• Title/Summary/Keyword: HNB

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영구자석 삽입형 Lisitano Coil을 이용한 Cu 배선용 대면적 ECR 플라즈마 소스 개발

  • Jang, Su-Uk;Yu, Hyeon-Jong;Jeong, Hyeon-Yeong;Jeong, Yong-Ho;Lee, Bong-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.227-227
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    • 2011
  • 최근 ECR (Electron Cyclotron Resonance) 가열에 의한 플라즈마 소스는 고밀도 플라즈마를 유지하면서 고진공 운전을 동시에 만족시켜 다양한 플라즈마 응용 분야에서 많은 관심을 받고 있다. 그 중 HNB (Hyperthermal Neutral Beam)를 이용한 플라즈마 소스에 있어서 ECR 플라즈마 소스는 고진공에서도 높은 플라즈마 밀도를 유지할 수 있기 때문에 기존의 HNB 플라즈마 소스인 ICP (Inductive Coupled Plasma)의 운전압력의 한계점을 해결하여 높은 HNB 방향성(~1mTorr이하)을 가진 고밀도플라즈마를 발생시킬 수 있을 것이라 제안되었다. ECR 플라즈마가 HNB 소스로서 적합하기 위해서는 플라즈마 소스의 대면적화와 균일화가 동시에 이루어져야 한다. 본 연구에서는 이러한 요구에 부합하여 Lisitano coil를 이용한 균일한 대면적 ECR 플라즈마 소스를 설계하였다. 최적의 설계와 진단을 위한 Lisitano Coil antenna 내의 B-field 분포 시뮬레이션과 Langmuir Probe 진단이 이루어졌다.

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중성 입자빔 소스의 플라즈마 limiter의 특성 연구

  • Kim, Seong-Bong;Kim, Dae-Cheol;Gu, Dong-Jin;Yu, Seok-Jae;Jo, Mu-Hyeon;Nam, Gung-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.441-441
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    • 2010
  • Hyperthermal neutral beam (HNB)은 박막 성장에 필요한 에너지와 반응 입자들을 동시에 공급할 수 있기 때문에 특히, 저온에서 박막을 성장시킬 때 매우 유용하다. 이와 같은 목적으로 race track 형태의 자기장 구조를 갖고 있는 2.45 GHz electron cyclotron resonance (ECR) plasma를 이용한 HNB 소스를 개발하였다. HNB 소스에서 인출되는 입자들은 중성 입자 뿐만 아니라 이온이나 전자와 같은 하전 입자들로 구성되어 있다. 그러나 양질의 HNB를 얻기 위해서는 하전 입자들의 구성 비율을 최소화해야 한다. HNB 소스는 하전 입자의 구성 비율을 1 % ($1{\mu}A/cm^2$) 이하가 되도록 설계되었다. 이것을 위해서 영구 자석의 자기장을 이용한 plasma limiter를 설계하였다. 대부분의 전자는 limiter 앞에 형성된 자기장의 구조와 반응하여 주로 gradient B drift와 curvature drift를 통하여 차단되고, 이온은 로렌츠 힘을 받아 빔 축으로 부터 벗어나도록 하였다. Limiter의 특성을 연구하기 위해서 정전탐침을 limiter에서 빔 축 방향으로 이동시키면서 I-V 곡선과 이온 포화 전류 및 전자 포화 전류를 측정하였다. 측정 결과를 바탕으로 plasma limiter의 성능을 검증하였고 문제점을 논의하였다.

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Novel deposition technology for nano-crystalline silicon thin film at low temperature by hyper-thermal neutral beam assisted CVD system

  • Jang, Jin-Nyoung;Song, Byoung-Chul;Oh, Kyoung-Suk;Yoo, Suk-Jae;Lee, Bon-Ju;Choi, Soung-Woong;Park, Young-Chun;Hong, Mun-Pyo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1025-1027
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    • 2009
  • Novel low temperature deposition process for nano-crystalline Si thin film is developed with the hyper-thermal neutral beam (HNB) technology. By our HNB assisted CVD system, the reactive particles can induce crystalline phase in Si thin films and effectively combine with heating effect on substrate. At low deposition temperature under $80^{\circ}C$, the HNB with proper incident energy controlled by the reflector bias can effectively enhance the nano-crystalline formation in Si thin film without any additional process. The electrical properties of Si thin films can be varied from a-Si to nc-Si according to change of HNB energy and substrate temperature. Characterization of these thin films with conductivity reveal that crystalline of Si thin film can increase by assist of HNB with appropriate energy during low temperature deposition. And low temperature prcoessed nc-Si TFT performance has on-off ratio as order 5.

