• Title/Summary/Keyword: Heating Electrode

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비정질 실리콘 박막의 주울 가열 유도 결정화 공정 중 발생하는 Arc-Instability 기구 규명 및 방지책

  • Hong, Won-Ui;No, Jae-Sang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.375-375
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    • 2012
  • 최근 차세대 평판 디스플레이의 응용에 많은 주목을 받고 있는 AMOLED의 경우 전류구동 방식이기 때문에 a-Si TFT 보다는 LTPS-TFT가 요구되며, 대면적 기판에서의 결정립 크기의 균일도가 매우 중요한 인자이다. 비정질 실리콘 박막 상부 혹은 하부에 도전층을 개재하고, 상기도전층에 전계를 인가하여 그것의 주울 가열에 의해 발생한 고열에 의해 비정질 실리콘 박막을 급속 고온 고상 결정화하는 방법에 관한 기술인 JIC (Joule-heating Induced Crystallization) 결정화 공정은 기판 전체를 한번에 결정화 하는 방법이다. JIC 결정화 공정에 의하여 제조된 JIC poly-Si은 결정립 크기의 균일성이 우수하며 상온에서 수 micro-second내에 결정화를 수행하는 것이 가능하고 공정적인 측면에서도 별도의 열처리 Chamber가 필요하지 않는 장점을 가지고 있다. 그러나 고온 고속 열처리 방법인 JIC 결정화 공정을 수행 하면 Arc에 의하여 시편이 파괴되는 현상이 발견되었다. 본 연구에서는 Arc현상의 원인을 파악하기 위해 전압 인가 조건 및 시편 구조 조건을 변수로 결정화실험을 진행하였다. ARC가 발생하는 Si층과 Electrode 계면을 식각 분리하여 Electrode와 Si층 사이의 계면이 형성되지 않는 조건에서 전계를 인가하는 실험을 통하여 JIC 결정화 공정 중 고온에 도달하게 되면, a-Si층이 변형되어 형성된 poly-Si층이 전도성을 띄게 되고 인가된 전압이 도전층과 Poly-Si 사이에 위치한 $SiO_2$의 절연파괴(Dielectric breakdown)전압보다 높을 경우 전압 인가 방향에 수직으로 $SiO_2$가 절연 파괴되며 면저항 형태의 전도층의 단락이 진행되며 전도층이 완전히 단락되는 순간 Arc가 발생한다는 것을 관찰 할 수 있었다. 본 실험의 연구 결과를 바탕으로 Arc 발생을 방지하는 다양한 구조의 Equi-Potential 방법이 개발되었다.

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A Study of the Weld Strength of Extru-Rivet Spot Welding Using Electrodes Heated by Electric Resistance (전기저항가열 압출점접합공정에 있어서 접합강도에 관한 연구)

  • Lee, S.J.;Jin, I.T.
    • Transactions of Materials Processing
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    • v.22 no.4
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    • pp.189-195
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    • 2013
  • In this study, the weld strength of extru-rivet spot welding was investigated by simulation and experiment. In order to obtain hot plasticity flow bonding of the two plates by a single rivet, electrodes are used for heating of the two plates and the rivet by electric resistance. Because weld strength is influenced by the temperature in the weld zone, the diameter of the electrodes and the amount of current supplied to the electrodes are important variables. For the simulation, heat distribution and weld strength were calculated using DEFORM-3D. The weld strength in the weld zone was calculated for various values of the experimental parameters. The simulation results showed that the weld strength was the highest when the weld current was 37kA, the electrode diameter was 12mm, and the welding frequency was 90cycle. Aluminum 5052 was used for the experimental study. A total of three aluminum plates, two welding plates with 1mm thickness and one plate with 2mm thickness for the inserting rivet, were used for the experimental extru-rivet spot welding.

Analysis of the luminous efficacy improvement in Full HD ac Plasma Display Panel

  • Bae, Hyun-Sook;Whang, Ki-Woong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.29-32
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    • 2007
  • We analyzed the effect of cell resolution on the luminous efficacy through three-dimensional numerical simulation to understand the inherent discharge mechanism change in the plasma display panel. As the resolution increases from VGA to Full HD, the luminous efficacy decreases. With higher Xe content, VUV generation efficacy of Full HD becomes much lower than those of VGA or XGA cells, due to the increased plasma loss and lower electron heating. However a long electrode gap $140{\mu}m$ in Full HD cell with Ne-Xe [20%] results in the high luminous efficacy comparable to that of the XGA cell with $60{\mu}m$ gap. When comparing the effects of Xe content variation on the luminous efficacy of two different subpixel types, i. e., SDE (Segmented electrode in Delta color arrayed, Enclosed subpixel) [1] and conventional stripe barrier type in the XGA and Full HD cells, the luminous efficacy of SDE structure shows higher improvement in Full HD resolution compared with that of conventional type XGA cell, whose cause is identified as the reduced plasma loss.

