• Nuclear Medicine and Molecular Imaging
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• v.42 no.3
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• pp.249-252
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• 2008

• Nuclear Medicine and Molecular Imaging
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• v.43 no.1
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• pp.87-89
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• 2009

• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.3
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• pp.135-145
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• 2011

Accurate process characterization and optimization are the first step for a successful advanced process control (APC), and they should be followed by continuous monitoring and control in order to run manufacturing processes most efficiently. In this paper, process characterization and recipe optimization methods with multiple outputs are presented in high density plasma-chemical vapor deposition (HDP-CVD) silicon dioxide deposition process. Five controllable process variables of Top $SiH_4$, Bottom $SiH_4$, $O_2$, Top RF Power, and Bottom RF Power, and two responses of interest, such as deposition rate and uniformity, are simultaneously considered employing both statistical response surface methodology (RSM) and neural networks (NNs) based genetic algorithm (GA). Statistically, two phases of experimental design was performed, and the established statistical models were optimized using performance index (PI). Artificial intelligently, NN process model with two outputs were established, and recipe synthesis was performed employing GA. Statistical RSM offers minimum numbers of experiment to build regression models and response surface models, but the analysis of the data need to satisfy underlying assumption and statistical data analysis capability. NN based-GA does not require any underlying assumption for data modeling; however, the selection of the input data for the model establishment is important for accurate model construction. Both statistical and artificial intelligent methods suggest competitive characterization and optimization results in HDP-CVD $SiO_2$ deposition process, and the NN based-GA method showed 26% uniformity improvement with 36% less $SiH_4$ gas usage yielding 20.8 ${\AA}/sec$ deposition rate.

• The Journal of the Korea institute of electronic communication sciences
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• v.5 no.1
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• pp.81-87
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• 2010

In this paper, we have fabricated $SiO_2$ oxidation thin films by HDP-CVD(high density plasma-chemical vapor deposition) method for passivation layer or barrier layer of OLED(organic light emitting diode). We have control and estimate the deposition rate and relative index characteristics with process parameters and get optimized conditions. They are gas flow rate($SiH_4:O_2$=30:60[sccm]), 70 [mm] distance from source to substrate and no-bias. The WVTR(water vapor transmission rate) is 2.2 [$g/m^2$_day]. Therefore fabricated thin film can not be applied as passivation layer or barrier layer of OLED.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.1
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• pp.31-38
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• 2002

In order to improve the 0.35 $mutextrm{m}$-via hole etching process the etching characteristic of the gas $C_2F_{6}$ has been analyzed. The samples were triple-layer films(TEOS/SOG/TEOS) on 8-inch wafers and the orthogonal array matrix technique was used for the process. The equipment for etching was the transformer coupled plasma (TCP) source which is a type of high density plasma(HDP). This experiment showed the etching rate for $C_2F_{6}$ was 0.8 $mutextrm{m}$/min-1.1 $mutextrm{m}$/min and the measured uniformity was under $pm$6.9% in the matrix window. The CD skew comparison between pre and post-etching was under 10% which is an outstanding results in the window of profile in anisotropic etching. There was no problem in C2F6 with the flow rate of 20sccm, but when 14sccm of $C_2F_{6}$ was supplied there was a recess problem on the inner wall of SOG film. Consequently the etching characteristic of $C_2F_{6}$ shows a fast etching rate and a very wide process window in HDP TCP.

• Journal of the Korea Society of Computer and Information
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• v.27 no.11
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• pp.157-163
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• 2022

In this paper, we propose to develop a Bluetooth Health Device Profile (HDP)-based smartphone system to utilize it for early detection of urinary tracts diseases that occur a lot in cats. Therefore, based on Bluetooth HDP, we developed a device and mobile application system (Mycatner®) that can monitor cat activity, toilet usage, urinary disease, and health status, and evaluated its availability to monitor cat health status. The specific feature of this system is that it can measure the number of cat urination frequencies to identify abnormal conditions suspected of urinary tract diseases early, and second, it can be tested with urine test paper and shared with animal hospitals, reducing time and cost. As a result, it is evaluated that the developed device capable of wireless monitoring the urinary system health status of cats is the first in our knowledge.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.41-41
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• 2003

