• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.711-711
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• 2009

Global warming has been widely recognized as a serious problem threatening the future of human beings. It is caused by the buildup in the atmosphere of greenhouse gases, such as carbon dioxide, methane, hydrofluorocarbons (HFCs), and sulfur hexafluoride (SF6). Particularly, SF6 has extremely high global warming potential compare to those of other global warming gases. One option for mitigating this greenhouse gas is the development of an effective process for capturing and separating these gases from anthropogenic sources. In general, gas hydrates can be formed under high pressure and low temperature. However, SF6 gas is known to form hydrate under relatively milder conditions. Therefore, technological and economical effects could be expected for the separation of SF6 gas from waste gas mixtures. In this study, we carried out morphological study for the SF6 hydrate crystals to understand its formation and growth mechanisms. The observations were made in high-pressure optical cell charged with liquid water and SF6 gas at constant pressure and temperature. Initially SF6 hydrate formed at the surface between gas and liquid regions, and then subsequent dendrite crystals grew at the wall above the gas/water interface. The visual observations of crystal nucleation, migration, growth and interference were reported. The detailed growth characteristics of SF6 hydrate crystals were discussed in this study.

• Journal of the Society of Naval Architects of Korea
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• v.55 no.5
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• pp.415-420
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• 2018

The development of sail gas has increased the production of ethane as well as natural gas. The decline in the market price for ethane has led to a change in the petroleum-based ethylene production process into an ethane-based ethylene production process and an increase in the ethane/ethylene trade volume. Large-scale ethane/ethylene carrier have been needed due to an increase in long-distance trade from the US, and cargo type change have leaded to consider a liquefaction process to re-liquefy Boil-Off gas generated during the voyage. In this paper, the liquefaction system of Liquefied Ethane Gas carrier was evaluated with Low-GWP (Low-Global Warming Potential) refrigerant and process parameters, Boil-Off Gas pressure and expansion valve outlet pressure, were optimized. Low-GWP refrigerants were propane (R290), propylene(R1270), carbon dioxide(R744) was considered at two type of liquefaction process such as Linde and cascade cycle. The results show that the optimal pressure point depends on the individual refrigerant and the highest liquefaction efficiency of carbon dioxide (R744) - propane (R290) refrigerant.

• Journal of Korea Foundry Society
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• v.23 no.3
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• pp.107-113
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• 2003

• Korean Journal of Organic Agriculture
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• v.21 no.2
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• pp.189-205
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• 2013

Climate change is rapidly getting worse. In Korea, the average temperature has increased by $1.5^{\circ}C$ over the last 100 years. In terms of global warming, it causes regional climate change, extreme weather phenomena and change of cultivated area. moreover, Global Warming brings both direct and indirect damage to agricultural cultivation. Global warming was accelerated by the greenhouse gas emissions which is by industry. In addition, Greenhouse gas emissions are increasing. In agriculture Thus we need to figure out how to analyze and to reduce greenhouse gas emissions and its cause. This study assumes that it is the introduction of the bio-energy using compost to facility house and it analyzes that there is the difference between in the future in utilizing compost due to the introduction of bio-energy facility houses; Environmental effect and Environmental effect which are generally used. This research is a previous step for resource-circulating, farming, utilizing a variety of by-products of the agricultural sector as an environmental assessment studies for the future completion of resource-circulating agriculture.

• Journal of Power System Engineering
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• v.21 no.6
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• pp.110-116
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• 2017

Recently the global warming caused by greenhouse gas has emerged as a global environmental problem. For this reason the continued efforts to reduce greenhouse gas emission by international cooperation and each country are in progress. Climate changing has been recognized as the world economy development from fossil fuel use is the culprit. The international maritime organization marine environment protection committee of the global warming reduction emerged restrictions on air pollution have been strengthened. Therefore, the author has investigated the effects of fuel temperature on the characteristics of combustion and performance, using an four-cycle, six cylinders and direct injection diesel engine. The results of cylinder pressure, rate of pressure rise, rate of heat release and specific fuel consumption were increased by changing of fuel temperature.

• Journal of the Korean Institute of Gas
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• v.25 no.4
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• pp.36-42
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• 2021

When the landfill gas generated at the landfill site is released into the atmosphere, methane gas with a high global warming potential is emitted, which adversely affects climate change. When methane contained in landfill gas is used as fuel for internal combustion engines and burned to generate electricity, it is emitted into the atmosphere in the form of carbon dioxide, which can contribute to lowering the global warming potential. Therefore, in order to use the landfill gas as fuel for power generation using an internal combustion engine, it is important to increase the thermal efficiency of the engine. Thus, it is necessary to use a fuel supply system in which gas is injected using an electronically controlled injector at an intake port for each cylinder rather than a fuel supply technology using the conventional mixer technology. In order to use the electronically controlled gas injection method, it is important to accurately measure the mass flow rate according to the conditions of using landfill gas. For this, a study was conducted to measure the injection amount and calculate them in order for the intake port gas injection of landfill gas.

• Proceedings of the IEEK Conference
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• 2001.10a
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• pp.711-714
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• 2001

A new technology to make fluoride gas such as NF$_3$contained in the exhaust gas from semiconductor manufacturing plants convert directly into a harmless substance have been established and new concept on the disposal treatment of global warming gases were presented. Experimental results verify that the chemical reactions can be take place at substantially lower temperature of 80-40$0^{\circ}C$ as compared with the combustion treatment method. Reaction product is mainly metal fluoride which is a harmless and a valuable chemical material as one of new resources. The other favorable characteristics are that the continuous treatment is possible at a low temperature under atmospheric pressure. Furthermore this process is compact, easily controllable and safely operable at low running cost. This paper concerns with a new harmless disposal treatment of toxic global warming gas.

• Journal of Navigation and Port Research
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• v.34 no.3
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• pp.189-194
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• 2010

As the seriousness of the global environment is gaining our attention recently, studies on application of LCA(Life Cycle Assessment) to ship are being carried out dynamically in various industrial fields. This study was carried out to examine the application of LCA to ships and was focused on the inventory analysis on global warming gas from merchant cargo ships. Two merchant cargo ships were adopted as ship models. Actual voyage data of at last several years was used to analysis the ship's exhaust gas inventory. The analysis shows how many weight of global warming gas being exhausted to transport 1 ton of each cargo per 1 nautical mile.

• Journal of The Korean Society of Agricultural Engineers
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• v.60 no.1
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• pp.79-87
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• 2018

Water management impacts both methane ($CH_4$) and nitrous oxide ($N_2O$) emissions from rice paddy fields. Although irrigation is one of the most important methods for reducing $CH_4$ emission in rice production systems it can also $N_2O$ emissions and reduce crop yields. A feasibility study on the system of rice intensification (SRI) methods with respect to irrigation requirements, greenhouse gas (GHG) emissions was conducted for either 2 or 3 years depending on the treatment in Korea. The SRI methods (i.e. SRI and midsummer drainage (MD) with conventional practice (CT)) reduced the irrigation requirement by 49.0 and 22.0 %, respectively. Global warming contribution of GHG to different depending on the type of GHG. Therefore, the emission of $CH_4$ and $N_2O$ shall be converted to Global Warming Potential (GWP). The GHG emission from the conventional practice with midsummer drainage (MD) and the SRI plots, in GWP were reduced by 49.1 and 77.1 %, respectively. Application of SRI water management method could help to improve Korea's water resources and could thus contribute to mitigation of the negative effects of global warming.