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Voltage-Controlled Photonic RF True-Time Delay Using a Tapered Chirped Fiber Bragg Grating (테이퍼 구조를 갖는 광섬유 브래그 격자를 이용한 전압에 의하여 제어 가능한 광학적 실시간 지연 소자)

  • Chae, Ho-Dong;Lee, Sang-Shin
    • Korean Journal of Optics and Photonics
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    • v.16 no.2
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    • pp.133-137
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    • 2005
  • A photonic RF true-time delay using a tapered chirped fiber Bragg grating coated with a heating electrode has been proposed and fabricated. For an RF signal carried over an optical signal, the time delay has been achieved by controlling the voltage applied to the electrode and thus adjusting its reflection positions from the fiber grating through the thermooptic effect. It features continuous voltage-controlled operation, requiring no mechanical perturbation and no moving parts. The measured time delay was about 120 ps with the electrical power consumption of $250{\cal}mW$.

Hot carrier induced device degradation in amorphous InGaZnO thin film transistors with source and drain electrode materials (소스 및 드레인 전극 재료에 따른 비정질 InGaZnO 박막 트랜지스터의 소자 열화)

  • Lee, Ki Hoon;Kang, Tae Gon;Lee, Kyu Yeon;Park, Jong Tae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.1
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    • pp.82-89
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    • 2017
  • In this work, InGaZnO thin film transistors with Ni, Al and ITO source and drain electrode materials were fabricated to analyze a hot carrier induced device degradation according to the electrode materials. From the electrical measurement results with electrode materials, Ni device shows the best electrical performances in terms of mobility, subthreshold swing, and $I_{ON}/I_{OFF}$. From the measurement results on the device degradation with source and drain electrode materials, Al device shows the worst device degradation. The threshold voltage shifts with different channel widths and stress drain voltages were measured to analyze a hot carrier induced device degradation mechanism. Hot carrier induced device degradation became more significant with increase of channel widths and stress drain voltages. From the results, we found that a hot carrier induced device degradation in InGaZnO thin film transistors was occurred with a combination of large channel electric field and Joule heating effects.

Fabrication of Combined Probes for Interstitial hyperthermia and Brachyradiotherapy (고 선량율 근접 및 온열치료 병용 삽입관의 제작과 특성)

  • Chu, Sung-Sil;Kim, Sung-Kyu
    • Proceedings of the Korean Society of Medical Physics Conference
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    • 2004.11a
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    • pp.85-87
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    • 2004
  • We fabricated flexible thermoradiotherapy probes to alternated combination with Interstitial hyperthermia and Brachyradiotherapy thermoradiotherapy probe was coated by gold plate on polyethylene brachytherapy probe. When Agar phantom was heated 15 minute with 30 W radiofrequency power, temperature increased as 5oC for polyethylene probe and 20oC for gold coated polyethylene probe. We observed that the 1 cm square array would heat a volume with a 1.25 cm radius circular field cross section to therapeutic temperatures (90% relative SAR using Tm) and the 2 cm square array with a 1.75 cm radius rectangular field with central inhomogeneity. With 2 cm long electrode implants, we observed that the 1 cm square array would heat a 3 cm long sagittal section to therapeutic temperature (90% relative SAR using Tm). The histopathological changes associated with RF heating of normal canine brains have been correlated with thermal distributions. RF needle electrode heating was applied for 50 min to generate tissue temperatures of 43${\circ}$C. We obtained a quarter of the heated tissue material immediately after heating and sacrificed at intervals from 7${\sim}$30 days. The acute stage was demonstrated by liquefactive necrosis, pyknosis of neuronal element in the gray matter. Mild gliosis occurring around the necrosis was demonstrated in the last sacrificed (days30)canine brain.

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Effect of defects on lifetime of silicon electrodes and rings in plasma etcher (플라즈마 에쳐용 실리콘 전극과 링의 수명에 미치는 결함의 영향)

  • Eum, Jung-Hyun;Chae, Jung-Min;Pee, Jae-Hwan;Lee, Sung-Min;Choi, Kyoon;Kim, Sang-Jin;Hong, Tae-Sik;Hwang, Choong-Ho;Ahn, Hak-Joon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.20 no.2
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    • pp.101-105
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    • 2010
  • Silicon electrode and ring in a plasma etcher those are in contact with harsh plasma suffer from periodic heating and cooling during their lifetime. This causes the silicon components failure due to thermal stress remaining the persistent slip bands (PSBs) on their surfaces. The factors that determine the lifetime of silicon electrode and ring were discussed with respect to silicon ingot. The impurity level and the average defect concentration measured with glow discharge mass spectrometer (GDMS) and microwave photo-conductance decay (${\mu}$-PCD) were compared with the grade of silicon ingots those are divided to slip-free and slip-allowed ingot. Some silp-allowed samples showed planar defects along <110> direction on {001} surface. The role of these defects was suggested from the viewpoint of the lifetime of silicon components.