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Deposition of Si film and properties of interface for HIT cell by hyperthermal neutral beam (Hyperthermal 중성빔을 이용한 HIT cell용 Si 박막 형성 및 계면특성)

  • Oh, Kyoung-Suk;Choi, Sung-Woong;Kim, Dae-Chul;Kim, Jong-Sik;Kim, Young-Woo;Yoo, Suk-Jae;Hong, Mun-Pyo;Park, Young-Chun;Lee, Bon-Ju
    • 한국신재생에너지학회:학술대회논문집
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    • 2008.05a
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    • pp.394-396
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    • 2008
  • 기존의 PECVD에서 문제시 되고 있는 플라즈마에 의한 박막손상과 $300^{\circ}C$ 이상의 증착온도 등의 단점을 보완한 증착 기술로 중성입자 빔 (Hyper-thermal neutral beam ; HNB)을 이용한 저온 증착방법에 대한 연구를 진행하였다. 중성빔을 이용하여 HNB sputtering 방법과 $SiH_4$와 Ar, $H_2$ 가스를 이용한 HNB CVD 방법으로 a-Si 박막 제작에 대한 연구를 진행하였고, HIT(heterojunction with Intrinsic Thin layer) cell 태양전지를 만들고자 기본적인 박막 증착과 박막 특성 및 계면특성 등의 분석을 실시하였다. 유리기판과 p-type Si 기판 위에 a-Si 및 nc-Si 박막을 증착하였으며, TEM, FTIR, Raman, IV 측정 등을 통해 그 특성을 분석하여 HNB의 특성 및 효과를 규명하였다.

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Change in Community Composition and Soil Carbon Stock Along Transitional Boundary in a Sub-Tropical Forest of Garhwal Himalaya

  • Kumar, Munesh;Kumar, Manish;Saleem, Sajid;Prasad, Sunil;Rajwar, G.S.
    • Journal of Forest and Environmental Science
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    • v.29 no.3
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    • pp.194-199
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    • 2013
  • The aim of the present study was to assess the effect of transitional boundary on community composition and soil carbon stock. Five vegetation types were recognized horizontally along the transitional strip based on the dominance of tree species i.e., Pure Anogeissus latifolia forest (P.AL), mixed Pinus roxburghii and Lannea coromandelica forest (M.PR&LC), pure Pinus roxburghii forest (P.PR), mixed Pinus roxburghii and Lannea coromandelica (M.PR&LC) and pure Anogeissus latifolia forest (P.AL). The results revealed that Anogeissus latifolia was reported dominant tree in the outer transitional boundaries of the forest, which reduced dominance of trees towards middle where Pinus roxburghii was found dominant. The soil carbon stock was reported higher in the Anogeissus latifolia dominant forest and reduced with the dominance of Pinus roxburghii in the middle site. Both the species are growing close to one another and competing for survival, but the aggressive nature of Anogeissus latifolia particular in this region may change new growth of Pinus roxburghii and will enhance soil carbon stock. But high anthropogenic pressure on Anogeissus latifolia tree species could be limited chance to further its flourish.

Species Composition and Diversity in Mid-altitudinal Moist Temperate Forests of the Western Himalaya

  • Gairola, Sumeet;Sharma, C.M.;Suyal, Sarvesh;Ghildiya, S.K.
    • Journal of Forest and Environmental Science
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    • v.27 no.1
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    • pp.1-15
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    • 2011
  • The present study was undertaken in middle altitudinal (1500 to 2500 masl) moist temperate forest of Mandal-Chopta area in the Garhwal region of Uttarakhand, India. The aim of the present study was to assess the variation in species composition and diversity in different vegetation layers viz. herb, shrub and tree, at different altitudes. Shannon-Wiener diversity index ($\bar{H}$), $Nha^{-1}$, total basal cover per hectare (G), Simpson concentration of dominance, Pielou Equitability, species richness (SR), Margalef index, Menheink index of species richness and ${\beta}$-diversity were calculated to understand community composition. Tree G ranged from 84.25 to 35.08 $m^2ha^{-1}$ and total stem density varied from 990 to 1470 Nha-1. Total SR (herb, shrub and trees) among different forest types ranged between 31 and 58. Maximum G of herb and shrub layers was recorded at lower altitudes between 1500 and 1650 masl. ${\beta}$-diversity was higher in herb layers as compared to tree and shrub layers. Dominance-diversity curves were also drawn to ascertain resource apportionment among various species in different forest types. Values of species diversity, $\bar{H}$, $Nha^{-1}$ and G were higher in the study area as compared to similar forests growing in other parts of Uttarakhand Himalaya.

