Design of Low Consume Power Ty7e Micro-heaters Using SOl and Trench Structures (SOI 및 TRENCH 구조를 이용한 저소비 전력형 미세발열체의 설계)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1999.11a
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- pp.350-353
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- 1999