• Proceedings of the Korean Nuclear Society Conference
• /
• 2001.10a
• /
• pp.364.1-364
• /
• 2001

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 1998.05a
• /
• pp.38-38
• /
• 1998

• Bulletin of the Korean Chemical Society
• /
• v.16 no.8
• /
• pp.699-703
• /
• 1995

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.179-179
• /
• 2012

Low pressure radio-frequency glow discharges are investigated using theoretical modeling and various experimental diagnostic methods. In the calculations, global models and transformer models are developed to understand the chemical kinetics as well as the electrical properties such as the effective collision frequency, the heating mechanism and the power transferred to the plasma electrons. In addition, Boltzmann equation solver is used to compensate the effect of the electron energy distribution function (EEDF) shape in the global model, and the general expression of energy balance for non-Maxwellian electrons is developed. In the experiments, a number of traditional plasma diagnostic methods are used to compare with calculated results such as Langmuir probe, optical emission spectroscopy (OES), optical absorption spectroscopy (OAS) and two-photon absorption laser-induced fluorescence (TALIF). These theoretical and experimental methods are applied to understand several interesting phenomena in low pressure ICP discharges. The chemical and physical properties of low pressure ICP discharges are described and the applications of these methods are discussed.

• Journal of the Korean Vacuum Society
• /
• v.13 no.2
• /
• pp.79-85
• /
• 2004

Secondary ion mass spectrometry(SIMS) and glow discharge mass spectrometry(GDMS) were used to determine the impurity concentrations of hydrogen, carbon, and oxygen elements in the Cu and Ta films, and the results of SIMS and GDMS analysis were carefully considered. The Cu and Ta films were deposited on Si (100) substrates at zero substrate bias voltage and a substrate bias voltage of -50 V(Cu films) or -125 V(Ta films) using a non-mass separated ion beam deposition method. As a result of SIMS with Cs+ ion beam, in the case of the Cu and Ta films deposited without the substrate bias voltage, many strong peaks were observed, which is considered to be detected as a the cluster state such as CxHx, OxHx, CxOxHx. All the peaks of SIMS results could be interpreted by the combination of these dominant impurities. Moreover, it was confirmed that the quantitative results of GDMS analysis were accordant to the SIMS results.

• Analytical Science and Technology
• /
• v.15 no.5
• /
• pp.399-409
• /
• 2002

A system software on-line spectral analysis of atomic emission spectrometer. The system program consisted of a control part for the optical instruments and the spectrum analysis part the artificial intelligence method to reduce nonlinear error of the wavelengths. McPHERSON 207 Monochromator controlled GPIB communication protocol, and the detector signal was measured from PMT by using A/D Amplifier that was made by Photon_Tek. co.. HNN(Hybrid Neural Network) of artificial intelligence technique was applied to the qualitative analysis of P, Cu, Fe, Cr, and that was accurately applied to the quantitative analysis of Cd with 10 ppb level better than the conventional methods.

• Analytical Science and Technology
• /
• v.5 no.2
• /
• pp.169-176
• /
• 1992

Analytical detection limits and Relative Ion Yield (RIY) by a jet type ion source glow discharge mass spectrometer(GD/MS) have been measured. With a jet type ion source, the sample loss rate for a Cu sample is 0.23 mg/min with 0.1 L/min gas flow rate and 0.11 mg/min with no gas flow rate. However, the ion intensity of Cu does not change significantly with thee variation of the gas flow rate. The RIY values obtained from the calibration curves of the six copper based standards were between 0.57 of Fe and 3.5 of Cr. The detection limits of most elements were in the range of 0.9 and 2.0 ppm when the glow discharge was operated at 4 mA, 1000V.

• Journal of Power Electronics
• /
• v.9 no.2
• /
• pp.164-172
• /
• 2009

Recently, 2-dimensional flat light sources have been attracting much attention for its use in LCD backlight applications because of its high luminous efficiency and uniformity. A long-gap discharge, mercury-tree flat fluorescent lamp has been developed, which shows a high brightness ($>5000\;cd/m^2$) and high luminous efficacy (60 lm/W). Additionally, it has a wide operating margin and stable driving condition with the aid of an auxiliary electrode. For driving the lamp, a narrow pulse power to maintain the glow discharge state is required. Since there has been no research for this kind of lamp driving, this paper proposes a newly developed short-pulse, high-voltage lamp-driving scheme. The proposed lamp system uses a ballast with a coupled-inductor in order to raise the short pulse voltage up to the lamp ignition level and to obtain energy-recovery action during the glow discharge mode. The operation principles are presented and also the system performances such as the lighting efficiency, spatial and angular uniformities are evaluated by hardware experiments. The results show that the proposed lighting system is a good candidate for the next-generation of LCD backlight systems.

• Proceedings of the KIEE Conference
• /
• 1998.07e
• /
• pp.1767-1769
• /
• 1998

We have established a pulsed electron beam generation system with an energy of 200[keV], pulse repetition rate of 200[Hz], and several tens of [${\mu}s$] pulse width. The system is characterized by a cold cathode that is simpler than the hot cathode. Target object does not need to be scanned because of large aperture electron beam of 300[$cm^2$]. Electron source is secondary electrons that are generated when the ions from the glow discharge collide on the cathode surface. In this paper, the discharge current characteristics are investigated experimentally as a function of He gas pressure in order to obtain stable glow discharge. And computer simulations are carried out as a preliminary study for the development of low energy large aperture electron beam generator. The variation of electon beam current is investigated as a function of rising time of high voltage when 20[kV] potential is applied in 20[mTorr] pressure.

• Journal of the Korean Vacuum Society
• /
• v.14 no.1
• /
• pp.49-57
• /
• 2005

The characteristics of current and voltage in a basic discharge experiment are investigated for a cold cathode fluorescent lamp with ballast capacitors attached at both ends of lamp and for a capacitive coupled external electrode fluorescent lamp. In the current-voltage characteristics for a cold cathode fluorescent lamp except ballast capacitors, it is shown that the typical glow discharge with the cathode fall follows after the dark current and Townsend firing discharge. However, in the characteristics for a cold cathode fluorescent lamp including ballast capacitors, the current increases as the voltage increases in the glow discharge region without representing a cathode fall since the most voltage is loaded at two capacitors. The characteristics for the external electrode fluorescent lamp shows the same as that of the cold cathode fluorescent lamp in the respect of glow discharge characters, and the external electrode itself roles the ballast capacitor.