• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.711-711
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• 2009

Global warming has been widely recognized as a serious problem threatening the future of human beings. It is caused by the buildup in the atmosphere of greenhouse gases, such as carbon dioxide, methane, hydrofluorocarbons (HFCs), and sulfur hexafluoride (SF6). Particularly, SF6 has extremely high global warming potential compare to those of other global warming gases. One option for mitigating this greenhouse gas is the development of an effective process for capturing and separating these gases from anthropogenic sources. In general, gas hydrates can be formed under high pressure and low temperature. However, SF6 gas is known to form hydrate under relatively milder conditions. Therefore, technological and economical effects could be expected for the separation of SF6 gas from waste gas mixtures. In this study, we carried out morphological study for the SF6 hydrate crystals to understand its formation and growth mechanisms. The observations were made in high-pressure optical cell charged with liquid water and SF6 gas at constant pressure and temperature. Initially SF6 hydrate formed at the surface between gas and liquid regions, and then subsequent dendrite crystals grew at the wall above the gas/water interface. The visual observations of crystal nucleation, migration, growth and interference were reported. The detailed growth characteristics of SF6 hydrate crystals were discussed in this study.

• 대한조선학회논문집
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• 제55권5호
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• pp.415-420
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• 2018

The development of sail gas has increased the production of ethane as well as natural gas. The decline in the market price for ethane has led to a change in the petroleum-based ethylene production process into an ethane-based ethylene production process and an increase in the ethane/ethylene trade volume. Large-scale ethane/ethylene carrier have been needed due to an increase in long-distance trade from the US, and cargo type change have leaded to consider a liquefaction process to re-liquefy Boil-Off gas generated during the voyage. In this paper, the liquefaction system of Liquefied Ethane Gas carrier was evaluated with Low-GWP (Low-Global Warming Potential) refrigerant and process parameters, Boil-Off Gas pressure and expansion valve outlet pressure, were optimized. Low-GWP refrigerants were propane (R290), propylene(R1270), carbon dioxide(R744) was considered at two type of liquefaction process such as Linde and cascade cycle. The results show that the optimal pressure point depends on the individual refrigerant and the highest liquefaction efficiency of carbon dioxide (R744) - propane (R290) refrigerant.

• 한국주조공학회지
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• 제23권3호
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• pp.107-113
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• 2003

• 한국유기농업학회지
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• 제21권2호
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• pp.189-205
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• 2013

Climate change is rapidly getting worse. In Korea, the average temperature has increased by $1.5^{\circ}C$ over the last 100 years. In terms of global warming, it causes regional climate change, extreme weather phenomena and change of cultivated area. moreover, Global Warming brings both direct and indirect damage to agricultural cultivation. Global warming was accelerated by the greenhouse gas emissions which is by industry. In addition, Greenhouse gas emissions are increasing. In agriculture Thus we need to figure out how to analyze and to reduce greenhouse gas emissions and its cause. This study assumes that it is the introduction of the bio-energy using compost to facility house and it analyzes that there is the difference between in the future in utilizing compost due to the introduction of bio-energy facility houses; Environmental effect and Environmental effect which are generally used. This research is a previous step for resource-circulating, farming, utilizing a variety of by-products of the agricultural sector as an environmental assessment studies for the future completion of resource-circulating agriculture.

• 동력기계공학회지
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• 제21권6호
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• pp.110-116
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• 2017

Recently the global warming caused by greenhouse gas has emerged as a global environmental problem. For this reason the continued efforts to reduce greenhouse gas emission by international cooperation and each country are in progress. Climate changing has been recognized as the world economy development from fossil fuel use is the culprit. The international maritime organization marine environment protection committee of the global warming reduction emerged restrictions on air pollution have been strengthened. Therefore, the author has investigated the effects of fuel temperature on the characteristics of combustion and performance, using an four-cycle, six cylinders and direct injection diesel engine. The results of cylinder pressure, rate of pressure rise, rate of heat release and specific fuel consumption were increased by changing of fuel temperature.