Physical Properties of Soils in Relation to Forest Composition in Moist Temperate Valley Slopes of the Central Western Himalaya

  • Sharma, C.M.;Gairola, Sumeet;Ghildiyal, S.K.;Suyal, Sarvesh
    • Journal of Forest and Environmental Science
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    • v.26 no.2
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    • pp.117-129
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    • 2010
  • The present study was undertaken in moist temperate forest of Mandal-Chopta area in the Garhwal region of Uttarakhand, India. The aim of the present study was to assess the physical properties of soils in relation to the forest structure and composition. Twelve forest types according to the altitude, slope aspect and species compositions were selected for the study. Physical properties of soil i.e., soil colour, soil texture (per cent of sand, silt and clay), moisture content, water holding capacity, porosity, bulk density (gm/$cm^3$) and void ratio were analyzed for three different depths viz., (i) 'upper' (0-10 cm), (ii) 'middle' (11-30 cm) and (iii) 'lower' (31-60 cm) in all the selected forest types. Phytosociological and diversity parameters viz. total basal cover ($Gha^{-1}$), stem density ($Nha^{-1}$), tree species richness, Simpson concentration of dominance and Shannon-Wiener diversity index were also calculated for each forest type. This study also provides the comparisons between the results of physical analysis of the present study with numerous other previous studies in the temperate Himalayan region of the Uttarakhand.

COINCIDENCE THEOREMS VIA CONTRACTIVE MAPPINGS IN ORDERED NON-ARCHIMEDEAN FUZZY METRIC SPACES

  • Prasad, Gopi;Tomar, Anita;Dimri, Ramesh Chandra;Bartwal, Ayush
    • The Pure and Applied Mathematics
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    • v.27 no.4
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    • pp.187-205
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    • 2020
  • In this article, we prove coincidence point theorems for comparable 𝜓-contractive mappings in ordered non-Archimedean fuzzy metric spaces utilizing the recently established concept of 𝓣-comparability and relatively weaker order theoretic variants. With a view to show the usefulness and applicability of this work, we solve the system of ordered Fredholm integral equations as an application. In the process, this presentation generalize and improve some prominent recent results obtained in Mihet [Fuzzy Sets Syst., 159 (6), 739-744, (2008)], Altun and Mihet [ Fixed Point Theory Appl. 2010, 782680, (2010)], Alam and Imdad [Fixed Point Theory, 18(2), 415-432, (2017)] and several others in the settings of partially ordered non-Archimedean fuzzy metric spaces.

Development of Plasma Damage Free Sputtering Process for ITO Anode Formation Inverted Structure OLED

  • Lee, You-Jong;Jang, Jin-N.;Yang, Ie-Hong;Kim, Joo-Hyung;Kwon, Soon-Nam;Hong, Mun-Pyo;Kim, Dae-C.;Oh, Koung-S.;Yoo, Suk-Jae;Lee, Bon-J.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1323-1324
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    • 2008
  • We developed the Hyper-thermal Neutral Beam (HNB) sputtering process as a plasma damage free process for ITO top anode deposition on inverted Top emission OLED (ITOLED). For examining the effect of the HNB sputtering system, Inverted Bottom emission OLEDs (IBOLED) with ITO top anode electrode were fabricated; the characteristics of IBOLED using HNB sputtering process shows significant suppression of plasma induced damage.

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FIXED POINTS OF SET-VALUED MAPPINGS IN RELATIONAL METRIC SPACES

  • Prasad, Gopi;Dimri, Ramesh Chandra;Kukreti, Shivani
    • The Pure and Applied Mathematics
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    • v.28 no.3
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    • pp.253-266
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    • 2021
  • In this paper, we generalize the notion of comparable set-valued mappings by introducing two types of 𝓡-closed set-valued mappings and utilize these to obtain an analogue of celebrated Mizoguchi and Takahashi fixed point theorem in relational metric spaces. To annotate the claims and usefulness of such findings, we prove fixed point results for both set-valued and single-valued mappings and validate the assertions with the help of examples. In this way, these investigations extend, modify and generalize some prominent recent fixed point results obtained by Tiammee and Suantai [24], Amini-Harandi and Emami [4], Prasad and Dimri [19] and several others in the settings of relational metric spaces.