finally simple experiments are conducted to confirm its functional operation.

• Proceedings of the Optical Society of Korea Conference
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• 2009.10a
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• pp.161-162
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• 2009

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.3
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• pp.20-23
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• 2007

To calibrate precision autocollimators, the Korean Research Institute of Standards and Science (KRISS) has built a small angle generator using a laser interferometer. The system is based on a sine bar mechanism in which the angle is determined from the ratio of two lengths. The rotational angle is measured by the angle interferometer and the heterodyne laser interferometer detects the relative displacement of two retro-reflectors attached to the rotating arm. The distance between the two retro-reflectors of the laser angle interferometer is self-calibrated by an index table positioned on the rotating arm. The resolution of the system is 0.002 seconds, and the accuracy is better than 0.04 seconds within a measuring range of $\pm$1 degree. The small angle generator can also be used with an index table that can divide one circle into 1440 angles. The combined system can generate any angle over 360 degrees to an accuracy of 0.11 seconds.

• Korean Journal of Optics and Photonics
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• v.13 no.6
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• pp.530-536
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• 2002

The accurate measurements of thermal expansion coefficients is one of the most important techniques required not only in material science but also in industries. A high precision interferometric dilatometer, using acoustic optical modulator, has been constructed and its performance has been tested. The system consists of a double-path optical heterodyne interferometer and a radiant heating furnace. This provides highly accurate length measurement, and allows rapid heating and cooling method for the specimen. A three longitudinal mode frequency stabilized He-Ne laser, using the secondary beat frequency, is constructed. Its stability is found to be $5{\times}10^{-9}$. The uncertainty in the length measurement is estimated to be of nanometer order in the range between room temperature to 1100 K.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.234-236
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• 2006

Because of its long measurement range and ultra-precise resolution. the heterodyne laser interferometer systems are very common in various industry area such as semiconductor manufacturing. However the periodical nonlinearity property caused from frequency mixing is an obstacle to improve the high measurement accuracy in nanometer scale. In this paper to minimize the effect of nonlinearity, we propose an adaptive nonlinearity compensation algorithm. We first compute compensation parameters using least square (LS) with the capacitance displacement sensor as a reference input. We then update the parameters with recursive LS (RLS) while the values are optimized to modify the elliptical phase into circular one. Through comparison with some experimental results of laser system, we demonstrate the effectiveness of our proposed algorithm.

• Korean Journal of Optics and Photonics
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• v.8 no.2
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• pp.161-164
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• 1997

A new hybrid, heterodyne, fiber-optic electric field sensor scheme is presented. In this scheme, a dual polarization, dual frequency, stabilized He-Ne laser is used for the light source of the interferometer, Probe beam is delivered to the sensor head using polarization maintaining fiber. In the sensor head, $LiTaO_3$ electro-optic crystal is used for sensing element. Phase retardation is induced on the dual frquency, dual polarization probe beam due to applied electric field across the crystal. Induced phase retardation is demodulated by in-phase and quadrature demodulation technique. In this way, we can obtain optimum sensitivity for electric field measurement regardless a quasi-static phase difference between two polarization components.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.11 no.3
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• pp.204-210
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• 1986

In this paper, a new method is suggested to stabilize the frequency of semiconductor laser diode for heterodyne optical communication systems. In order to stabilize the frequency of semiconductor laser, the method of the injection current controal has been widely used, in which the laser frequency is locked to a F-P interferometer. By adding another servoloop to stabilize the output power of semiconductor laser, we could stabilize the laser frequency and the output power simultaneously and the frequency stability is improved by a factor of fice times.

• Korean Journal of Optics and Photonics
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• v.10 no.3
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• pp.233-236
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• 1999

We have constructed a narrow-linewidth single-longitudinal-mode unidirectional $Er^{3+}$ -doped fiber laser using a fiber Bragg grating incorporated by a three port optical circulator with a compact configuration. Using a conventional delayed self-heterodyne detection technique with Mach-Zehnder interferometer a linewidth of 5 kHz was measured. In a single-longitudinal-mode operation, output power of up to 2.7 mW at 1548 nm were obtained for a launched pump power of 43 mW at 980 nm.