• 한국가스학회지
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• 제25권4호
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• pp.36-42
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• 2021

쓰레기 매립지에 발생하는 매립지가스(Landfill gas)를 대기 중으로 방출할 경우에 매립지가스에서 많은 부분을 차지하고 있는 지구온난화 지수(global warming potential)가 높은 메탄가스를 배출하게 되어 기후변화에 악영향을 주게 되고, 매립지가스에 함유되어 있는 메탄을 내연기관의 연료로 활용하여 연소하여 발전을 하게 되면 이산화탄소 형태로 대기 중으로 배출하게 되어 온난화 지수를 낮추는 데도 기여를 할 수 있게 된다. 따라서 매립지가스를 내연기관을 이용한 발전용 연료로 사용하기 위해서 엔진의 열효율을 높이는 것이 중요하기 때문에 기존의 믹서 방식 기술을 이용한 연료공급 방식보다는 실린더별로 흡기포트에서 전자 제어 인젝터를 이용하여 기체 분사를 하는 방식의 연료공급 시스템을 사용하는 것이 필요하게 된다. 따라서 전자 제어 기체 분사 방식 기술을 이용하기 위해서는 매립지가스의 사용 조건에 따른 질량 유량을 정확히 측정하는 것이 중요하게 된다. 이를 위하여 본 연구에서는 매립지가스를 기체 분사할 경우에 분사량을 측정 및 계산하는 연구를 수행하였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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• pp.711-714
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• 2001

A new technology to make fluoride gas such as NF$_3$contained in the exhaust gas from semiconductor manufacturing plants convert directly into a harmless substance have been established and new concept on the disposal treatment of global warming gases were presented. Experimental results verify that the chemical reactions can be take place at substantially lower temperature of 80-40$0^{\circ}C$ as compared with the combustion treatment method. Reaction product is mainly metal fluoride which is a harmless and a valuable chemical material as one of new resources. The other favorable characteristics are that the continuous treatment is possible at a low temperature under atmospheric pressure. Furthermore this process is compact, easily controllable and safely operable at low running cost. This paper concerns with a new harmless disposal treatment of toxic global warming gas.

• 한국항해항만학회지
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• 제34권3호
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• pp.189-194
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• 2010

최근 지구 환경 문제의 심각성이 대두되면서, 전과정 평가(Life Cycle Assessment)에 대한 선박 적용 연구가 조금씩 진행되고 있다. 본 논문에서는 선박 LCA 연구의 일환으로 선박 배기 가스 분석을 수행하였다. 이를 위하여 화물선에 대한 온실 배기 가스 배출 분석을 수행하였다. 대상 선박은 벌크선박과 유조선 등 2척을 모델로 삼았으며 과거 수년간의 실적 데이터를 분석하여 운항인벤토리 중 온실 배출가스의 정략적 데이터를 분석하였다. 이 분석을 통하여 화물선 운송 시 화물 1톤을 1마일 수송하는데 배출되는 배기 가스량의 분석을 시도하였다.

• 한국농공학회논문집
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• 제60권1호
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• pp.79-87
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• 2018

Water management impacts both methane ($CH_4$) and nitrous oxide ($N_2O$) emissions from rice paddy fields. Although irrigation is one of the most important methods for reducing $CH_4$ emission in rice production systems it can also $N_2O$ emissions and reduce crop yields. A feasibility study on the system of rice intensification (SRI) methods with respect to irrigation requirements, greenhouse gas (GHG) emissions was conducted for either 2 or 3 years depending on the treatment in Korea. The SRI methods (i.e. SRI and midsummer drainage (MD) with conventional practice (CT)) reduced the irrigation requirement by 49.0 and 22.0 %, respectively. Global warming contribution of GHG to different depending on the type of GHG. Therefore, the emission of $CH_4$ and $N_2O$ shall be converted to Global Warming Potential (GWP). The GHG emission from the conventional practice with midsummer drainage (MD) and the SRI plots, in GWP were reduced by 49.1 and 77.1 %, respectively. Application of SRI water management method could help to improve Korea's water resources and could thus contribute to mitigation of the negative effects of global warming.