비정질 실리콘 박막은 단결정 실리콘에 비해 저가이고 저온형성이 가능하여, 대면적/고효율의 실리콘 박막 태양전지 제작에 응용되고 있다. 태양전지에 적용하기 위해서는 우수한 암전류 및 광전류 특성을 나타내야 하고, 광학적 밴드 갭 특성 또한 중요하다. 본 연구에서는 HDP(High Density Plasma) PECVD 장비를 이용하여 나노결정립 및 비정질 실리콘 박막을 형성하고, 각 박막의 전기적, 광학적 특성을 측정, 평가하였다. 나노결정립 및 비정질 실리콘 박막의 전기적 특성은 Keithley 4200을 이용하여 암전류를 특성을 측정하였고, Solar Simulator를 이용하여 AM1.5, 100mW/$\textrm{cm}^2$ 조건에서 광전류 특성을 측정하였다. 또한, Spectrometer를 이용하여 박막의 투과율을 측정하여 Tauc Plot을 통해 광학적 밴드 갭을 계산하였다. 본 연구에서 형성된 비정질 실리콘 박막은 -$10^{6}$의 우수한 Photoresponse($\sigma$$_{ph}$ $\sigma$$_{d}$) 특성을 나타내었다. 또한, 비정질 실리콘 박막 내에 나노결정립이 형성됨에 따라 암전류는 증가하고, 광학적 밴드 갭도 증가하는 것을 알 수 있었다. 이렇게 밴드 갭이 증가된 나노결정립 실리콘 박막은 태양전지의 Window 층에 적용하면 효율 증가에 크게 기여할 것으로 판단된다.

• Journal of the Korean Society of Safety
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• v.31 no.5
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• pp.109-116
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• 2016

This study presents the results of experiments to investigate the effect of polymer type and curing temperature on the mechanical properties of polymer mortar. Setting time of two types of polymers, hardening-delayed polymer(HDP) and rapid hardening polymer(RHP), was tested to check the working time. Additionally, flexural strength, compressive strength, and splitting tensile strength was investigated for mortars using these polymers. From these results, it was confirmed that, irrespective to curing temperature, RHP mortar at the curing age of 24h develops the similar mechanical properties to maximum properties and HDP mortar is more sensitive to the curing temperature. In addition, it should be noted that RHP mortar and HDP mortar are suitable in winter and summer, respectively.

• Proceedings of the Korean Society of Computer Information Conference
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• 2013.07a
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• pp.361-363
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• 2013

본 논문에서는 최근 스마트 헬스케어가 보건의료서비스에 특화시켜 환자와 의사가 직 간접적으로 진료를 할 수 있게끔 하는 스마트폰 환경에서의 원격진료 서비스가 부각됨에 따라 유무선 통신 인프라를 기반으로 노인, 만성질환자, 회복중인 환자나 수술 후 환자 그리고 일반인 등이 일상생활을 하면서 불편하거나, 거추장스럽지 않게 신체 정보를 측정하고 건강상태의 변화에 대한 전문가의 진단을 즉각적으로 제공하기 위해 Bluetooth HDP(Health Device Profile)을 통해 IEEE11073 PHD 표준 기반의 홈 헬스케어 의료기기 연결성을 보장하며, HL7 CDA 기반의 정보 전달 구조로 의료진뿐만 아니라 다양한 스마트 앱 어플리케이션 간의 융합을 가능하게 하는 스마트 헬스케어 솔루션을 설계하고자 한다.

• Bulletin of the Korean Chemical Society
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• v.25 no.5
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• pp.704-710
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• 2004

A poly(1-hexyl-3,4-dimethyl-2,5-pyrrolylene) (PHDP) was prepared and its luminescence in tetrahydrofuran (THF) was studied. When PHDP is excited by UV light, it produces very strong blue luminescence. The quantum yield of PHDP (Q = 36.9%) is much greater than that of the monomer, 1-hexyl-3,4-dimethylpyrrole (HDP) with Q = 0.61%. The principal luminescence of PHDP has a single decay component with ca. 1 ns, whereas the decay of HDP is complicated. The molecular structure and conformational behavior of HDP and the oligomers up to trimer have been also determined by ab initio Hartree-Fock (HF/6-31$G^{**}$), density functional theory (DFT-B3LYP/6-31$G^{**}$), and semiempirical (ZINDO) methods. According to the results of calculations, it is proposed that the enhanced quantum yield of the polymer PHDP results mostly from the ${\pi}$-conjugation between neighboring pyrrole rings.