Improving Power Conversion Efficiency and Long-term Stability Using a Multifunctional Network Polymer Membrane Electrolyte; A Novel Quasi-solid State Dye-sensitized Solar Cell

  • Gang, Gyeong-Ho;Gwon, Yeong-Su;Song, In-Yeong;Park, Seong-Hae;Park, Tae-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.484.2-484.2
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    • 2014
  • There are many efforts to improving the power conversion efficiencies (PCEs) of dye-sensitized solar cells (DSCs). Although DSCs have a low production cost, their low PCE and low thermal stability have limited commercial applications. This study describes the preparation of a novel multifunctional polymer gel electrolyte in which a cross-linking polymerization reaction is used to encapsulate $TiO_2$ nanoparticles toward improving the power conversion efficiency and long-term stability of a quasi-solid state DSC. A series of liquid junction dye-sensitized solar cells (DSCs) was fabricated based on polymer membrane encapsulated dye-sensitized $TiO_2$ nanoparticles, prepared using a surface-induced cross-linking polymerization reaction, to investigate the dependence of the solar cell performance on the encapsulating membrane layer thickness. The ion conductivity decreased as the membrane thickness increased; however, the long term-stability of the devices improved with increasing membrane thickness. Nanoparticles encapsulated in a thick membrane (ca. 37 nm), obtained using a 90 min polymerization time, exhibited excellent pore filling among $TiO_2$ particles. This nanoparticle layer was used to fabricate a thin-layered, quasi-solid state DSC. The thick membrane prevented short-circuit paths from forming between the counter and the $TiO_2$ electrode, thereby reducing the minimum necessary electrode separation distance. The quasi-solid state DSC yielded a high power conversion efficiency (7.6/8.1%) and excellent stability during heating at $65^{\circ}C$ over 30 days. These performance characteristics were superior to those obtained from a conventional DSC (7.5/3.5%) prepared using a $TiO_2$ active layer with the same thickness. The reduced electrode separation distance shortened the charge transport pathways, which compensated for the reduced ion conductivity in the polymer gel electrolyte. Excellent pore filling on the $TiO_2$ particles minimized the exposure of the dye to the liquid and reduced dye detachment.

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Performance of Electric Double Layers Capacitor Using Activated Carbon Materials from Rice Husk as Electrodes

  • Nguyen, Tuan Dung;Ryu, Jae Kyung;Bramhe, Sachin N.;Kim, Taik-Nam
    • Korean Journal of Materials Research
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    • v.23 no.11
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    • pp.643-648
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    • 2013
  • Activated carbon (AC) was synthesized from rice husks using the chemical activation method with KOH, NaOH, a combination of (NaOH + $Na_2CO_3$), and a combination of (KOH + $K_2CO_3$) as the chemical activating reagents. The activated carbon with the highest surface area (around $2000m^2/g$) and high porosity, which allows the absorption of a large number of ions, was applied as electrode material in electric double layer capacitors (EDLCs). The AC for EDLC electrodes is required to have a high surface area and an optimal pore size distribution; these are important to attain high specific capacitance of the EDLC electrodes. The electrodes were fabricated by compounding the rice husk activated carbons with super-P and mixed with polyvinylidene difluoride (PVDF) at a weight ratio of 83:10:7. AC electrodes and nickel foams were assembled with potassium hydroxide (KOH) solution as the electrolyte. Electrochemical measurements were carried out with a three electrode cell using 6 M KOH as electrolyte and Hg/HgO as the reference electrode. The specific capacitance strongly depends on the pore structure; the highest specific capacitance was 179 F/g, obtained for the AC with the highest specific surface area. Additionally, different activation times, levels of heating, and chemical reagents were used to compare and determine the optimal parameters for obtaining high surface area of the activated carbon.

Physical and Electrical Properties of Carbon Black/PVDF Composite Electrode as Ohmic Joule Heater (면상발열체용 Carbon Black/PVDF 복합전극의 물리 및 전기적 특성)

  • Doh, Chil-hoon;Jin, Bong-soo;Moon, Seong-in;Chung, Young-Dong;Jeong, Dong-yong;Bang, Young-dal
    • Applied Chemistry for Engineering
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    • v.20 no.6
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    • pp.692-695
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    • 2009
  • Ohmic joule heating electrodes were developed for the electrical heater of the floor of a room. A composite slurry of super pure black and polyvinylidene fluoride with/without the additives of multi-walled carbon nanotube or kindney stone powder was coated as a thin film on the polyethylene terephthalate film. The performances of heating electrodes were evaluated checking specific conductivity, adhesion strength and hardness. The addition of kindney stone powder increases specific resistance and hardness in a small extent. However, the addition of carbon nanotube increases specific conductivity and hardness. The properties of various compositions of ohmic joule heating electrodes were evaluated.